Kwicandelo lobuchwepheshe bokugquma nge-vacuum, iifilimu ezincinci ngokubanzi zinokwahlulwa zibe ziingubo zesinyithi kunye neengubo ezingezizo zesinyithi, kuxhomekeke kwizinto zokugquma. Ezi ndidi zimbini zahluke kakhulu kwiindlela zokubeka, iipropati zefilimu, kunye neendawo zokusetyenziswa. Ukuqonda umahluko wazo kunceda iinjineli zeenkqubo zikhethe izixhobo ezifanelekileyo kunye neeparamitha zemveliso.
I. Iimpawu kunye neMigaqo ye Iingubo zesinyithi
Ukwambathisa ngesinyithi kubhekisa ekubekeni iithagethi zesinyithi kwi-substrates ngeendlela ezifana nokufuma kwe-thermal okanye ukutshiza nge-magnetron.
Izinto eziqhelekileyo: Al, Cu, Ag, Au, Ti, Cr, njl.
Indlela Yokuhlalisa: Iiathom zesinyithi, emva kokuba zitshiswe okanye zitshizwe kwi-vacuum, zifumana i-chemical reaction encinci kwaye zijijeke kwimeko yazo yangaphakathi kwi-substrate.
Iimpawu eziphambili:
Ukuqhuba kombane okuphezulu
Ukukhanya okugqwesileyo, okusetyenziswa kakhulu kwizibuko ezibonakalayo
Ukunamathela okuqinileyo kunye nokuguquguquka okuhle
Izicelo eziqhelekileyo:
Iileya ze-electrode kwizixhobo ze-semiconductor
Iingubo ezibonakalayo ezibonakalayo
Iingubo zokuhombisa
II. Iimpawu kunye neMigaqo yeeCoatings ezingezizo ezesinyithi
Iingubo ezingezizo ezesinyithi ziquka ikakhulu ii-oxides, ii-nitrides, kunye nee-carbides, ezidla ngokufakwa yi-reactive sputtering okanye i-ion plating.
Izinto eziqhelekileyo: iSiO₂, iTiO₂, iAl₂O₃, iSi₃N₄, iDLC (iCarbon efana neDayimane), njl.
Indlela Yokubeka Izinto: Iithagethi zesinyithi zisabela kwiigesi zenkqubo (umz., O₂, N₂, CH₄), zenze iintlobo ze-compound ezihlala kwi-substrate.
Iimpawu eziphambili:
Ubunzima obuphezulu kunye nokumelana nokuguguleka
Iipropati ezintle kakhulu zokukhanya, ezifana nokucaca okuphezulu okanye ukusebenza okuchasene nokukhanya
Ubushushu obuqinileyo bombane
Izicelo eziqhelekileyo:
Iingubo ezibonakalayo (umz., iifilimu ze-AR, iingubo zesihluzi)
Iileya zokukhusela (umz., iifilimu ze-DLC ezichasene nokukrweleka)
Iileya zeDielectric kwizixhobo ze-elektroniki
III. Umahluko oPhambili phakathi koCoatings zeMetal kunye nezingezizo zeMetal
Iipropati zeFilimu:
Iingubo zesinyithi zigxininisa ukuhanjiswa kombane kunye nokukhanya, nto leyo ezenza ukuba zilungele ukusetyenziswa kombane kunye nokuhombisa.
Iingubo ezingezizo ezesinyithi zigxila kulawulo lwe-optical, i-insulation, kunye nokuqina koomatshini.
Iinkqubo zoKwabiwa kweMali:
Iingubo zesinyithi zihlala zifakwa nge-physical vapor deposition (PVD) ngeenkqubo ezilula.
Iingubo ezingezizo ezesinyithi zifuna iigesi ezisebenzayo, nto leyo ebangela ukuba iifestile zenkqubo zibe mxinwa kunye nolawulo oluqinileyo lweeparameter.
IiNdawo zokufaka isicelo:
Iingubo zesinyithi: iisekethe ze-elektroniki, izibuko ezibonisa ukukhanya, iifilimu zokuhombisa.
Iingubo ezingezizo ezesinyithi: iilensi ezibonakalayo, iiphaneli zokuchukumisa, iileya zokukhusela.
IV. Iindima ezongezelelweyo kwizicelo zoshishino
Enyanisweni, iingubo zesinyithi kunye nezingeyosinyithi zihlala zidityaniswa:
Iifilimu zokuqhuba ezicacileyo ze-ITO ziquka izixhobo ze-oxide (iipropati ezingezizo zesinyithi) ngelixa zikwabonelela ngokuqhuba kombane (ukuziphatha okufana nesinyithi).
Kwiingubo zokuhombisa, umaleko wesinyithi (umz., uTi okanye uCr) uhlala ubekwa kuqala, ulandelwe ngumaleko ongengowesinyithi (umz., uTiN okanye uTiCN), nto leyo eyenza iifilimu ezidityanisiweyo ezidibanisa inkangeleko yokuhombisa kunye nokumelana nokuguguleka.
Iingubo zesinyithi nezingeyonsimbi nganye zibonelela ngeenzuzo ezikhethekileyo ngokwemigaqo nokusebenza. Iingubo zesinyithi zigxininisa ukuhanjiswa kwegesi kunye nokukhanya kwayo, ngelixa iingubo ezingezizo zesinyithi zigqwesa kwimisebenzi yokukhanya, yokukhusela, kunye neyokukhusela. Kwizicelo zengubo ye-vacuum, ukukhetha indibaniselwano yefilimu efanelekileyo ngokweemfuno zemveliso kubalulekile ekuphuculeni ukusebenza kunye nokukhuphisana kwimarike.
—Eli nqaku lipapashwe nguizixhobo zokugquma nge-vacuum umenzi we-Zhenhua Vacuum
Ixesha lokuthumela: Agasti-18-2025