Hauv cov txheej txheem nqus tsev,Cov yeeb yaj kiab nyias nyias uas muaj kev cuam tshuam siab (HR) thiab cov yeeb yaj kiab nyias uas muaj kev cuam tshuam tsawg (AR) nthuav tawm cov teeb meem sib txawv thiab cov kev cai uas cuam tshuam ncaj qha rau kev tsim cov khoom siv, kev tswj cov txheej txheem, thiab cov tswv yim tso zis. Txawm hais tias ob hom txheej txheej vam khom kev tswj hwm qhov tuab ntawm zaj duab xis, stoichiometry, thiab refractive index, lawv cov haujlwm optical ua rau muaj kev xav tau sib txawv ntawm cov yam ntxwv plasma, kev sib npaug ntawm cov dej tso zis, thiab cov txheej txheem saib xyuas hauv qhov chaw.
Cov txheej txheej uas muaj kev cuam tshuam siab feem ntau yog tsim los ntawm cov txheej dielectric uas muaj qhov siab thiab qis refractive index, lossis cov yeeb yaj kiab hlau, tsim los ua kom muaj kev cuam tshuam ntau dua li qhov sib txawv ntawm cov wavelength. Kev ua tiav qhov kev cuam tshuam xav tau yuav tsum tswj hwm qhov tuab ntawm cov txheej ntawm qhov kev txiav txim ntawm nanometers thiab cov refractive index sib xws thoob plaws hauv pawg. Yog li ntawd, cov khoom siv siv rau HR coatings yuav tsum muab kev tswj hwm qhov tuab ntawm cov yeeb yaj kiab zoo heev, kev faib tawm plasma sib xws, thiab kev siv lub hom phiaj siab. Cov txheej txheem magnetron sputtering ntau lub hom phiaj lossis cov kab electron beam PVD feem ntau siv, muaj peev xwm tso cov khaubncaws sab nraud povtseg ntom ntom, qis-porosity nrog kev nqus tsawg kawg nkaus. Lub zog ceev ceev thiab cov nqi tso tawm ruaj khov yog qhov tseem ceeb kom tsis txhob muaj qhov tsis zoo, kev ntxhov siab, lossis micro-cracking uas yuav ua rau muaj kev cuam tshuam. Tsis tas li ntawd, cov txheej txheem saib xyuas hauv-qhov chaw siab heev, xws li kev saib xyuas optical lossis quartz crystal microbalance (QCM), tau koom ua ke los tswj cov txheej txheem meej ntawm ntau lub voj voog tso tawm.
Qhov sib piv, cov txheej txheej uas tsis tshua muaj kev cuam tshuam lossis tiv thaiv kev cuam tshuam lub hom phiaj yog kom txo qis kev cuam tshuam los ntawm kev tswj hwm kev cuam tshuam. AR txheej txheej feem ntau xav tau cov nplaim du heev, cov ntsuas refractive qib, thiab cov chaw tawg tsawg kawg nkaus. Cov khoom siv rau AR txheej txheej hais txog kev tig ntawm cov khoom siv substrate, kev faib roj sib npaug, thiab kev tso tawm zog tsawg kom ntseeg tau tias qhov chaw du thiab cov ntsuas refractive sib npaug. Reactive sputtering lossis ion-assisted deposition yuav siv tau los ua kom zoo dua stoichiometry thiab txo qis kev ntxhov siab seem. Kev ua qias tuaj ntawm chav tsev thiab cov roj seem raug tswj hwm nruj, vim tias txawm tias me me ntawm cov pa oxygen, dej noo, lossis hydrocarbons tuaj yeem ua rau kev nqus pom lossis kev tawg, txo qhov kev ua tau zoo tiv thaiv kev cuam tshuam ntawm cov txheej txheej.
Qhov sib txawv tseem ceeb hauv kev tsim cov khoom siv ntawm HR thiab AR coatings yog nyob rau hauv qhov sib npaug ntawm lub zog tso tawm, plasma uniformity, thiab kev tswj hwm cov txheej txheem. HR coating systems muab qhov tseem ceeb rau qhov siab-density, high-energy deposition nrog kev soj ntsuam cov txheej tuab kom ua tiav qhov siab tshaj plaws reflectivity, thaum AR coating systems muab qhov tseem ceeb rau qhov kev puas tsuaj tsawg, high-uniform deposition kom tswj tau qhov du thiab tsawg kawg nkaus scattering. Ntxiv mus, lub peev xwm thauj khoom, kev tuav substrate, thiab kev tswj hwm thermal yuav tsum tau ua kom haum rau txhua hom coating; high-reflective multilayer stacks tsim ntau dua thermal load, xav tau kev txias thiab kev tswj hwm kev ntxhov siab, thaum AR coatings xav tau cov chaw huv si thiab kev tswj hwm lub zog ion meej.
Hauv kev xaus, txawm hais tias ob qho tib si cov txheej txheem siab-reflective thiab qis-reflective sib koom ua ke lub hauv paus deposition nqus tsev, lawv cov haujlwm optical tswj hwm cov khoom siv tshwj xeeb, cov tswv yim tswj cov txheej txheem, thiab cov txheej txheem saib xyuas. Kev nkag siab txog cov kev sib txawv no yog qhov tseem ceeb rau kev ua tiav qhov kev ua tau zoo optical, reproducibility, thiab kev ruaj khov mus sij hawm ntev ntawm cov yeeb yaj kiab nyias hauv cov ntawv thov uas xav tau xws li cov iav optical, lens, photonic devices, thiab cov thev naus laus zis tso saib.
- Tsab xov xwm no tau luam tawm los ntawmChaw tsim khoom siv nqus tsev txheejZhenhua Nqus Tsev
Lub sijhawm tshaj tawm: Lub Peb Hlis-13-2026