ʻO ka waiho ʻana i nā kiʻiʻoniʻoni lahilahi he kaʻina kumu i hoʻohana ʻia i ka ʻoihana semiconductor, a me nā wahi ʻē aʻe o ka ʻepekema waiwai a me ka ʻenekinia. Hoʻopili ia i ka hana ʻana i kahi ʻāpana lahilahi o nā mea ma kahi substrate. Hiki i nā kiʻiʻoniʻoni i waiho ʻia ke loaʻa i nā ʻano mānoanoa nui, mai kahi liʻiliʻi o nā papa atomika a i kekahi mau micrometers mānoanoa. Hiki i kēia mau kiʻiʻoniʻoni ke lawelawe i nā kumu he nui, e like me nā mea hoʻokele uila, nā insulators, nā uhi optical, a i ʻole nā pale pale.
Eia nā ʻano kumu nui i hoʻohana ʻia no ka waiho ʻana i nā kiʻiʻoniʻoni lahilahi:
Hoʻopaʻa ʻia ka mahu kino (PVD)
Sputtering: Hoʻohana ʻia kahi kukuna ion ikehu kiʻekiʻe e kīkē i nā ʻātoma mai kahi mea i hoʻopaʻa ʻia, a laila waiho ʻia ma luna o ka substrate.
Hoʻohu:** Hoʻomaʻamaʻa ʻia ka mea i loko o kahi ʻūhā a hiki i ka hoʻoheheʻe ʻana, a laila hoʻopuʻi ka mahu ma luna o ka substrate.
ʻO ka waiho ʻana o ka Layer Atomic (ALD)
ʻO ka ALD kahi ʻenehana kahi e ulu ai kahi kiʻiʻoniʻoni ma luna o kahi pani hoʻokahi papa atomika i ka manawa. Hoʻomalu nui ʻia a hiki ke hana i nā kiʻiʻoniʻoni pololei loa.
Molecular Beam Epitaxy (MBE)
ʻO MBE kahi ʻenehana ulu epitaxial kahi e kuhikuhi ʻia ai nā kaola o nā ʻātoma a i ʻole nā molekole i kahi substrate wela e hana i kahi kiʻiʻoniʻoni lahilahi.
Nā Pōmaikaʻi o ka Deposition Film Thin
Nā hana i hoʻonui ʻia: Hiki i nā kiʻiʻoniʻoni ke hāʻawi i nā waiwai hou i ka substrate, e like me ke kū'ē ʻana a i ʻole ka conductivity uila.
Hoʻemi i ka hoʻohana ʻana i nā mea waiwai: ʻae ia i ka hana ʻana i nā mea paʻakikī me ka liʻiliʻi o ka hoʻohana ʻana i nā mea waiwai, e hōʻemi ana i nā kumukūʻai.
Hoʻopilikino: Hiki ke hoʻopaʻa ʻia nā kiʻiʻoniʻoni i loaʻa i nā mea mechanical, uila, optical, a i ʻole kemika.
Nā noi
Nā mea hana Semiconductor: Transistors, integrated circuits, and microelectromechanical system (MEMS).
ʻO nā mea hoʻonani Optical: Nā pale anti-reflective a me ke kiʻekiʻe-reflective i nā lens a me nā pūnaewele lā.
Nā pale pale: No ka pale ʻana i ka ʻino a i ʻole ke komo ʻana i nā mea hana a me nā mīkini.
Nā noi lāʻau lapaʻau: ʻO nā uhi ma nā mea kanu lāʻau a i ʻole nā pūnaewele lawe lāʻau.
ʻO ke koho ʻana i ka ʻenehana deposition e pili ana i nā koi kikoʻī o ka noi, me ke ʻano o ka mea e waiho ʻia, nā waiwai kiʻiʻoniʻoni i makemake ʻia, a me nā kumu kūʻai.
-Ua hoʻokuʻu ʻia kēia ʻatikala emea hana mīkini hoʻopaʻa haʻahaʻaGuangdong Zhenhua
Ka manawa hoʻouna: ʻAukake-15-2024