Emkhakheni wobuchwepheshe bokumboza nge-vacuum, amafilimu amancane ngokuvamile angahlukaniswa ngezingubo zensimbi kanye nezingubo ezingezona ezensimbi, kuye ngokuthi izinto ezimbozwayo zihluke kanjani. Lezi zigaba ezimbili zihluka kakhulu ngezindlela zokubeka, izakhiwo zefilimu, kanye nezindawo zokusetshenziswa. Ukuqonda umehluko wazo kusiza onjiniyela bezinqubo ukuthi bakhethe izinto ezifanele kakhulu kanye nemingcele yokukhiqiza.
I. Izici kanye Nezimiso Zokusebenza Izembozo Zensimbi
Ukwembozwa kwensimbi kubhekisela ekubekeni amatshe ensimbi phezu kwezingxenye ezingaphansi komhlaba ngokusebenzisa amasu afana nokuhwamuka kokushisa noma ukuphalaza nge-magnetron.
Izinto Ezivamile: Al, Cu, Ag, Au, Ti, Cr, njll.
Indlela Yokubeka Izinto: Ama-athomu ensimbi, ngemva kokuhwamuka noma ukuchitheka ku-vacuum, abhekana nokusabela okuncane kwamakhemikhali futhi ajiyane esimweni sawo sangaphakathi aye ku-substrate.
Izakhiwo Eziyinhloko:
Ukuqhuba kukagesi okuphezulu
Ukukhanya okuhle kakhulu, okusetshenziswa kabanzi ezibukweni ezibonakalayo
Ukunamathela okuqinile kanye nokuguquguquka okuhle
Izicelo Ezijwayelekile:
Izendlalelo ze-electrode kumadivayisi we-semiconductor
Izimbozo ezibonisa ukukhanya
Izembozo zokuhlobisa
II. Izici kanye Nezimiso Zokumboza Okungeyona Insimbi
Izimbozo ezingezona ezensimbi zifaka phakathi ama-oxide, ama-nitride, nama-carbide, ngokuvamile afakwa yi-reactive sputtering noma i-ion plating.
Izinto Ezijwayelekile: SiO₂, TiO₂, Al₂O₃, Si₃N₄, DLC (Ikhabhoni Efana Nedayimane), njll.
Indlela Yokubeka Izinto: Ama-target ensimbi asabela namagesi enqubo (isb., O₂, N₂, CH₄), akha izinhlobo ezihlanganisiwe ezifakwa ku-substrate.
Izakhiwo Eziyinhloko:
Ubulukhuni obuphezulu kanye nokumelana nokuguguleka
Izakhiwo ezinhle kakhulu zokukhanya, njengokucaca okuphezulu noma ukusebenza okulwa nokukhanya
Ukushisa okunamandla kagesi
Izicelo Ezijwayelekile:
Izembozo ezibonakalayo (isb., amafilimu e-AR, izembozo zesihlungi)
Izendlalelo ezivikelayo (isb., amafilimu e-DLC alwa nokuklwebheka)
Izendlalelo ze-dielectric kumadivayisi kagesi
III. Umehluko Oyinhloko Phakathi Kwezimbozo Zensimbi Nezingezona Insimbi
Izakhiwo Zefilimu:
Izembozo zensimbi zigcizelela ukuhanjiswa kwegesi kanye nokukhanya kwayo, okwenza kube kuhle kakhulu ekusetshenzisweni kukagesi kanye nokuhlobisa.
Izembozo ezingezona ezensimbi zigxila ekulawuleni okubonakalayo, ekushiseni, nasekuqineni kwemishini.
Izinqubo Zokufaka Imali:
Izembozo zensimbi zivame ukufakwa nge-physical vapor deposition (PVD) ngezinqubo ezilula.
Izembozo ezingezona ezensimbi zidinga amagesi asebenzayo, okuholela emafasiteleni enqubo amancane kanye nokulawulwa okuqinile kwamapharamitha.
Izinkambu Zohlelo Lokusebenza:
Izembozo zensimbi: amasekethe kagesi, izibuko ezibonisa ukukhanya, amafilimu okuhlobisa.
Izimbozo ezingezona ezensimbi: amalensi okukhanya, amaphaneli okuthinta, izendlalelo zokuvikela.
IV. Izindima Ezihambisanayo Ezisetshenzisweni Zezimboni
Empeleni, izembozo zensimbi nezingezona ezensimbi zivame ukuhlanganiswa:
Amafilimu okuqhuba abonakalayo e-ITO aqukethe izinto ze-oxide (izakhiwo ezingezona ezensimbi) ngenkathi futhi enikeza ukuhanjiswa kukagesi (ukuziphatha okufana nensimbi).
Ezimbozweni zokuhlobisa, ungqimba lwensimbi (isb., i-Ti noma i-Cr) luvame ukufakwa kuqala, kulandelwe ungqimba olungeyona insimbi (isb., i-TiN noma i-TiCN), okudala amafilimu ahlanganisiwe ahlanganisa ukubukeka kokuhlobisa nokumelana nokuguguleka.
Izembozo zensimbi nezingezona ezensimbi ngayinye inikeza izinzuzo ezihlukile ngokomgomo kanye nokusebenza. Izembozo zensimbi zigcizelela ukuhanjiswa kwegesi kanye nokukhanya, kuyilapho izembozo ezingezona ezensimbi zivelele ekusebenzeni okubonakalayo, okuvikelayo, kanye nokusebenza kokuvikela. Ekusetshenzisweni kwezembozo ze-vacuum, ukukhetha inhlanganisela yefilimu efanele ngokwezidingo zomkhiqizo kubalulekile ekuthuthukiseni ukusebenza kanye nokuncintisana emakethe.
—Lesi sihloko sishicilelwe nguimishini yokumboza nge-vacuum umenzi we-Zhenhua Vacuum
Isikhathi sokuthunyelwe: Agasti-18-2025