Ukufakwa kwefilimu encinci yinkqubo esisiseko esetyenziswa kushishino lwe-semiconductor, kunye nakwezinye iindawo ezininzi zesayensi yezinto kunye nobunjineli. Kubandakanya ukwenziwa komaleko omncinci wezinto kwi-substrate. Iifilimu ezifakwe kwi-deposit zinokuba nobubanzi obubanzi, ukusuka kumaleko ambalwa e-athomu ukuya kuma-micrometer amaninzi ubukhulu. Ezi filimu zinokusebenza iinjongo ezininzi, ezinje ngee-conductors zombane, ii-insulators, ii-optical coatings, okanye izithintelo zokukhusela.
Nazi iindlela eziphambili ezisetyenziselwa ukubekwa kwefilimu encinci:
Ukususwa koMphunga woMzimba (i-PVD)
Ukutshiza: Umqadi we-ion onamandla aphezulu usetyenziselwa ukuwisa ii-athomu kwizinto ezijoliswe kuzo, ezithi emva koko zihlale kwi-substrate.
Ukufuma:** Le nto ifudunyezwa kwi-vacuum de ibe ngumphunga, uze emva koko umphunga ujiye kwi-substrate.
Ukubekwa kweMaleko yeAtomic (ALD)
I-ALD yindlela apho ifilimu ikhuliswa kwi-substrate inye i-atomic layer ngexesha. Ilawulwa kakhulu kwaye inokwenza iifilimu ezichanekileyo nezihambelanayo.
I-Molecular Beam Epitaxy (MBE)
I-MBE yindlela yokukhula kwe-epitaxial apho imisebe yee-athomu okanye iimolekyuli zijoliswa kwi-substrate eshushu ukuze zenze ifilimu encinci yekristale.
Iingenelo zokubekwa kwefilimu encinci
Ukusebenza okuphuculweyo: Iifilimu zinokubonelela ngeempawu ezintsha kwi-substrate, ezinje ngokumelana nokukrwela okanye ukuhanjiswa kombane.
Ukusetyenziswa kwezinto ezisetyenzisiweyo okuncitshisiweyo: Kuvumela ukwenziwa kwezixhobo ezintsonkothileyo ezinokusetyenziswa okuncinci kwezinto ezisetyenzisiweyo, nto leyo enciphisa iindleko.
Ukwenziwa ngokwezifiso: Iifilimu zinokulungiswa ukuba zibe neempawu ezithile zoomatshini, zombane, ze-optical, okanye zeekhemikhali.
Izicelo
Izixhobo ze-semiconductor: Iitransistor, iisekethe ezidibeneyo, kunye neenkqubo ze-microelectromechanical (MEMS).
Iingubo zokukhanya: Iingubo ezichasene nokukhanya kunye nezibane ezikhanyayo kakhulu kwiilensi nakwiiseli zelanga.
Iingubo zokukhusela: Ukuthintela ukugqwala okanye ukuguguleka kwezixhobo kunye noomatshini.
Ukusetyenziswa kwezonyango: Iingubo ezifakwe kwizixhobo zonyango okanye kwiinkqubo zokuhambisa amayeza.
Ukukhethwa kwendlela yokufaka inkunkuma kuxhomekeke kwiimfuno ezithile zesicelo, kubandakanya uhlobo lwezinto eziza kufakwa, iimpawu zefilimu ezifunekayo, kunye nemida yeendleko.
–Eli nqaku likhutshwe nguumenzi womatshini wokugquma nge-vacuumGuangdong Zhenhua
Ixesha leposi: Agasti-15-2024