Phapang Pakeng tsa Liaparo tsa Tšepe le Tse seng tsa Tšepe

Lefapheng la theknoloji ea ho koahela ka vacuum, lifilimi tse tšesaane ka kakaretso li ka aroloa ka liphahlo tsa tšepe le liphahlo tse seng tsa tšepe, ho latela thepa ea ho koahela. Lihlopha tsena tse peli li fapana haholo ka mekhoa ea ho beha, thepa ea filimi le libaka tsa ts'ebeliso. Ho utloisisa phapang ea tsona ho thusa baenjiniere ba ts'ebetso ho khetha thepa le liparamente tse loketseng ka ho fetisisa bakeng sa tlhahiso.

I. Litšobotsi le Melao-motheo ea Liaparo tsa Tšepe

Ho koahela ka tšepe ho bolela ho beha lipheo tsa tšepe holim'a li-substrate ka mekhoa e kang ho fetoha ha mouoane ka mocheso kapa ho sputtering ka magnetron.

Lisebelisoa tse Tloaelehileng: Al, Cu, Ag, Au, Ti, Cr, joalo-joalo.

Mokhoa oa ho Hlahisa: Liathomo tsa tšepe, ka mor'a hore li fetohe mouoane kapa li tšolohe ka har'a vacuum, li feta karabelong e fokolang ea lik'hemik'hale 'me li kopana boemong ba tsona ba tlhaho ho ea holim'a substrate.

Matlotlo a Bohlokoa:

Ho khanna motlakase ho phahameng

Ho bonahatsa ho babatsehang, ho sebelisoa haholo liiponeng tsa mahlo

Ho khomarela ho matla le ho ductility e ntle

Likopo tse Tloaelehileng:

Likarolo tsa li-electrode lisebelisoa tsa semiconductor

Liaparo tse bonahatsang mahlo

Liaparo tse khabisitsoeng

II. Litšobotsi le Melao-motheo ea Liaparo tse seng tsa Tšepe

Liaparo tse seng tsa tšepe li kenyelletsa haholo-holo li-oxide, nitrides le carbides, tseo hangata li kenngoang ka ho sputtering e arabelang kapa ho plating ea ion.

Lisebelisoa tse Tloaelehileng: SiO₂, TiO₂, Al₂O₃, Si₃N₄, DLC (Carbon e kang ea Taemane), jj.

Mokhoa oa ho Hlahisa: Lipheo tsa tšepe li arabela le likhase tsa ts'ebetso (mohlala, O₂, N₂, CH₄), li etsa mefuta ea metsoako e kenellang holim'a substrate.

Matlotlo a Bohlokoa:

Ho thatafala ho hoholo le ho hanyetsa ho roala

Thepa e ntle haholo ea mahlo, joalo ka ho pepeneneng ho hoholo kapa ts'ebetso e khahlanong le ponts'o

Ho thibela motlakase ho matla

Likopo tse Tloaelehileng:

Liaparo tsa mahlo (mohlala, lifilimi tsa AR, liaparo tsa sefe)

Mealo e sireletsang (mohlala, lifilimi tsa DLC tse thibelang ho ngoapa)

Mealo ea dielectric lisebelisoa tsa elektroniki

III. Liphapang tsa Bohlokoa Pakeng tsa Liaparo tsa Tšepe le Tse Seng tsa Tšepe

Thepa ea Filimi:

Liaparo tsa tšepe li hatisa ho tsamaisa le ho bonahatsa khanya, e leng se etsang hore li be ntle bakeng sa lits'ebetso tsa motlakase le tsa mekhabiso.

Liaparo tse seng tsa tšepe li shebane le taolo ea mahlo, ho kenya mocheso le ho tšoarella ha mechini.

Mekhoa ea ho Tlosa Litšenyehelo:

Hangata dikoahelo tsa tshepe di kenngwa ka ho kenya mouoane wa mmele (PVD) ka ditshebetso tse bonolo.

Liaparo tse seng tsa tšepe li hloka likhase tse arabelang, e leng se fellang ka lifensetere tse tšesaane tsa ts'ebetso le taolo e thata ea liparamente.

Masimo a Kopo:

Liaparo tsa tšepe: lipotoloho tsa elektroniki, liipone tse bonahatsang, lifilimi tse khabisitsoeng.

Liaparo tse seng tsa tšepe: lilense tsa mahlo, liphanele tsa ho ama, le mealo e sireletsang.

IV. Mesebetsi e Tlatsetsang Litšebelisong tsa Liindasteri

Ha e le hantle, hangata ho kopanngoa lipekere tsa tšepe le tse seng tsa tšepe:

Lifilimi tsa ITO tse fetisang motlakase tse bonaletsang li na le thepa ea oxide (thepa e seng ea tšepe) ha ka nako e ts'oanang li fana ka motlakase o tsamaisang motlakase (boitšoaro bo kang ba tšepe).

Liaparong tse khabisitsoeng, lera la tšepe (mohlala, Ti kapa Cr) hangata le beoa pele, le lateloe ke lera le seng la tšepe (mohlala, TiN kapa TiCN), le etsang lifilimi tse kopaneng tse kopanyang ponahalo ea mekhabiso le ho hanyetsa ho tsofala.

Liaparo tsa tšepe le tse seng tsa tšepe ka 'ngoe li fana ka melemo e ikhethang ka molao-motheo le ts'ebetso. Liaparo tsa tšepe li totobatsa ho tsamaisa le ho bonahatsa khanya, ha liaparo tse seng tsa tšepe li ipabola mesebetsing ea optical, insulation le e sireletsang. Litšebelisong tsa ho roala ka vacuum, ho khetha motsoako o nepahetseng oa filimi ho latela litlhoko tsa sehlahisoa ho bohlokoa ho ntlafatsa ts'ebetso le tlholisano ea 'maraka.

—Sengoloa sena se phatlalalitsoe kelisebelisoa tsa ho roala ka vacuum moetsi oa Zhenhua Vacuum