ʻenehana hoʻokaʻawale ʻoniʻoni lahilahi

ʻO ka waiho ʻana o ka ʻili lahilahi kahi hana nui i hoʻohana ʻia i ka ʻoihana semiconductor, a me nā wahi ʻē aʻe o ka ʻepekema mea a me ka ʻenekinia. Pili ia i ka hana ʻana o kahi papa lahilahi o ka mea ma luna o kahi substrate. Hiki i nā ʻili i waiho ʻia ke loaʻa i kahi ākea o nā mānoanoa, mai kekahi mau papa atomika a i kekahi mau micrometers ka mānoanoa. Hiki i kēia mau ʻili ke lawelawe i nā kumu he nui, e like me nā alakaʻi uila, nā insulators, nā uhi optical, a i ʻole nā ​​​​​​mea pale.

Eia nā ʻano hana nui i hoʻohana ʻia no ka waiho ʻana o ka ʻili lahilahi:
Ka Waiho ʻana o ka Mahu Kino (PVD)
Hoʻoheheʻe ʻana: Hoʻohana ʻia kahi kukuna ion ikehu kiʻekiʻe e hoʻokuke i nā ʻātoma mai kahi mea i manaʻo ʻia, a laila waiho ma luna o ka substrate.
Ka mahu ʻana:** Hoʻomehana ʻia ka mea i loko o kahi mīkini hoʻoheheʻe a hiki i ka mahu ʻana, a laila hoʻopili ka mahu ma luna o ka substrate.
Ka Waiho ʻana o ka Papa ʻAtomika (ALD)
He ʻano hana ʻo ALD kahi e ulu ai kahi kiʻiʻoniʻoni ma luna o kahi substrate hoʻokahi papa atomika i ka manawa. Hoʻomalu nui ʻia a hiki ke hana i nā kiʻiʻoniʻoni pololei loa a kūlike.
ʻO ka Epitaxy Beam Molecular (MBE)
He ʻenehana ulu epitaxial ʻo MBE kahi e kuhikuhi ʻia ai nā kukuna o nā ʻātoma a i ʻole nā ​​​​molekala ma luna o kahi substrate i hoʻomehana ʻia e hana i kahi ʻili lahilahi crystalline.
Nā Pōmaikaʻi o ka Waiho ʻana o ka ʻIliʻili Lahilahi
Hana i hoʻonui ʻia: Hiki i nā kiʻiʻoniʻoni ke hāʻawi i nā waiwai hou i ka substrate, e like me ke kūpaʻa ʻana i ka ʻōpala a i ʻole ka conductivity uila.
Hoʻemi ʻia ka hoʻohana ʻana i nā mea: ʻAe ia i ka hana ʻana i nā mea paʻakikī me ka hoʻohana liʻiliʻi ʻana i nā mea, e hoʻemi ana i nā kumukūʻai.
Hoʻopilikino: Hiki ke hoʻopilikino ʻia nā kiʻiʻoniʻoni e loaʻa ai nā waiwai mechanical, electrical, optical, a i ʻole kemika.
Nā noi
Nā mea hana Semiconductor: Transistors, nā kaapuni i hoʻohui ʻia, a me nā ʻōnaehana microelectromechanical (MEMS).
Nā uhi ʻōniʻoniʻo: Nā uhi anti-reflective a me nā uhi kiʻekiʻe-reflective ma nā aniani a me nā cell solar.
Nā uhi pale: No ka pale ʻana i ka pala a i ʻole ke komo ʻana ma nā mea hana a me nā mīkini.
Nā noi biomedical: Nā uhi ʻana ma nā mea hoʻokomo lapaʻau a i ʻole nā ​​​​ʻōnaehana lawe lāʻau.
ʻO ke koho ʻana o ke ʻano hana waiho ʻana e pili ana i nā koi kikoʻī o ka noi, me ke ʻano o ka mea e waiho ʻia, nā waiwai kiʻiʻoniʻoni i makemake ʻia, a me nā palena kumukūʻai.

–Ua hoʻokuʻu ʻia kēia ʻatikala emea hana mīkini uhi hakahakaGuangdong Zhenhua