Mu ikoranabuhanga ryo gusiga irangi ry'umwuka mu buryo bwa "vacuum covering",Filime nto zigaragaza urumuri rwinshi (HR) n'izigaragaza urumuri ruto (AR) Hari imbogamizi n'ibisabwa bitandukanye bigira ingaruka ku buryo butaziguye ku gishushanyo mbonera cy'ibikoresho, kugenzura uburyo bikorwamo, n'ingamba zo kubishyiraho. Nubwo ubwoko bwombi bw'ibirahure bushingiye ku kugenzura neza ubugari bwa filime, stoichiometry, na refractive index, imikorere yabyo y'amatara ishyiraho ibisabwa bitandukanye ku miterere ya plasma, uburyo bwo kubishyiraho, na sisitemu zo kubigenzura aho biri.
Ubusanzwe, ibikoresho byo kugarura urumuri bigizwe n'ibice by'amashanyarazi bisimburana bisimburana, cyangwa filime z'icyuma, byagenewe kongera ubushobozi bwo kugarura urumuri mu rugero runaka rw'uburebure. Kugira ngo ugere ku buryo bwo kugarura urumuri bwifuzwa bisaba kugenzura neza ubugari bw'ibice hakurikijwe uko nanometero zimeze n'uburyo bwo kugarura urumuri buhoraho mu gice cyose. Kubera iyo mpamvu, ibikoresho bikoreshwa mu gushushanya HR bigomba gutanga uburyo bwo kugenzura ubugari bwa filime budasanzwe, gukwirakwiza plasma imwe, no gukoresha neza intego. Sisitemu zo gukwirakwiza magnetron nyinshi cyangwa imirongo ya PVD ya elegitoroniki ikunze gukoreshwa, ishobora gushyiramo ibice by'ubucucike, bifite porosity nke kandi bito cyane. Ubucucike bwinshi bw'ingufu n'umuvuduko uhamye wo gushyiramo ni ingenzi cyane kugira ngo hirindwe inenge, kwegerana kw'imihangayiko, cyangwa gucikagurika kwa micro-cracking byabangamira ubushobozi bwo kugarura urumuri. Byongeye kandi, uburyo bugezweho bwo kugenzura ahantu runaka, nko kugenzura optique cyangwa quartz crystal microbalance (QCM), byahujwe kugira ngo bikomeze kugenzura neza uburyo bwo gushyiramo ibintu mu buryo burambuye.
Mu buryo bunyuranye, irangi rigabanya urumuri cyangwa rirwanya urumuri rigamije kugabanya urumuri binyuze mu kugabanya ingaruka mbi zigenzurwa. Irangi rya AR rikunze gusaba ubuso bworoshye cyane, ibipimo bya refractive byagenwe, n'ahantu hato ho gukwirakwira. Ibikoresho byo gukwirakwira kwa AR bishimangira kuzunguruka kwa substrate, gukwirakwira kwa gaze imwe, no gushyira ingufu nke kugira ngo habeho ubushyuhe bwiza ku buso no kugabanya uburemere bwa refractive. Gutera sputtering cyangwa gushyiramo iy'iyoni bishobora gukoreshwa mu kunoza stoichiometry no kugabanya uburemere bwa residual. Kwanduzwa n'ibice by'imyuka bisigaye bigenzurwa cyane, kuko no gushyiramo gake ogisijeni, ubushuhe, cyangwa hydrocarbon bishobora kongera ubushobozi bwo kwinjiza cyangwa gukwirakwira kw'urumuri, bigagabanya imikorere ya refractive ya rotation.
Itandukaniro ry'ibanze mu miterere y'ibikoresho hagati y'ingufu za HR na AR riri mu kuringaniza hagati y'ingufu zo gushyiramo, uburinganire bwa plasma, n'uburyo bwo kugenzura neza imikorere. Sisitemu zo gusigamo HR zishyira imbere ingufu nyinshi, zifite ubucucike bwinshi hamwe n'ubugari bw'urwego kugira ngo hagerwe ku kugaragara neza, mu gihe sisitemu zo gusigamo AR zishyira imbere ingufu nke kandi zihuye cyane kugira ngo zigumane ubushyuhe bwiza kandi budakwirakwira cyane. Byongeye kandi, ubushobozi bwo gutwara imizigo, uburyo bwo gucunga substrate, no gucunga ubushyuhe bigomba guhindurwa hakurikijwe buri bwoko bw'ingufu; uduce twinshi tw'ingufu dutanga ubushyuhe bwinshi, bisaba gukonjesha no gucunga stress, mu gihe ingufu za AR zisaba ibidukikije bisukuye cyane no kugenzura neza ingufu za ion.
Muri make, nubwo irangi rigaragaza urumuri rwinshi n’irigaragaza urumuri ruto bisangiye ishingiro ryo gushyiramo umwuka mu buryo busanzwe, imikorere yaryo igena imiterere yihariye y’ibikoresho, ingamba zo kugenzura ibikorwa, na sisitemu zo kubikurikirana. Gusobanukirwa aya matandukaniro ni ingenzi kugira ngo hagerwe ku mikorere yagenewe urumuri, kongera kubyaza umusaruro, no kugumana filime nto mu buryo burambye mu bikorwa bigoye nko mu ndorerwamo z’urumuri, lenses, ibikoresho bya fotoni, n’ikoranabuhanga ryo kwerekana.
-Iyi nkuru yasohotse nauruganda rukora ibikoresho byo gusiga irangi ry'umwukaZhenhua Vacuum
Igihe cyo kohereza ubutumwa: Werurwe-13-2026