I roto i te ao hangarau paninga korehau, ka taea te whakarōpū i ngā kiriata angiangi ki ngā paninga whakarewa me ngā paninga kore-whakarewa, i runga i te rauemi paninga. He rerekē rawa ēnei wāhanga e rua i roto i ngā tikanga whakatakotoranga, ngā āhuatanga kiriata, me ngā wāhi tono. Mā te mārama ki ō rāua rerekētanga ka āwhina i ngā kaihangarau tukatuka ki te whiriwhiri i ngā rauemi me ngā tawhā tino tika mō te whakaputa.
I. Ngā Āhuatanga me ngā Mātāpono o Ngā Paninga Whakarewa
Ko te paninga whakarewa e pā ana ki te whakatakotoranga o ngā mea whakarewa ki runga i ngā papa mā roto i ngā tikanga pēnei i te mimiti wera, te pupuhi rānei o te magnetron.
Rauemi Angamaheni: Al, Cu, Ag, Au, Ti, Cr, etc.
Tikanga Whakatakoto: I muri i te mimiti, te pupuhi rānei i roto i te korehau, ka iti noa te tauhohenga matū o ngā ngota whakarewa, ā, ka whakapūpū i roto i tō rātou āhua tūturu ki runga i te papa.
Ngā Āhuatanga Matua:
Te kawe hiko teitei
He tino whakaata, e whakamahia whānuitia ana i roto i ngā whakaata whatu
He kaha te piri me te ngāwari pai
Ngā tono noa:
Ngā paparanga hiko i roto i ngā taputapu haurua-ira
Ngā paninga whakaata whatu
Ngā paninga whakapaipai
II. Ngā Āhuatanga me ngā Mātāpono o ngā Paninga Kore-whakarewa
Ko ngā paninga kore-whakarewa te nuinga o ngā waikura, ngā nitride, me ngā carbide, e whakatakotoria ana mā te pupuhi tauhohe, mā te whakakikorua katote rānei.
Ngā Rauemi Noa: SiO₂, TiO₂, Al₂O₃, Si₃N₄, DLC (Waro Rite-Taimana), me ētahi atu.
Tikanga Whakatakoto: Ka tauhohe ngā ūnga whakarewa ki ngā hau tukatuka (hei tauira, O₂, N₂, CH₄), ka hanga he momo matū ka whakatakotoria ki runga i te papa.
Ngā Āhuatanga Matua:
Te pakeke teitei me te ātete kakahu
Ngā āhuatanga whatu tino pai, pērā i te māramatanga teitei, te mahi ārai-whakaata rānei
He kaha te ārai hiko
Ngā tono noa:
Ngā paninga whatu (hei tauira, ngā kiriata AR, ngā paninga tātari)
Ngā paparanga tiaki (hei tauira, ngā kiriata ārai-rakuraku DLC)
Ngā paparanga dielectric i roto i ngā taputapu hiko
III. Ngā Rerekētanga Matua i waenga i ngā Paninga Whakarewa me ngā Paninga Kore-whakarewa
Ngā Āhuatanga Kiriata:
Ka whakatairangahia e ngā paninga whakarewa te kawe hiko me te whakaata, kia pai ai mō ngā tono hiko me ngā mahi whakapaipai.
Ko ngā paninga kore-whakarewa e arotahi ana ki te whakahaere whatu, te whakamarumaru, me te pakari ā-mīhini.
Ngā Tukanga Whakatakoto:
Ko te tikanga, ka whakatakotoria ngā paninga whakarewa mā te whakatakotoranga kohu ā-tinana (PVD) me ngā tukanga tino māmā.
Me whakamahi ngā hau tauhohe mō ngā paninga kore-whakarewa, ā, ka hua ake he whaiti ake ngā matapihi tukanga me te kaha ake o te whakahaere tawhā.
Ngā Āpure Tono:
Ngā paninga whakarewa: ngā ara iahiko hiko, ngā whakaata whakaata, ngā kiriata whakapaipai.
Ngā paninga kore-whakarewa: ngā karāhe whatu, ngā papa pā, ngā paparanga tiaki.
IV. Ngā Tūranga Tautoko i roto i ngā Taupānga Ahumahi
I roto i te mahi, he maha ngā wā ka whakakotahihia ngā paninga whakarewa me ngā paninga kore-whakarewa:
Ko ngā kiriata arataki mārama a ITO he mea hanga ki ngā rauemi waikura (ngā āhuatanga ehara i te mea whakarewa) me te whakarato hoki i te arataki hiko (te whanonga rite ki te mea whakarewa).
I roto i ngā paninga whakapaipai, ka whakatakotoria tuatahitia he paparanga whakarewa (hei tauira, Ti, Cr rānei), ā, muri iho ka whakatakotoria he paparanga kore-whakarewa (hei tauira, TiN, TiCN rānei), ka hangaia he kiriata hiato e whakakotahi ana i te āhua whakapaipai me te ātete ki te kakahu.
He painga motuhake kei waenganui i ngā paninga whakarewa me ngā paninga kore-whakarewa i te kaupapa me te mahi. E whakanui ana ngā paninga whakarewa i te kawe hiko me te whakaata, ko ngā paninga kore-whakarewa ia he tino pai ki ngā mahi whatu, ārai, me te tiaki. I roto i ngā tono paninga korehau, he mea nui te whiriwhiri i te huinga kiriata tika kia rite ki ngā whakaritenga hua hei whakarei ake i te mahi me te whakataetae mākete.
—I whakaputaina tēnei tuhinga etaputapu paninga korehau kaihanga Zhenhua Vacuum
Wā tuku: 18 o Ākuhata 2025
