Kev Siv Tshuab Nyias Zaj Duab Xis

Kev tso cov zaj duab xis nyias yog ib qho txheej txheem tseem ceeb uas siv hauv kev lag luam semiconductor, nrog rau ntau lwm qhov chaw ntawm kev tshawb fawb thiab kev tsim khoom siv. Nws cuam tshuam nrog kev tsim cov txheej nyias nyias ntawm cov khoom siv rau ntawm lub substrate. Cov zaj duab xis tso tawm tuaj yeem muaj ntau yam tuab, txij li ob peb txheej atomic mus rau ntau micrometers tuab. Cov zaj duab xis no tuaj yeem ua haujlwm ntau yam, xws li cov neeg xa hluav taws xob, cov insulators, cov txheej txheem kho qhov muag, lossis cov teeb meem tiv thaiv.

Nov yog cov txheej txheem tseem ceeb siv rau kev tso cov zaj duab xis nyias:
Kev Tso Pa Hauv Lub Cev (PVD)
Sputtering: Ib lub teeb ion siab siv los tsoo cov atoms tawm ntawm cov khoom siv, uas tom qab ntawd tso rau ntawm lub substrate.
Kev Ua Pa:** Cov khoom siv raug cua sov hauv lub tshuab nqus tsev kom txog thaum nws ua pa, thiab tom qab ntawd cov pa dej sib sau ua ke rau ntawm lub substrate.
Kev Tso Tawm Txheej Atomic (ALD)
ALD yog ib txoj kev siv uas ib daim zaj duab xis raug cog rau ntawm ib txheej substrate ib zaug. Nws raug tswj hwm zoo heev thiab tuaj yeem tsim cov zaj duab xis uas meej heev thiab sib xws.
Molecular Beam Epitaxy (MBE)
MBE yog ib txoj kev loj hlob epitaxial qhov twg cov kab ntawm cov atoms lossis molecules raug coj mus rau ntawm lub substrate sov kom tsim tau ib zaj duab xis nyias crystalline.
Cov txiaj ntsig ntawm Kev Tso Zaj Duab Xis Nyias
Kev ua haujlwm zoo dua: Cov yeeb yaj kiab tuaj yeem muab cov khoom tshiab rau lub substrate, xws li kev tiv thaiv khawb lossis kev ua hluav taws xob.
Txo kev siv khoom siv: Nws tso cai rau kev tsim cov khoom siv nyuaj nrog kev siv khoom siv tsawg kawg nkaus, txo cov nqi.
Kev Kho Kom Haum: Cov yeeb yaj kiab tuaj yeem kho kom haum kom muaj cov khoom siv kho tshuab, hluav taws xob, kho qhov muag, lossis tshuaj lom neeg.
Cov ntawv thov
Cov khoom siv semiconductor: Transistors, integrated circuits, thiab microelectromechanical systems (MEMS).
Cov txheej txheej kho qhov muag: Cov txheej txheej tiv thaiv kev cuam tshuam thiab cov txheej txheej cuam tshuam siab rau ntawm cov iav thiab cov roj teeb hnub ci.
Cov txheej tiv thaiv: Txhawm rau tiv thaiv kev xeb lossis kev hnav ntawm cov cuab yeej thiab tshuab.
Cov ntawv thov biomedical: Cov txheej txheem pleev xim rau ntawm cov khoom cog kho mob lossis cov txheej txheem xa tshuaj.
Qhov kev xaiv ntawm cov txheej txheem tso dej nyob ntawm qhov xav tau tshwj xeeb ntawm daim ntawv thov, suav nrog hom khoom siv uas yuav tsum tau tso, cov khoom ntawm zaj duab xis xav tau, thiab cov kev txwv nqi.

– Tsab xov xwm no yog tso tawm los ntawmlub tshuab nqus tsev txheej tshuab chaw tsim khoomGuangdong Zhenhua