PVD txheej: Thermal evaporation thiab sputtering

PVD (Physical Vapor Deposition) coatings yog cov txheej txheem siv dav dav rau kev tsim cov zaj duab xis nyias thiab cov txheej txheem saum npoo. Ntawm cov txheej txheem feem ntau, thermal evaporation thiab sputtering yog ob qho txheej txheem PVD tseem ceeb. Nov yog kev faib tawm ntawm txhua yam:

1. Kev Ua Kom Sov Los Ntawm Cua Sov

• Lub Ntsiab Cai:Cov khoom siv raug cua sov hauv lub tshuab nqus tsev kom txog thaum nws ua pa lossis ua kom nws tsis muaj zog. Cov khoom siv uas tau ua pa lawm ces yuav sib sau ua ke rau ntawm ib lub substrate kom ua ib daim nyias nyias.
• Txheej Txheem:
• Ib qho khoom siv (hlau, ceramic, thiab lwm yam) raug cua sov, feem ntau yog siv cov cua sov resistive, electron beam, lossis laser.
• Thaum cov khoom siv mus txog nws qhov chaw evaporation, cov atoms lossis molecules tawm hauv qhov chaw thiab mus ncig los ntawm lub tshuab nqus tsev mus rau lub substrate.
• Cov atoms evaporated condense rau ntawm qhov chaw ntawm lub substrate, tsim ib txheej nyias nyias.
• Cov ntawv thov:
• Feem ntau siv los tso cov hlau, semiconductors, thiab insulators.
• Cov ntawv thov suav nrog cov txheej txheem kho qhov muag, cov khoom tiav zoo nkauj, thiab microelectronics.
• Cov txiaj ntsig:
• Cov nqi tso dej siab.
• Yooj yim thiab pheej yig rau qee cov ntaub ntawv.
• Muaj peev xwm tsim cov yeeb yaj kiab ntshiab heev.
• Qhov Tsis Zoo:
• Txwv rau cov ntaub ntawv uas muaj cov ntsiab lus melting qis lossis cov pa siab.
• Kev npog cov kauj ruam tsis zoo rau ntawm cov chaw nyuaj.
• Tsawg dua kev tswj hwm cov yeeb yaj kiab rau cov hlau nplaum.

2. Kev tawg paj

• Lub Ntsiab Cai: Cov ions los ntawm cov plasma raug nrawm mus rau cov khoom siv uas xav tau, ua rau cov atoms raug ntiab tawm (sputtered) ntawm cov khoom siv, uas tom qab ntawd tso rau ntawm lub substrate.
• Txheej Txheem:
• Ib yam khoom siv (hlau, alloy, thiab lwm yam) raug muab tso rau hauv lub chamber, thiab ib qho roj (feem ntau yog argon) raug qhia.
• Ib qho hluav taws xob siab siv los tsim cov plasma, uas ionizes cov roj.
• Cov ions uas muaj nqi zoo los ntawm cov plasma raug nrawm mus rau lub hom phiaj uas muaj nqi tsis zoo, ua rau cov atoms tawm ntawm qhov chaw.
• Cov atoms no ces tso rau ntawm lub substrate, tsim ib zaj duab xis nyias.
• Cov ntawv thov:
• Siv dav hauv kev tsim cov khoom siv semiconductor, txheej iav, thiab tsim cov txheej tiv taus hnav.
• Zoo tagnrho rau kev tsim cov hlau alloy, ceramic, lossis cov yeeb yaj kiab nyias nyias.
• Cov txiaj ntsig:
• Muaj peev xwm tso ntau yam khoom siv, suav nrog cov hlau, cov khoom sib xyaw, thiab cov oxides.
• Kev sib npaug zoo ntawm zaj duab xis thiab kev npog kauj ruam zoo heev, txawm tias nyob rau ntawm cov duab nyuaj.
• Kev tswj hwm qhov tuab thiab cov qauv ntawm zaj duab xis.
• Qhov Tsis Zoo:
• Cov nqi tso dej qeeb dua piv rau kev ua kom sov.
• Kim dua vim yog qhov nyuaj ntawm cov khoom siv thiab xav tau lub zog ntau dua.

Qhov Txawv Tseem Ceeb:

• Qhov Chaw Muab Tso Rau Hauv:
• Kev ua kom sov siv cua sov los ua kom cov khoom qhuav, thaum sputtering siv ion bombardment los rhuav tshem cov atoms.
• Lub zog xav tau:
• Thermal evaporation feem ntau yuav tsum tau siv zog tsawg dua li sputtering vim nws vam khom rau cua sov es tsis yog plasma tiam.
• Cov Khoom Siv:
• Sputtering siv tau los tso ntau yam khoom siv, suav nrog cov uas muaj cov ntsiab lus melting siab, uas nyuaj rau ua kom qhuav.
• Zaj duab xis zoo:
• Feem ntau sputtering muab kev tswj zoo dua ntawm cov zaj duab xis thickness, uniformity, thiab composition.