Ipfunyika ya PVD: Ubushyuhe bwumuriro no gusohora

Imyenda ya PVD (Physical Vapor Deposition) ikoreshwa cyane muburyo bwo gukora firime yoroheje hamwe nubutaka bwo hejuru. Muburyo busanzwe, guhumeka ubushyuhe no gusohora ni inzira ebyiri zingenzi za PVD. Dore ibice bya buri:

1. Guhumeka Ubushyuhe

• Ihame:Ibikoresho bishyushya mucyumba cya vacuum kugeza bihumutse cyangwa bigabanutse. Ibikoresho biva mu kirere noneho bihurira kuri substrate kugirango ikore firime yoroheje.
• Inzira:
• Ibikoresho bituruka (ibyuma, ceramique, nibindi) birashyuha, mubisanzwe ukoresheje ubushyuhe butavunika, urumuri rwa electron, cyangwa laser.
• Iyo ibikoresho bimaze kugera aho bihumeka, atome cyangwa molekile ziva mu isoko hanyuma zikanyura mu cyuho zigana kuri substrate.
• Atome ziva mu kirere zegeranye hejuru ya substrate, zikora urwego ruto.
• Porogaramu:
• Mubisanzwe bikoreshwa mukubitsa ibyuma, semiconductor, na insulator.
• Porogaramu zirimo impuzu nziza, kurangiza, hamwe na micrélectronics.
• Ibyiza:
• Igipimo kinini cyo kubitsa.
• Byoroshye kandi bihendutse kubikoresho bimwe.
• Irashobora gukora firime nziza cyane.
• Ibibi:
• Kugarukira kubikoresho bifite aho bishonga cyangwa imbaraga zumuyaga mwinshi.
• Intambwe idahwitse hejuru yubuso bugoye.
• Kugenzura bike kubijyanye na firime ya alloys.

2. Gusohora

• Ihame: Iyoni ivuye muri plasma yihuta yerekeza kubintu bigenewe, bigatuma atome zisohoka (zisukuye) zivuye ku ntego, hanyuma zigashyirwa kuri substrate.
• Inzira:
• Ibikoresho bigenewe (ibyuma, ibivanze, nibindi) bishyirwa mubyumba, hanyuma gaze (mubisanzwe argon).
• Umuvuduko mwinshi ukoreshwa kugirango ukore plasma, ionisiyasi.
• Iyoni zashizwemo neza ziva muri plasma zihuta zerekeza ku ntego zashizwemo nabi, ziva mu mubiri umubiri uturutse hejuru.
• Izi atom noneho zishira kuri substrate, zikora firime yoroheje.
• Porogaramu:
• Byakoreshejwe cyane mubikorwa bya semiconductor, gutwikira ibirahuri, no gukora impuzu zidashobora kwambara.
• Nibyiza byo gukora ibinini, ceramic, cyangwa firime yoroheje.
• Ibyiza:
• Irashobora kubitsa ibintu byinshi, birimo ibyuma, ibinyobwa, na okiside.
• Ubwiza bwa firime nziza hamwe no gukwirakwiza intambwe, ndetse no kumiterere igoye.
• Kugenzura neza kubyimbye bya firime nibihimbano.
• Ibibi:
• Ibipimo byo gutinda buhoro ugereranije no guhumeka.
• Birahenze cyane kubera ibikoresho bigoye kandi bikeneye ingufu nyinshi.

Itandukaniro ry'ingenzi:

• Inkomoko yo kubitsa:
• Ubushyuhe bwumuriro bukoresha ubushyuhe kugirango bumare ibintu, mugihe sputtering ikoresha ion bombardment kugirango yirukane atome kumubiri.
• Ingufu zisabwa:
• Ubushyuhe bwumuriro busanzwe busaba imbaraga nke kuruta gusuka kuko bushingiye kubushyuhe aho kubyara plasma.
• Ibikoresho:
• Gusohora birashobora gukoreshwa kugirango ubike ibikoresho byinshi, harimo nibifite ingingo zishonga cyane, bigoye guhumeka.
• Ubwiza bwa Filime:
• Gusohora muri rusange bitanga kugenzura neza kubyimbye bya firime, uburinganire, hamwe nibigize.