Itandukaniro riri hagati y'imyambaro y'icyuma n'iy'icyuma

Mu rwego rw'ikoranabuhanga ryo gusiga irangi ry'icyuma, muri rusange filimi nto zishobora gushyirwa mu byiciro by'ibyuma n'ibitari ibyuma, bitewe n'ibikoresho byo gusiga. Ibi byiciro bibiri bitandukanye cyane mu buryo bwo gushyiramo, imiterere ya filimi, n'ahantu ho kuyikoresha. Gusobanukirwa itandukaniro ryabyo bifasha abahanga mu gutunganya ibintu guhitamo ibikoresho n'ibipimo bibereye cyane byo gukora.

I. Ibiranga n'amahame ya Imyambaro y'icyuma

Gusiga icyuma bigereranya gushyira intego z'icyuma ku bintu bicukurwa hakoreshejwe uburyo nko gushyuha cyangwa gukoresha magnetron sputtering.

Ibikoresho bisanzwe: Al, Cu, Ag, Au, Ti, Cr, nibindi

Uburyo bwo Gutemba: Atome z'icyuma, nyuma yo guhumeka cyangwa gutemba mu cyuma gifunze, zikora ibishoboka byose kugira ngo zifatanye mu miterere yazo bwite ku butaka.

Imiterere y'ingenzi:

Ingufu nyinshi z'amashanyarazi

Kugaragaza urumuri rwinshi, bikoreshwa cyane mu ndorerwamo z'urumuri

Gufatana neza no kugenda neza kw'imodoka

Porogaramu zisanzwe:

Ibice bya electrode mu bikoresho bya semiconductor

Irangi rigaragaza urumuri

Imitako yo gusiga

II. Ibiranga n'amahame y'imyambaro idakoresha icyuma

Ibyuma bitari icyuma ahanini birimo okiside, nitride, na karubide, akenshi bishyirwa mu buryo bwo guhumeka cyangwa irangi rya ion.

Ibikoresho bisanzwe: SiO₂, TiO₂, Al₂O₃, Si₃N₄, DLC (Diamond-like Carbon), n'ibindi.

Uburyo bwo Gutera: Ibice by'icyuma bikora hamwe n'imyuka ikoreshwa mu gutunganya ibintu (urugero, O₂, N₂, CH₄), bigakora ubwoko bw'ibice byinjira mu butaka.

Imiterere y'ingenzi:

Ubukomere bwinshi n'ubudahangarwa bwo kwangirika

Imiterere myiza cyane y'urumuri, nko kugira ubwiza buhanitse cyangwa kudatanga urumuri

Ubwugarizi bukomeye bw'amashanyarazi

Porogaramu zisanzwe:

Imyambaro ikoreshwa mu gupima (urugero: AR films, filter coatings)

Uduce tw’uburinzi (urugero, filime za DLC zirinda gushwanyagurika)

Ibice bya Dielectric mu bikoresho by'ikoranabuhanga

III. Itandukaniro ry'ingenzi hagati y'imyambaro y'icyuma n'iy'icyuma

Imiterere ya filime:

Ibyuma bitwikiriye bishimangira ubushobozi bwo gutwara ibintu no kugarura urumuri, bigatuma biba byiza cyane mu gukoresha amashanyarazi no mu mitako.

Irangi ritari iry'icyuma ryibanda ku kugenzura urumuri, gukingira, no kuramba kwa mashini.

Uburyo bwo Gutanga Serivisi:

Ubusanzwe, irangi ry'icyuma rishyirwa mu buryo bworoshye binyuze mu gusiga umwuka ushyushye (PVD).

Ingufu zitari iz'icyuma zikenera imyuka ikora neza, bigatuma amadirishya y'imikorere aba make kandi akagenzura neza ibipimo.

Ahantu ho Gukoresha:

Ibyuma bitwikiriye: imiyoboro y'ikoranabuhanga, indorerwamo zigarura urumuri, filime z'imitako.

Irangi ritari iry'icyuma: indorerwamo z'amaso, ibishushanyo, n'ibyerekezo birinda.

IV. Inshingano z'inyongera mu bikorwa by'inganda

Mu by’ukuri, irangi ry’icyuma n’iritari iry’icyuma rikunze guhuzwa:

Filimi ziyobora urumuri zibonerana za ITO zigizwe n'ibikoresho bya okiside (imiterere itari iy'icyuma) mu gihe zinatanga amashanyarazi (imyitwarire isa n'iy'icyuma).

Mu miterere y'imitako, urwego rw'icyuma (urugero, Ti cyangwa Cr) rukunze gushyirwaho mbere, hagakurikiraho urwego rutari urw'icyuma (urugero, TiN cyangwa TiCN), rugakora filime zivanze zihuza imiterere y'imitako n'uburyo idasaza.

Irangi ry'icyuma n'iritari iry'icyuma rimwe na rimwe ritanga inyungu zidasanzwe mu buryo bw'ibanze no mu mikorere. Irangi ry'icyuma rishimangira ubushobozi bwo gutwara no kugarura urumuri, mu gihe irangi ritari iry'icyuma rirusha ayandi mu mikorere y'urumuri, irinda ubushyuhe, no kurinda. Mu gukoresha irangi ry'icyuma gikoresha umwuka, guhitamo imvange ikwiye ya filime hakurikijwe ibisabwa n'ibicuruzwa ni ingenzi cyane mu kunoza imikorere no guhangana ku isoko.

—Iyi nkuru yasohotse naibikoresho byo gusiga irangi ry'umwuka uruganda rwa Zhenhua Vacuum