Ho beoa ha filimi e tšesaane ke ts'ebetso ea motheo e sebelisoang indastering ea semiconductor, hammoho le libakeng tse ling tse ngata tsa saense ea thepa le boenjiniere. E kenyelletsa ho thehoa ha lera le lesesaane la thepa holim'a substrate. Lifilimi tse beiloeng li ka ba le mefuta e mengata ea botenya, ho tloha ho mekhahlelo e 'maloa ea athomo ho isa ho li-micrometer tse 'maloa tse teteaneng. Lifilimi tsena li ka sebeletsa merero e mengata, joalo ka li-conductor tsa motlakase, li-insulator, li-optical coatings, kapa litšitiso tse sireletsang.
Mekhoa e meholo e sebelisoang bakeng sa ho boloka filimi e tšesaane ke ena:
Ho Ntša Mouoane oa 'Mele (PVD)
Ho qhala: Lehlaseli la ioni le nang le matla a mangata le sebelisoa ho qhaqha liathomo ho tloha nthong e reriloeng, ebe li lula holim'a substrate.
Ho fetoha mouoane:** Thepa e futhumatsoa ka vacuum ho fihlela e fetoha mouoane, ebe mouoane o kokobela holim'a substrate.
Ho Theoha ha Lera la Atomo (ALD)
ALD ke mokhoa oo filimi e hodiswang hodima substrate ka lera le le leng la athomo ka nako. E laolwa haholo mme e ka hlahisa difilimi tse nepahetseng haholo le tse ikgethang.
Epitaxy ea Molecular Beam (MBE)
MBE ke mokhoa oa kholo ea epitaxial moo mahlaseli a liathomo kapa limolek'hule a lebisoang holim'a substrate e futhumetseng ho etsa filimi e tšesaane ea kristale.
Melemo ea ho Hlahisa Filimi e Nyenyane
Tshebetso e ntlafetseng: Difilimi di ka fana ka thepa e ntjha ho substrate, jwalo ka ho hanyetsa ho ngoapa kapa ho tsamaisa motlakase.
Tšebeliso e fokotsehileng ea thepa: E lumella ho thehoa ha lisebelisoa tse rarahaneng tse nang le tšebeliso e fokolang ea thepa, e leng se fokotsang litšenyehelo.
Ho iketsetsa: Lifilimi li ka etsoa hore li be le thepa e itseng ea mechine, ea motlakase, ea optical, kapa ea lik'hemik'hale.
Likopo
Lisebelisoa tsa semiconductor: Li-transistors, lipotoloho tse kopantsoeng, le litsamaiso tsa microelectromechanical (MEMS).
Liaparo tsa mahlo: Liaparo tse thibelang ho bonahatsa le tse bonahatsang haholo lilenseng le liseleng tsa letsatsi.
Liaparo tse sireletsang: Ho thibela ho bola kapa ho tsofala ha lisebelisoa le mechini.
Ditshebediso tsa bongaka: Dikobo tse kentsweng di-implant tsa bongaka kapa ditsamaiso tsa ho isa meriana.
Khetho ea mokhoa oa ho beha thepa e itšetlehile ka litlhoko tse itseng tsa kopo, ho kenyeletsoa mofuta oa thepa e lokelang ho beoa, thepa ea filimi e lakatsehang, le lithibelo tsa litšenyehelo.
–Sengoloa sena se lokollotsoe kemoetsi oa mochini oa ho roala ka vacuum cleanerGuangdong Zhenhua
Nako ea poso: Phato-15-2024