Ukubekwa kwefilim encinci yinkqubo esisiseko esetyenziswa kwishishini le-semiconductor, kunye nakwezinye iindawo ezininzi zesayensi kunye nobunjineli bezinto. Kubandakanya ukudalwa komgangatho omncinci wezinto eziphathekayo kwi-substrate. Iifilimu ezifakwe kwidiphozithi zinokuba noluhlu olubanzi lokutyeba, ukusuka nje kwiileya zeathom ezimbalwa ukuya kwiimicrometers ezininzi. Ezi filimu zinokusebenza ngeenjongo ezininzi, ezinje ngee-conductor zombane, ii-insulators, ii-optical coatings, okanye imiqobo yokukhusela.
Nazi iindlela eziphambili ezisetyenziselwa ukubekwa kwefilimu encinci:
Ukubekwa Komphunga Wasemzimbeni (PVD)
I-Sputtering:Umqa we-ion one-eneji ephezulu usetyenziselwa ukunkqonkqoza iiathom zisuka kwinto ekujoliswe kuyo, ethi emva koko idipozithe kwi-substrate.
Umphunga:** Isixhobo sifudunyezwa kwisingxobo esifunxayo de sijike sibe ngumphunga, kwaye ke umphunga ujiye kwi-substrate.
Ukumiselwa koMaleko weAtom (ALD)
I-ALD bubuchule apho ifilimu ikhuliswa kwi-substrate enye umaleko weathom ngexesha. Ilawulwa kakhulu kwaye inokwenza iifilimu ezichanekileyo nezihambelanayo.
I-Molecular Beam Epitaxy (MBE)
I-MBE bubuchule bokukhula kwe-epitaxial apho imiqadi yee-athomu okanye iiathom zijoliswa kwi-substrate eshushu ukuze zenze ifilimu ebhityileyo eyikristale.
Izinto eziluncedo zokuBekwa kweFilimu eNcinci
Ukusebenza okuphuculweyo: Iifilimu zinokubonelela ngeepropati ezintsha kwi-substrate, ezifana nokuchasana nokuqala okanye ukuhanjiswa kombane.
Ukusetyenziswa kwezinto ezincitshisiweyo: Ivumela ukudalwa kwezixhobo ezinzima kunye nokusetyenziswa kwezinto ezincinci, ukunciphisa iindleko.
Ukwenza ngokwezifiso: Iifilimu zinokulungelelaniswa ukuba zibe neempawu ezithile zoomatshini, zombane, zamehlo, okanye zekhemikhali.
Usetyenziso
Izixhobo ze-Semiconductor: I-Transistors, iisekethe ezidibeneyo, kunye neenkqubo ze-microelectromechanical (MEMS).
Iingubo ze-Optical: I-anti-reflective kunye ne-high-reflective coatings kwiilensi kunye neeseli zelanga.
Iingubo ezikhuselayo: Ukuthintela ukubola okanye ukunxitywa kwezixhobo kunye noomatshini.
Ukusetyenziswa kwe-Biomedical: Iingubo kwii-implants zonyango okanye iinkqubo zokuhanjiswa kweziyobisi.
Ukukhethwa kobuchule bokubekwa kuxhomekeke kwiimfuno ezithile zesicelo, kubandakanywa nohlobo lwemathiriyeli eza kufakwa, iipropati zefilimu ezifunwayo, kunye nemiqobo yeendleko.
–Eli nqaku likhutshwa nguumenzi womatshini wokugqumaGuangdong Zhenhua
Ixesha lokuposa: Aug-15-2024