Hauv kev siv tshuab nqus tsev txheej, cov zaj duab xis nyias feem ntau tuaj yeem muab faib ua cov txheej hlau thiab cov txheej uas tsis yog hlau, nyob ntawm cov khoom siv txheej. Ob pawg no sib txawv heev hauv cov txheej txheem tso dej, cov yam ntxwv ntawm zaj duab xis, thiab thaj chaw siv. Kev nkag siab txog lawv qhov sib txawv pab cov kws ua haujlwm xaiv cov khoom siv thiab cov kev teeb tsa tsim nyog tshaj plaws rau kev tsim khoom.
I. Cov yam ntxwv thiab cov ntsiab cai ntawm Cov Txheej Txheem Hlau
Kev txheej hlau yog hais txog kev tso cov hom phiaj hlau rau ntawm cov substrates los ntawm cov txheej txheem xws li thermal evaporation lossis magnetron sputtering.
Cov khoom siv: Al, Cu, Ag, Au, Ti, Cr, thiab lwm yam.
Txoj Kev Tso Tawm: Cov hlau atoms, tom qab raug evaporated los yog sputtered hauv lub tshuab nqus tsev, dhau los ua qhov tshuaj lom neeg tsawg kawg nkaus thiab condense hauv lawv lub xeev intrinsic rau ntawm lub substrate.
Cov Khoom Tseem Ceeb:
Kev ua hluav taws xob siab
Kev cuam tshuam zoo heev, siv dav hauv cov iav kho qhov muag
Muaj zog adhesion thiab zoo ductility
Cov Ntawv Thov Ib Txwm Muaj:
Cov txheej electrode hauv cov khoom siv semiconductor
Cov txheej txheem reflective optical
Cov txheej txheem kho kom zoo nkauj
II. Cov yam ntxwv thiab cov ntsiab cai ntawm cov txheej txheem tsis yog hlau
Cov txheej txheem tsis yog hlau feem ntau suav nrog oxides, nitrides, thiab carbides, feem ntau tso los ntawm reactive sputtering lossis ion plating.
Cov Khoom Siv Ib Txwm Muaj: SiO₂, TiO₂, Al₂O₃, Si₃N₄, DLC (Pob Zeb Zoo Li Pob Zeb Diamond), thiab lwm yam.
Txoj Kev Tso Tawm: Cov hom phiaj hlau ua rau muaj cov pa roj hauv cov txheej txheem (piv txwv li, O₂, N₂, CH₄), tsim cov tshuaj sib xyaw uas tso rau ntawm cov substrate.
Cov Khoom Tseem Ceeb:
Kev kub siab thiab hnav tsis kam
Cov khoom siv kho qhov muag zoo heev, xws li kev pom tseeb siab lossis kev ua haujlwm tiv thaiv kev cuam tshuam
Muaj zog rwb thaiv hluav taws xob
Cov Ntawv Thov Ib Txwm Muaj:
Cov txheej txheem kho qhov muag (piv txwv li, AR zaj duab xis, cov txheej txheem lim)
Cov txheej tiv thaiv (piv txwv li, DLC tiv thaiv khawb zaj duab xis)
Cov khaubncaws sab nraud povtseg dielectric hauv cov khoom siv hluav taws xob
III. Qhov Sib Txawv Ntawm Cov Hlau Thiab Cov Txheej Txheem Uas Tsis Yog Hlau
Cov Khoom Siv Zaj Duab Xis:
Cov txheej txheem hlau ua rau muaj kev coj ua hluav taws xob thiab kev cuam tshuam, ua rau lawv zoo tagnrho rau kev siv hluav taws xob thiab kho kom zoo nkauj.
Cov txheej txheem tsis yog hlau tsom mus rau kev tswj qhov muag, kev rwb thaiv tsev, thiab kev ua haujlwm ntev.
Cov Txheej Txheem Tso Khoom:
Cov txheej txheem hlau feem ntau yog tso los ntawm kev tso pa tawm lub cev (PVD) nrog cov txheej txheem yooj yim.
Cov txheej txheem tsis yog hlau xav tau cov pa roj ua haujlwm, ua rau cov qhov rai txheej txheem nqaim dua thiab kev tswj hwm cov kev teeb tsa nruj dua.
Cov Ntawv Thov:
Cov txheej txheem hlau: cov hluav taws xob hauv hluav taws xob, cov iav ci ntsa iab, cov yeeb yaj kiab zoo nkauj.
Cov txheej txheem tsis yog hlau: cov iav kho qhov muag, cov vaj huam sib luag kov, cov txheej tiv thaiv.
IV. Lub Luag Haujlwm Sib Txuas Hauv Kev Siv Hauv Kev Lag Luam
Hauv kev xyaum, cov hlau thiab cov txheej txheem uas tsis yog hlau feem ntau yog ua ke:
Cov yeeb yaj kiab ITO pob tshab muaj cov khoom oxide (cov khoom tsis yog hlau) thaum tseem muab cov hluav taws xob conductivity (tus cwj pwm zoo li hlau).
Hauv cov txheej pleev kom zoo nkauj, ib txheej hlau (piv txwv li, Ti lossis Cr) feem ntau raug tso ua ntej, tom qab ntawd ib txheej uas tsis yog hlau (piv txwv li, TiN lossis TiCN), tsim cov yeeb yaj kiab sib xyaw uas sib xyaw ua ke cov tsos zoo nkauj nrog kev tiv thaiv kev hnav.
Cov txheej hlau thiab cov txheej uas tsis yog hlau muaj cov txiaj ntsig tshwj xeeb hauv txoj cai thiab kev ua tau zoo. Cov txheej hlau ua rau muaj kev coj ua hluav taws xob thiab kev cuam tshuam, thaum cov txheej uas tsis yog hlau ua tau zoo hauv kev ua haujlwm pom kev, rwb thaiv tsev, thiab kev tiv thaiv. Hauv cov ntawv thov txheej nqus tsev, kev xaiv cov yeeb yaj kiab sib xyaw ua ke raws li cov khoom xav tau yog qhov tseem ceeb rau kev txhim kho kev ua tau zoo thiab kev sib tw ua lag luam.
— Tsab xov xwm no tau luam tawm los ntawmcov khoom siv nqus tsev txheej Chaw tsim khoom Zhenhua Lub Tshuab Nqus Tsev
Lub sijhawm tshaj tawm: Lub Yim Hli-18-2025