Izembozo ze-PVD (Physical Vapor Deposition) ziyizindlela ezisetshenziswa kabanzi ekwakheni amafilimu amancane kanye nezembozo zomphezulu. Phakathi kwezindlela ezivamile, ukuhwamuka kokushisa kanye nokuchitheka kwegesi kunezinqubo ezimbili ezibalulekile ze-PVD. Nansi incazelo yazo ngayinye:
1. Ukuhwamuka Kokushisa
- Isimiso:Izinto zifudunyezwa ekamelweni le-vacuum kuze kube yilapho zihwamuka noma zincibilika. Izinto eziphekwe ngomphunga bese zihlangana zibe yi-substrate ukuze zakhe ifilimu encane.
- Inqubo:
- Izinto ezisetshenziswayo (insimbi, i-ceramic, njll.) ziyashiswa, ngokuvamile kusetshenziswa ukushisa okuvikelayo, umsebe we-electron, noma i-laser.
- Uma izinto zifika endaweni yokuhwamuka, ama-athomu noma ama-molecule ayashiya umthombo bese ehamba nge-vacuum aye endaweni engaphansi komhlaba.
- Ama-athomu ahwamukile ayahlangana ebusweni be-substrate, akhe ungqimba oluncane.
- Izicelo:
- Ivame ukusetshenziswa ukufaka izinsimbi, ama-semiconductor, kanye nama-insulator.
- Izicelo zifaka phakathi izembozo ezibonakalayo, ukuqedwa kokuhlobisa, kanye ne-microelectronics.
- Izinzuzo:
- Amanani aphezulu okufaka imali.
- Kulula futhi kuyabiza kakhulu ezintweni ezithile.
- Ingakhiqiza amafilimu ahlanzekile kakhulu.
- Okubi:
- Kunqunyelwe ezintweni ezinezindawo zokuncibilika eziphansi noma ukucindezela okuphezulu komhwamuko.
- Ukumbozwa okungekuhle kwezinyathelo phezu kwezindawo eziyinkimbinkimbi.
- Ukulawulwa okuncane kokwakheka kwefilimu ye-alloys.
2. Ukuphalaza
- Isimiso: Ama-ion avela ku-plasma asheshiswa aye endaweni eqondiwe, okwenza ama-athomu akhishwe (akhishwe) esuka endaweni eqondiwe, abese efakwa endaweni engaphansi.
- Inqubo:
- Izinto eziqondiwe (insimbi, i-alloy, njll.) zifakwa ekamelweni, bese kungeniswa igesi (ngokuvamile i-argon).
- Kusetshenziswa i-voltage ephezulu ukudala i-plasma, efaka i-ion kugesi.
- Ama-ion ashajelwe kahle avela ku-plasma asheshiswa aye endaweni eshajelwe kabi, ekhipha ama-athomu ebusweni.
- Lawa ma-athomu abe esehlala phezu kwe-substrate, akha ifilimu elincane.
- Izicelo:
- Kusetshenziswa kabanzi ekukhiqizeni ama-semiconductor, engilazini yokumboza, nasekwakheni izembozo ezingagugi.
- Kuhle kakhulu ekudaleni amafilimu amancane axubile, e-ceramic, noma ayinkimbinkimbi.
- Izinzuzo:
- Ingabeka izinto eziningi ezahlukene, okuhlanganisa izinsimbi, ama-alloy, nama-oxide.
- Ukufana okuhle kakhulu kwefilimu kanye nokumbozwa kwezinyathelo, ngisho nasezimo eziyinkimbinkimbi.
- Ukulawula okunembile ukujiya kwefilimu kanye nokwakheka kwayo.
- Okubi:
- Amazinga okufakwa aphansi uma kuqhathaniswa nokuhwamuka kokushisa.
- Kubiza kakhulu ngenxa yobunzima bemishini kanye nesidingo samandla aphezulu.
Umehluko Oyinhloko:
- Umthombo Wokudilizwa:
- Ukuhwamuka kokushisa kusebenzisa ukushisa ukuhwamuka kwezinto, kuyilapho ukuhudula kusebenzisa ukuqhumisa ama-ion ukuze kukhishwe ama-athomu ngokoqobo.
- Amandla Adingekayo:
- Ukuhwamuka kokushisa ngokuvamile kudinga amandla amancane kunokuphalaza ngoba kuncike ekufudumaleni kunokukhiqizwa kwe-plasma.
- Izinto zokwakha:
- Ukuchitha amanzi kungasetshenziswa ukufaka uhla olubanzi lwezinto zokwakha, okuhlanganisa nalezo ezinamazinga aphezulu okuncibilika, okunzima ukuhwamuka.
- Ikhwalithi Yefilimu:
- Ukutshiza ngokuvamile kunikeza ukulawula okungcono phezu kobukhulu befilimu, ukufana, kanye nokwakheka kwayo.
Isikhathi sokuthunyelwe: Septhemba-27-2024
