Kwiteknoloji yokugquma nge-vacuum,iifilimu ezincinci ezibonisa ukukhanya okuphezulu (HR) kunye nezibonisa ukukhanya okuphantsi (AR) zibonelela ngemingeni eyahlukeneyo kunye neemfuno ezichaphazela ngokuthe ngqo uyilo lwezixhobo, ulawulo lwenkqubo, kunye namaqhinga okubeka. Ngelixa zombini ezi ntlobo zokwaleka zixhomekeke kulawulo oluchanekileyo lobukhulu befilimu, i-stoichiometry, kunye ne-refractive index, imisebenzi yazo yokukhanya ibeka iimfuno ezahlukeneyo kwiimpawu zeplasma, ukufana kokubeka, kunye neenkqubo zokubeka iliso kwindawo.
Iingubo ezibonisa ukukhanya okuphezulu zihlala zenziwe ziingqimba ze-dielectric ezitshintshanayo eziphezulu nezisezantsi, okanye iifilimu zesinyithi, ezenzelwe ukwandisa ukukhanya phezu kweendawo ezithile zobude be-wavelength. Ukufezekisa ukukhanya okufunekayo kufuna ulawulo oluchanekileyo lobukhulu bengqimba ngokwe-nanometers kunye ne-refractive index ehambelanayo kuyo yonke i-stack. Ngenxa yoko, izixhobo ezisetyenziselwa iingubo ze-HR kufuneka zibonelele ngolawulo olugqwesileyo lobukhulu befilimu, ukusasazwa kweplasma efanayo, kunye nokusebenza kakuhle kokusetyenziswa kwethagethi ephezulu. Iinkqubo ze-magnetron sputtering ezininzi okanye imigca ye-electron beam PVD zihlala zisetyenziswa, ezikwaziyo ukufaka iingqimba ezixineneyo, eziphantsi kunye nokufunxwa okuncinci. Uxinano lwamandla aphezulu kunye namazinga okubeka azinzileyo abalulekile ukuphepha iziphene, ukuqokelelwa koxinzelelo, okanye ukuqhekeka okuncinci okuya kuphazamisa ukukhanya. Ukongeza, iindlela zokubeka esweni eziphucukileyo, ezinje ngokubeka esweni okubonakalayo okanye i-quartz crystal microbalance (QCM), zidibene ukugcina ulawulo oluchanekileyo lwengqimba kwimijikelo emininzi yokufaka.
Ngokwahlukileyo koko, iingubo ezibonisa ukukhanya okuphantsi okanye ezingabonisi ukukhanya zijolise ekunciphiseni ukukhanya ngokuphazamiseka okulawulwayo. Iingubo ze-AR zihlala zifuna iindawo ezigudileyo kakhulu, izalathisi zokuchasana ezilinganisiweyo, kunye namaziko amancinci okuchitha. Izixhobo zeengubo ze-AR zigxininisa ukujikeleza kwe-substrate, ukusasazwa kwegesi efanayo, kunye nokubekwa kwamandla aphantsi ukuqinisekisa ukuguda komphezulu kunye nesalathisi sokuchasana esifanayo. Ukutshiza okusabelayo okanye ukufakwa okuncediswa yi-ion kunokusetyenziswa ukuphucula i-stoichiometry kunye nokunciphisa uxinzelelo olushiyekileyo. Ungcoliseko lwegumbi kunye namanqanaba egesi ashiyekileyo alawulwa ngokuqinileyo, njengoko ukufakwa okuncinci kweoksijini, ukufuma, okanye iihydrocarbon kunokunyusa ukufunxwa okanye ukusasazeka kwe-optical, kunciphisa ukusebenza kwengubo okuchasene nokuchasana.
Umahluko ophambili kuyilo lwezixhobo phakathi kweengubo ze-HR kunye ne-AR usekwe kukulinganisela phakathi kwamandla okubeka, ukufana kweplasma, kunye nokuchaneka kokulawula inkqubo. Iinkqubo zokugquma ze-HR zibeka phambili ukufakwa koxinano oluphezulu, amandla aphezulu kunye nokubeka iliso elichanekileyo lobukhulu beleyara ukuze kufezekiswe ukubonakaliswa okuphezulu, ngelixa iinkqubo zokugquma ze-AR zibeka phambili ukufakwa komonakalo ophantsi, okufanayo kakhulu ukugcina ubuthambile bomphezulu kunye nokusasazeka okuncinci. Ngaphezu koko, umthamo womthwalo, ukuphathwa kwe-substrate, kunye nolawulo lobushushu kufuneka kulungiselelwe uhlobo ngalunye lokugquma; ii-stacks ze-multilayer ezibonisa ukukhanya okuphezulu zivelisa umthwalo wobushushu oqokelelweyo, odinga ukupholisa okusebenzayo kunye nolawulo loxinzelelo, ngelixa iingubo ze-AR zifuna iindawo ezicocekileyo kakhulu kunye nolawulo oluchanekileyo lwamandla e-ion.
Ngamafutshane, nangona zombini iingubo ezibonisa ukukhanya okuphezulu kunye nezibonisa ukukhanya okuphantsi zabelana ngeziseko ezifanayo zokubeka i-vacuum, imisebenzi yazo yokukhanya ilawula uqwalaselo lwezixhobo ezikhethekileyo, amaqhinga okulawula inkqubo, kunye neenkqubo zokubeka esweni. Ukuqonda olu mahluko kubalulekile ekufezekiseni ukusebenza kwe-optical okuyilwe, ukuphinda kuvele, kunye nokuzinza kwexesha elide kweefilimu ezincinci kwizicelo ezifuna amandla ezifana nezipili ze-optical, iilensi, izixhobo ze-photonic, kunye neetekhnoloji zokubonisa.
-Eli nqaku lipapashwe nguumenzi wezixhobo zokugquma nge-vacuumI-Zhenhua Vacuum
Ixesha leposi: Matshi-13-2026