Izembatho ze-PVD (Physical Vapor Deposition) zingamasu asetshenziswa kakhulu okudala amafilimu amancanyana kanye nezingubo ezingaphezulu. Phakathi kwezindlela ezivamile, ukuhwamuka okushisayo nokufafaza kuyizinqubo ezimbili ezibalulekile ze-PVD. Nakhu ukuhlukaniswa ngakunye:
1. Ukuhwamuka okushisayo
- Isimiso:I-Material ishiselwa ku-vacuum ekamelweni kuze kube yilapho ihwamuka noma iyancipha. Izinto ezifakwe umhwamuko zibe sezihlangana zibe yi-substrate ukuze zenze ifilimu elincanyana.
- Inqubo:
- Into ewumthombo (insimbi, i-ceramic, njll.) iyashiswa, ngokuvamile kusetshenziswa ukufudumeza okuphikisayo, i-electron beam, noma i-laser.
- Uma impahla isifinyelele endaweni yayo yokuhwamuka, ama-athomu noma ama-molecule ashiya umthombo futhi adlule ku-vacuum aye endaweni engaphansi.
- Ama-athomu ahwamukile ajiya phezu kwe-substrate, enze ungqimba oluncane.
- Izicelo:
- Okuvame ukusetshenziselwa ukufaka izinsimbi, ama-semiconductors, nama-insulators.
- Izicelo zifaka ama-optical coatings, ama-finishing okuhlobisa, nama-microelectronics.
- Izinzuzo:
- Amazinga aphezulu okubekwa.
- Ilula futhi ingabizi ezintweni ezithile.
- Ingakhiqiza amafilimu amsulwa kakhulu.
- Ububi:
- Kukhawulelwe ezintweni ezincibilikayo ezinamaphoyinti aphansi noma umfutho womoya ophezulu.
- Ukumbozwa kahle kwezinyathelo ezindaweni eziyinkimbinkimbi.
- Ukulawula okuncane ekubunjweni kwefilimu kuma-alloys.
2. Ukuklolodela
- Isimiso: Ama-ion asuka ku-plasma asheshiselwa kokubalulekile okuqondiwe, okubangela ukuthi ama-athomu akhishwe (aqhunyiswe) kumpokophelo, abese efakwa ku-substrate.
- Inqubo:
- Impahla ehlosiwe (insimbi, i-alloy, njll.) ifakwe ekamelweni, futhi igesi (ngokuvamile i-argon) yethulwa.
- I-voltage ephezulu isetshenziswa ukudala i-plasma, eyenza i-ionize igesi.
- Ama-ion ashajwe kahle asuka ku-plasma asheshiselwa lapho kuhloswe khona ukushajwa kabi, akhiphe ama-athomu angaphandle.
- Lawa ma-athomu abe esefaka ku-substrate, enze ifilimu elincanyana.
- Izicelo:
- Isetshenziswa kakhulu ekwenziweni kwe-semiconductor, ingilazi yokunameka, nokudala ama-coatings amelana nokugqokwa.
- Ilungele ukudala i-alloy, i-ceramic, noma amafilimu amancane ayinkimbinkimbi.
- Izinzuzo:
- Ingafaka inqwaba yezinto ezisetshenziswayo, okuhlanganisa izinsimbi, ama-alloys, nama-oxides.
- Ukufana kwefilimu okuhle kakhulu nokumbozwa kwezinyathelo, ngisho nasezimo eziyinkimbinkimbi.
- Ukulawula okunembile phezu kogqinsi nokwakheka kwefilimu.
- Ububi:
- Amazinga okubeka kancane uma kuqhathaniswa nokuhwamuka kokushisa.
- Ibiza kakhulu ngenxa yobunzima bemishini kanye nesidingo samandla aphezulu.
Umehluko Obalulekile:
- Umthombo Wokubekwa:
- Ukuhwamuka okushisayo kusebenzisa ukushisa ukuhwamuka, kuyilapho ukufafaza kusebenzisa ibhomu le-ion ukukhipha ama-athomu ngokomzimba.
- Amandla ayadingeka:
- Ukuhwamuka okushisayo ngokuvamile kudinga amandla amancane kunokufafaza njengoba kuncike ekushiseni esikhundleni sokukhiqizwa kwe-plasma.
- Izinto zokwakha:
- I-Sputtering ingasetshenziselwa ukufaka uhla olubanzi lwezinto zokwakha, kufaka phakathi lezo ezinamaphoyinti ancibilikayo aphezulu, okunzima ukuhwamuka.
- Ikhwalithi Yefilimu:
- I-Sputtering ngokuvamile ihlinzeka ngokulawula okungcono kwefilimu ukushuba, ukufana, kanye nokwakheka.
Isikhathi sokuthumela: Sep-27-2024