Kubuchwepheshe bokumboza nge-vacuum,amafilimu amancane abonisa ukukhanya okuphezulu (HR) kanye namafilimu amancane abonisa ukukhanya okuphansi (AR) ziletha izinselele nezidingo ezihlukile ezithinta ngqo ukwakheka kwemishini, ukulawulwa kwenqubo, kanye namasu okubeka. Ngenkathi zombili izinhlobo zokumboza zithembele ekulawulweni okunembile kobukhulu befilimu, i-stoichiometry, kanye ne-refractive index, imisebenzi yazo yokukhanya ibeka izidingo ezihlukene ezicini ze-plasma, ukufana kokubeka, kanye nezinhlelo zokuqapha eziku-situde.
Izembozo ezibonisa ukukhanya okuphezulu zivame ukwakhiwa yizendlalelo ze-dielectric ezishintshashintshayo eziphezulu neziphansi, noma amafilimu ensimbi, aklanyelwe ukwandisa ukukhanya phezu kwebanga elithile le-wavelength. Ukufeza ukukhanya okufiswayo kudinga ukulawulwa okunembile kobukhulu besendlalelo ngokulandelana kwama-nanometer kanye ne-refractive index ehambisanayo kuyo yonke i-stack. Ngenxa yalokho, imishini esetshenziselwa izembozo ze-HR kumele inikeze ukulawula okuvelele kobukhulu befilimu, ukusatshalaliswa kwe-plasma efanayo, kanye nokusebenza kahle kokusetshenziswa okuqondiwe okuphezulu. Izinhlelo ze-magnetron sputtering eziqondiwe eziningi noma imigqa ye-electron beam PVD zivame ukusetshenziswa, ezikwazi ukufaka izendlalelo ezixinene, ezine-porosity ephansi ngokumuncwa okuncane. Ubuningi bamandla aphezulu kanye namazinga okubeka okuzinzile kubalulekile ukugwema amaphutha, ukuqongelela ukucindezeleka, noma ukuqhekeka okuncane okungalimaza ukukhanya. Ngaphezu kwalokho, amasu okuqapha athuthukile ngaphakathi kwendawo, njengokuqapha okubonakalayo noma i-quartz crystal microbalance (QCM), ahlanganiswe ukuze kugcinwe ukulawula okunembile kwezendlalelo phezu kwemijikelezo eminingi yokufaka.
Ngokuphambene nalokho, izembozo ezibonisa ukukhanya okuncane noma ezivimbela ukukhanya zihlose ukunciphisa ukukhanya ngokuphazamiseka okubhubhisayo okulawulwayo. Izembozo ze-AR zivame ukudinga izindawo ezibushelelezi kakhulu, izinkomba zokukhanya ezilinganisiwe, kanye nezikhungo zokuhlakazeka ezincane. Imishini yezembozo ze-AR igcizelela ukujikeleza kwe-substrate, ukusatshalaliswa kwegesi okufanayo, kanye nokufakwa kwamandla aphansi ukuqinisekisa ukushelela kobuso kanye nenkomba yokukhanya efanayo. Ukushwibeka okusabelayo noma ukufakwa okusizwa yi-ion kungasetshenziswa ukwenza ngcono i-stoichiometry nokunciphisa ukucindezeleka okusele. Ukungcola kwegumbi kanye namazinga egesi asele alawulwa ngokuqinile, njengoba ngisho nokufakwa okuncane kwe-oxygen, umswakama, noma ama-hydrocarbon kungandisa ukumuncwa noma ukuhlakazeka kokukhanya, kunciphisa ukusebenza kokukhanya okuvimbela ukukhanya.
Umehluko oyinhloko ekwakhiweni kwemishini phakathi kwezembozo ze-HR ne-AR usebhalansini phakathi kwamandla okufaka, ukufana kwe-plasma, kanye nokunemba kokulawula izinqubo. Izinhlelo zezembozo ze-HR zibeka phambili ukufakwa kwamandla aphezulu, amandla aphezulu ngokuqapha okuqondile kobukhulu besendlalelo ukuze kufezwe ukubonakaliswa okuphezulu, kuyilapho izinhlelo zezembozo ze-AR zibeka phambili ukufakwa komonakalo ophansi, okufanayo kakhulu ukuze kugcinwe ubushelelezi bomphezulu kanye nokuhlakazeka okuncane. Ngaphezu kwalokho, umthamo womthwalo, ukuphathwa kwe-substrate, kanye nokuphathwa kokushisa kumele kulungiselelwe uhlobo ngalunye lwezembozo; izitaki zezendlalelo eziningi ezibonisa ukukhanya okuphezulu zikhiqiza umthwalo wokushisa owengeziwe, odinga ukupholisa okusebenzayo kanye nokuphathwa kokucindezeleka, kanti izembozo ze-AR zidinga izindawo ezihlanzekile kakhulu kanye nokulawulwa kwamandla e-ion okunembile.
Ngamafuphi, nakuba kokubili izembozo ezibonisa ukukhanya okuphezulu kanye nezibonisa ukukhanya okuphansi zihlanganyela izisekelo ezivamile zokufaka i-vacuum, imisebenzi yazo yokukhanya ilawula ukucushwa kwemishini ekhethekile, amasu okulawula izinqubo, kanye nezinhlelo zokuqapha. Ukuqonda lokhu kwahlukana kubalulekile ekufezeni ukusebenza okubonakalayo okuklanyelwe, ukuphindaphinda, kanye nokuzinza kwesikhathi eside kwamafilimu amancane ezinhlelweni ezidinga kakhulu njengezibuko zokukhanya, amalensi, amadivayisi e-photonic, kanye nobuchwepheshe bokubonisa.
-Lesi sihloko sishicilelwe nguumenzi wemishini yokumboza nge-vacuumI-Zhenhua Vacuum
Isikhathi sokuthunyelwe: Mashi-13-2026