Liaparo tsa PVD (Physical Vapor Deposition) ke mekhoa e sebelisoang haholo bakeng sa ho etsa lifilimi tse tšesaane le ho roala holim'a metsi. Har'a mekhoa e tloaelehileng, mouoane oa mocheso le ho fafatsa ke mekhoa e 'meli ea bohlokoa ea PVD. Mona ke karohano ea e 'ngoe le e' ngoe:
1. Mouoane oa Mocheso
- Molao-motheo:Thepa e futhumatsoa ka phaposing ea vacuum ho fihlela e fetoha mouoane kapa e fetoha mouoane. Thepa e nang le mouoane ebe e kopana holim'a substrate ho etsa filimi e tšesaane.
- Tshebetso:
- Lisebelisoa tsa mohloli (tšepe, ceramic, joalo-joalo) li futhumatsoa, hangata ho sebelisoa mocheso o thibelang matla, lebone la elektronike, kapa laser.
- Hang ha thepa e fihla sebakeng sa eona sa mouoane, liathomo kapa limolek'hule li tloha mohloling ebe li tsamaea ka vacuum ho ea substrate.
- Liathomo tse nang le mouoane li kopana holim'a substrate, li etsa lera le tšesaane.
- Lisebelisoa:
- Hangata e sebelisetsoa ho kenya tšepe, li-semiconductors le li-insulators.
- Lisebelisoa li kenyelletsa liaparo tsa optical, likhabiso tse khabisitsoeng, le microelectronics.
- Melemo:
- Litefiso tse phahameng tsa deposition.
- E bonolo ebile e theko e boima bakeng sa lisebelisoa tse itseng.
- E ka hlahisa lifilimi tse hloekileng haholo.
- Mefokolo:
- E lekanyelitsoe ho lisebelisoa tse nang le lintlha tse tlaase tse qhibilihisang kapa likhatello tse phahameng tsa mouoane.
- Tšireletso e fokolang ea mehato holim'a libaka tse rarahaneng.
- Taolo e fokolang holim'a sebopeho sa filimi bakeng sa li-alloys.
2. Ho soma
- Molao-motheo: Li-ion tse tsoang plasma li potlakisetsoa ho ea sebakeng seo ho shebiloeng ho sona, e leng se etsang hore liathomo li ntše (spttered) ho tsoa moo ho shebiloeng, ebe li behoa holim'a substrate.
- Tshebetso:
- Lisebelisoa tse reretsoeng (tšepe, alloy, joalo-joalo) li kenngoa ka kamoreng, 'me khase (e tloaelehileng ea argon) e hlahisoa.
- Ho sebelisoa motlakase o phahameng ho theha plasma, e etsang hore khase e be matla.
- Li-ion tse nang le "positive charged" tse tsoang plasma li potlakisetsoa ho ea moo li qosoang hampe, 'me li ntša liathomo holimo.
- Joale liathomo tsena li beha holim'a substrate, li etsa filimi e tšesaane.
- Lisebelisoa:
- E sebelisoa haholo tlhahisong ea li-semiconductor, likhalase tsa ho roala, le ho etsa lintja tse sa jeng.
- E loketse ho theha alloy, ceramic, kapa lifilimi tse tšesaane tse rarahaneng.
- Melemo:
- E ka beha mefuta e mengata ea lisebelisoa, ho kenyelletsa le litšepe, li-alloys le li-oxide.
- Ho tšoana hantle ha filimi le ho koaheloa ha mehato, esita le ka libopeho tse rarahaneng.
- Taolo e nepahetseng holim'a botenya ba filimi le sebopeho.
- Mefokolo:
- Sekhahla se tlase ha se bapisoa le mouoane oa mocheso.
- E theko e boima haholo ka lebaka la ho rarahana ha lisebelisoa le tlhoko ea matla a holimo.
Liphapang tse ka Sehloohong:
- Mohloli oa Deposition:
- Mouoane oa mocheso o sebelisa mocheso ho etsa hore lintho li fetohe mouoane, ha sputtering e sebelisa bombardment ea ion ho ntša liathomo.
- Matla a Hlokahala:
- Moea oa mouoane oa mocheso hangata o hloka matla a manyane ho feta ho fafatsa kaha o itšetlehile ka ho futhumatsa ho fapana le ho hlahisa lero la plasma.
- Lisebelisoa:
- Sputtering e ka sebelisoa ho beha mefuta e mengata ea lisebelisoa, ho kenyeletsoa tse nang le lintlha tse phahameng tse qhibilihang, tseo ho leng thata ho li etsa mouoane.
- Boleng ba Filimi:
- Sputtering ka kakaretso e fana ka taolo e betere holim'a botenya ba filimi, ho ts'oana, le sebopeho.
Nako ea poso: Sep-27-2024