Mahlaleng a ho roala ka vacuum,lifilimi tse tšesaane tse bonahatsang haholo (HR) le tse bonahatsang hanyane (AR) e hlahisa liphephetso le litlhoko tse fapaneng tse susumetsang ka ho toba moralo oa lisebelisoa, taolo ea ts'ebetso le maano a ho beha. Leha mefuta ka bobeli ea liphahlo e itšetlehile ka taolo e nepahetseng ea botenya ba filimi, stoichiometry, le index ea refractive, mesebetsi ea tsona ea optical e beha litlhoko tse fapaneng litšobotsing tsa plasma, ho tšoana ha ho beha, le litsamaiso tsa ho beha leihlo ka har'a sebaka.
Liaparo tse bonahatsang haholo hangata li entsoe ka mekhahlelo ea dielectric ea index ea refractive e phahameng le e tlase e fapanyetsanang, kapa lifilimi tsa tšepe, tse etselitsoeng ho eketsa reflectivity holim'a mefuta e itseng ea bolelele ba maqhubu. Ho fihlella reflectivity e lakatsehang ho hloka taolo e nepahetseng ea botenya ba lera ka tatellano ea li-nanometer le index ea refractive e tsitsitseng ho pholletsa le stack. Ka lebaka leo, lisebelisoa tse sebelisoang bakeng sa liaparo tsa HR li tlameha ho fana ka taolo e ikhethang ea botenya ba filimi, kabo e ts'oanang ea plasma, le katleho e phahameng ea ts'ebeliso ea sepheo. Litsamaiso tsa sputtering tsa magnetron tse nang le sepheo se seholo kapa mela ea PVD ea electron beam hangata lia sebelisoa, li khona ho beha mekhahlelo e teteaneng, e nang le masoba a tlase ka ho monya ho fokolang. Sekhahla se phahameng sa matla le sekhahla se tsitsitseng sa deposition li bohlokoa ho qoba liphoso, ho bokellana ha khatello ea maikutlo, kapa ho petsoha ho honyenyane ho ka behang reflectivity kotsing. Ho feta moo, mekhoa e tsoetseng pele ea ho beha leihlo sebakeng, joalo ka tlhokomelo ea optical kapa quartz crystal microbalance (QCM), li kopantsoe ho boloka taolo e nepahetseng ea lera holim'a lipotoloho tse ngata tsa deposition.
Ka lehlakoreng le leng, dikobo tse bontshang kganya e tlase kapa tse thibelang kganya e kgolo di ikemiseditse ho fokotsa ho kganya ka tshitiso e laolwang e senyang. Dikobo tse bontshang kganya e kgolo hangata di hloka dibaka tse boreledi haholo, di-index tse bontshang kganya e kgolo, le ditsi tse fokolang tsa ho hasanya. Disebediswa tsa dikobo tse bontshang kganya e kgolo di hatisa ho potoloha ha substrate, kabo ya kganya e tshwanang, le ho kenya matla a tlase ho netefatsa boreledi ba bokahodimo le index e tshwanang ya ho kganya e kgolo. Ho ntsha kganya e sebetsang kapa ho kenya matla a tshehetswang ke ion ho ka sebediswa ho ntlafatsa stoichiometry le ho fokotsa kgatello e setseng. Tshilafalo ya kamore le maemo a kgase a setseng a laolwa ka thata, kaha esita le ho kenngwa hanyane ha oksijene, mongobo, kapa di-hydrocarbon ho ka eketsa ho monya kapa ho hasanya ha optical, ho fokotsa tshebetso ya ho thibela kganya ya seaparo.
Phapang e ka sehloohong moralong oa lisebelisoa pakeng tsa liphahlo tsa HR le AR e ho leka-lekana pakeng tsa matla a ho beha, ho tšoana ha plasma, le ho nepahala ha taolo ea ts'ebetso. Litsamaiso tsa ho koahela tsa HR li beha pele ho beha matla a phahameng, a matla a mangata ka tlhokomelo e nepahetseng ea botenya ba lera ho fihlela ho bonahatsa ho hoholo, ha litsamaiso tsa ho koahela tsa AR li beha pele ho beha tšenyo e tlase, e tšoanang haholo ho boloka boreleli ba bokaholimo le ho hasana ho fokolang. Ho feta moo, bokhoni ba mojaro, ts'ebetso ea substrate, le tsamaiso ea mocheso li tlameha ho etsoa ho latela mofuta o mong le o mong oa ho koahela; li-stack tse ngata tse bonahatsang haholo li hlahisa mojaro o eketsehileng oa mocheso o bokellanang, o hlokang ho pholisa ho mafolofolo le taolo ea khatello ea maikutlo, ha liphahlo tsa AR li hloka libaka tse hloekileng haholo le taolo e nepahetseng ea matla a ion.
Ka bokhutšoanyane, le hoja masela a bonahatsang haholo le a bonahatsang hanyane a arolelana metheo e tšoanang ea ho boloka vacuum, mesebetsi ea 'ona ea optical e laola litlhophiso tse khethehileng tsa lisebelisoa, maano a taolo ea ts'ebetso le litsamaiso tsa ho beha leihlo. Ho utloisisa liphapang tsena ho bohlokoa bakeng sa ho fihlela ts'ebetso e etselitsoeng ea optical, ho ikatisa hape, le botsitso ba nako e telele ba lifilimi tse tšesaane lits'ebetsong tse hlokang tlhokomelo joalo ka liipone tsa optical, lilense, lisebelisoa tsa photonic le mahlale a ponts'o.
-Sengoloa sena se phatlalalitsoe kemoetsi oa lisebelisoa tsa ho roala ka vacuumLetsoho la Zhenhua
Nako ea poso: Hlakubele-13-2026