PVD (Physical Vapor Deposition) machira anoshandiswa zvakanyanya nzira dzekugadzira mafirimu matete uye machira epamusoro. Pakati pemitoo yakajairika, kupisa kwemhepo uye kuputika zvinhu zviviri zvakakosha zvePVD. Heino kupatsanurwa kweumwe neumwe:
1. Thermal Evaporation
- Musimboti:Material anodziirwa muvacuum chamber kusvika yabuda kana kuti sublimates. Iyo vaporized zvinhu zvino inonamira pane substrate kuita firimu rakatetepa.
- Maitiro:
- A source material (simbi, ceramic, etc.) inopisa, kazhinji inoshandisa resistive heat, electron beam, kana laser.
- Kana zvinhu zvangosvika pakunyunguduka, maatomu kana mamorekuru anosiya kwainobva uye ofamba nepakati pevacuum kuenda kune substrate.
- Maatomu evaporated anonamira pamusoro pe substrate, achiita danda rakatetepa.
- Applications:
- Inowanzo shandiswa kuisa simbi, semiconductors, uye insulators.
- Zvishandiso zvinosanganisira optical coatings, yekushongedza inopera, uye microelectronics.
- Zvakanakira:
- High deposition rates.
- Zviri nyore uye zvinodhura-zvinobudirira kune zvimwe zvinhu.
- Inogona kugadzira mafirimu akachena kwazvo.
- Zvakaipa:
- Yakaganhurirwa kumidziyo ine yakaderera kunyungudika mapoinzi kana yakakwira mhute pressure.
- Kuvharika kwenhanho kwakashata pamusoro penzvimbo dzakaoma.
- Kudzora kushoma pane firimu kuumbwa kwema alloys.
2. Kupopota
- Nheyo: Ioni kubva muplasma inokwidziridzwa yakananga kune chinhu chinonangwa, zvichiita kuti maatomu abudiswe (kuputwa) kubva pane chinangwa, uye anozoisa pane substrate.
- Maitiro:
- Chinhu chinotarirwa (simbi, alloy, nezvimwewo) chinoiswa mukamuri, uye gasi (kazhinji argon) inotangwa.
- A high voltage inoshandiswa kugadzira plasma, iyo ionizes gasi.
- Iwo ayoni anochajiwa zvakanaka kubva muplasma anokwidziridzwa akananga kwaanochajiswa zvisina kunaka, achibvisa mumuviri maatomu kubva pamusoro.
- Aya maatomu anobva aisa pane substrate, achigadzira firimu rakatetepa.
- Applications:
- Inoshandiswa zvakanyanya mukugadzira semiconductor, kuvhara girazi, uye kugadzira machira anodzivirira kupfeka.
- Yakanakira kugadzira alloy, ceramic, kana yakaoma mafirimu matete.
- Zvakanakira:
- Inogona kuisa zvakasiyana-siyana zvezvinhu, zvinosanganisira simbi, alloys, uye oxides.
- Yakanakisa firimu kufananidzwa uye nhanho yekuvhara, kunyangwe pane yakaoma maumbirwo.
- Kudzora kwakananga pamusoro peukobvu hwefirimu uye kuumbwa.
- Zvakaipa:
- Deposition rates inononoka zvichienzaniswa nekupisa kwekupisa.
- Kunyanya kudhura nekuda kwekuoma kwemidziyo uye kudiwa kwesimba repamusoro.
Misiyano Yakakosha:
- Kwakabva Deposition:
- Thermal evaporation inoshandisa kupisa kuburitsa zvinhu, uku kupuruzira kunoshandisa ion bombardment kuburitsa maatomu.
- Simba Rinodiwa:
- Thermal evaporation inowanzoda simba shoma pane sputtering nekuti inovimba nekudziya kwete chizvarwa cheplasma.
- Zvekushandisa:
- Sputtering inogona kushandiswa kuisa huwandu hwakawanda hwezvinhu, kusanganisira izvo zvine nzvimbo dzakanyanya kunyungudika, izvo zvinonetsa kubuda.
- Hunhu hweFirimu:
- Sputtering kazhinji inopa kutonga kuri nani pane ukobvu hwefirimu, kufanana, uye kuumbwa.
Nguva yekutumira: Sep-27-2024