Ukufakwa kwefilimu encane kuyinqubo eyisisekelo esetshenziswa embonini ye-semiconductor, kanye nakwezinye izindawo eziningi zesayensi yezinto zokwakha kanye nobunjiniyela. Kuhilela ukudalwa kwengqimba encane yezinto ezingaphansi komhlaba. Amafilimu afakiwe angaba nobubanzi obukhulu, kusukela ezingqimbeni ezimbalwa ze-athomu kuya kuma-micrometer amaningana obukhulu. Lawa mafilimu angafeza izinjongo eziningi, njengeziqhubi zikagesi, izivikelo, izembozo zokukhanya, noma izithiyo zokuvikela.
Nazi izindlela eziyinhloko ezisetshenziselwa ukubekwa kwefilimu encane:
Ukususwa Komusi Ongokoqobo (i-PVD)
Ukuphalaza: Umsebe we-ion onamandla aphezulu usetshenziselwa ukuxosha ama-athomu ezintweni eziqondiwe, bese efakwa ku-substrate.
Ukuhwamuka:** Izinto zifudunyezwa ku-vacuum kuze kube yilapho zihwamuka, bese umhwamuko uqina phezu kwe-substrate.
Ukufakwa Kwezingqimba Ze-Atomic (ALD)
I-ALD iyindlela lapho ifilimu ikhuliswa khona ku-substrate ungqimba olulodwa lwe-athomu ngesikhathi. Ilawulwa kakhulu futhi ingadala amafilimu anembile kakhulu futhi ahambisanayo.
I-Molecular Beam Epitaxy (MBE)
I-MBE iyindlela yokukhula ye-epitaxial lapho imisebe yama-athomu noma ama-molecule iqondiswa khona endaweni efudumele ukuze kwakhiwe ifilimu encane ekristalu.
Izinzuzo Zokufakwa Kwefilimu Encane
Ukusebenza okuthuthukisiwe: Amafilimu anganikeza izakhiwo ezintsha ku-substrate, njengokumelana nokuklwebheka noma ukuhanjiswa kukagesi.
Ukusetshenziswa kwezinto ezisetshenziswayo okuncishisiwe: Kuvumela ukudalwa kwamadivayisi ayinkimbinkimbi anokusetshenziswa kwezinto ezincane, okunciphisa izindleko.
Ukwenza Ngokwezifiso: Amafilimu angenziwa ngendlela yokuthi abe nezakhiwo ezithile zemishini, zikagesi, ze-optical, noma zamakhemikhali.
Izicelo
Amadivayisi e-semiconductor: Ama-Transistors, amasekethe ahlanganisiwe, kanye nezinhlelo ze-microelectromechanical (MEMS).
Izembozo ezibonakalayo: Izembozo ezingabonisi ukukhanya futhi ezibonisa ukukhanya okuphezulu kumalensi namaseli elanga.
Izembozo ezivikelayo: Ukuvimbela ukugqwala noma ukuguguleka kwamathuluzi nemishini.
Ukusetshenziswa kwezokwelapha: Ukugqoka okufakwe ezithweni zezokwelapha noma ezinhlelweni zokulethwa kwemithi.
Ukukhethwa kwendlela yokufaka kuncike ezidingweni ezithile zohlelo lokusebenza, okuhlanganisa uhlobo lwezinto ezizofakwa, izakhiwo zefilimu ezifunwayo, kanye nemikhawulo yezindleko.
–Lesi sihloko sikhishwe yi-umenzi womshini wokumboza nge-vacuumI-Guangdong Zhenhua
Isikhathi sokuthunyelwe: Agasti-15-2024