Thin film deposition ke ts'ebetso ea mantlha e sebelisoang indastering ea semiconductor, hammoho le libakeng tse ling tse ngata tsa mahlale a thepa le boenjiniere. E kenyelletsa ho theha lesela le tšesaane la thepa holim'a substrate. Lifilimi tse kentsoeng li ka ba le mefuta e mengata ea botenya, ho tloha ho lihlopha tse seng kae feela tsa athomo ho isa ho tse 'maloa tse teteaneng tsa micrometer. Lifilimi tsena li ka sebeletsa merero e mengata, joalo ka li-conductors tsa motlakase, li-insulators, li-optical coatings, kapa litšitiso tse sireletsang.
Mona ke mekhoa ea mantlha e sebelisetsoang ho hlahisa filimi e nyane:
Phaello ea Mouoane 'meleng (PVD)
Sputtering: Lebone la ion le nang le matla a phahameng le sebelisoa ho kokota liathomo nthong e shebiloeng, ebe e beha holim'a substrate.
Evaporation:** Thepa e futhumatsoa ka har'a vacuum ho fihlela e fetoha mouoane, ebe mouoane o hoama holim'a substrate.
Atomic Layer Deposition (ALD)
ALD ke mokhoa oo ho oona filimi e lengoang holim'a substrate lera le le leng la athomo ka nako. E laoloa haholo 'me e ka etsa lifilimi tse nepahetseng haholo le tse lumellanang.
Molecular Beam Epitaxy (MBE)
MBE ke mokhoa oa ho hola oa epitaxial moo libalaka tsa liathomo kapa limolek'hule li lebisoang holim'a substrate e futhumetseng ho etsa filimi e tšesaane ea kristale.
Melemo ea Thin Film Deposition
Ts'ebetso e ntlafalitsoeng: Lifilimi li ka fana ka thepa e ncha ho substrate, joalo ka khanyetso ea pele kapa conductivity ea motlakase.
Tšebeliso ea thepa e fokolitsoeng: E lumella ho theha lisebelisoa tse rarahaneng tse nang le tšebeliso e fokolang ea thepa, ho fokotsa litšenyehelo.
Tloaelo: Lifilimi li ka etsoa hore li be le lisebelisoa tse ikhethang tsa mochini, tsa motlakase, tsa mahlo kapa tsa lik'hemik'hale.
Lisebelisoa
Lisebelisoa tsa semiconductor: Transistors, li-circuits tse kopantsoeng, le lisebelisoa tsa microelectromechanical (MEMS).
Li-optical coatings: Li-anti-reflective le tse phahameng tse bonahatsang lilense le lisele tsa letsatsi.
Liaparo tse sireletsang: Ho thibela ho bola kapa ho roala lisebelisoa le mechini.
Lisebelisoa tsa biomedical: Ho roala ka li-implants tsa bongaka kapa mekhoa ea ho fana ka lithethefatsi.
Khetho ea mokhoa oa deposition e itšetlehile ka litlhoko tse khethehileng tsa kopo, ho kenyelletsa le mofuta oa thepa e lokelang ho behoa, thepa ea filimi e lakatsehang, le lithibelo tsa litšenyehelo.
-Sengoliloeng sena se lokolloa kemoetsi oa mochine oa vacuum coatingGuangdong Zhenhua
Nako ea poso: Aug-15-2024