Izinto Ezivamile Ezisetshenziswa Ezinqubweni Zokumboza Nge-Vacuum

1. Ukubuka konke kwezimiso zokumboza nge-vacuum

Ubuchwepheshe bokumboza nge-vacuumubuchwepheshe bokubeka ubuso obusekelwe ku-Physical Vapor Deposition (PVD) noma i-Chemical Vapor Deposition (CVD). Ngaphansi kwezimo eziphezulu ze-vacuum, izinto zokumboza eziqinile noma zegesi ziguqulwa zibe yizinhlayiya zamahhala ngokushisa, ukuqhuma kwe-plasma, noma ukusabela kwamakhemikhali, bese kamuva zifakwa phezu kwendawo engaphansi komhlaba ukuze kwakhiwe ifilimu encane.

Izinqubo ezijwayelekile zifaka:

Ukwembozwa Kokuhwamuka (isb., ukuhwamuka kokumelana nokushisa, ukuhwamuka kwe-electron beam), i-Magnetron Sputtering, i-Ion Plating, i-Chemical Vapor Deposition (CVD)

Nakuba ukukhethwa kwenqubo kuhluka kuye ngokusetshenziswa, umgomo wokugcina uhlala ungaguquguquki: ukufeza ukunamathela okuphezulu, ukufana, kanye nokuqina kwefilimu.

2. Izigaba zezinto ezivamile zokumboza nge-vacuum

Ngokusho komsebenzi wefilimu kanye nezidingo zenqubo, izinto zokumboza nge-vacuum zihlukaniswa kakhulu ngezigaba ezilandelayo:

(1) Izinto Zensimbi

I-Aluminium (Al): Isetshenziswa kabanzi ekumbozeni nasekufakeni izendlalelo ezibonisa ukukhanya, njengasezitsheni zokubonisa ukukhanya kwezimoto kanye namaphaneli okuhlobisa.

I-Titanium (Ti): Isetshenziswa ezimbozweni eziqinile noma ekukhiqizeni amafilimu okuhlobisa aluhlaza okwesibhakabhaka negolide.

I-Chromium (Cr): Enye indlela ebalulekile ye-PVD esikhundleni se-electroplating yendabuko, eyaziwa ngokukhanya okuphezulu nokumelana nokugqwala.

Insimbi Engagqwali (SUS304, SUS316, njll.): Isetshenziselwa ukugqoka okubonakala njengensimbi okunamandla okumelana nokuguguleka.

Ithusi (Cu), Isiliva (Ag), Igolide (Au): Ivame ukusetshenziswa ekumbozweni kwe-elekthronikhi, kokuhlobisa, kanye nokusebenza komoya.

(2) Izinto Zobumba kanye Ne-Oxide

I-Silicon Dioxide (SiO₂): Isetshenziswa ezimbozweni ezivimbela ukukhanya (AR), ezingqimbeni zokuthuthukisa ukukhanya, kanye namafilimu okuvikela ukukhanya.

I-Titanium Dioxide (TiO₂): Into enenkomba ephezulu yokugqama esetshenziswa kaningi ekumbozweni kokuphazamiseka kokukhanya.

I-Zirconium Dioxide (ZrO₂): Inikeza ukuzinza okuhle kakhulu kokushisa kanye nokumelana nokuguguleka okuphezulu.

I-Aluminium Oxide (Al₂O₃): Yaziwa ngokuqina okuphezulu, ivame ukusetshenziswa njengesembozo esiqinile esivikelayo.

(3) Ama-Nitride nama-Carbide

I-Titanium Nitride (TiN): Izinto ezijwayelekile zokuhlobisa zegolide ezinobulukhuni obuphezulu kanye nokumelana nokugqwala.

I-Chromium Nitride (CrN), i-Zirconium Nitride (ZrN): Isetshenziswa kabanzi ekumbozweni kwamathuluzi nasezinhlelweni ezingagugi.

I-Silicon Carbide (SiC), i-Titanium Carbide (TiC): Ifanele ukusetshenziswa kokuqina okuphezulu kanye nokumelana nokushisa okuphezulu.

3. Izindlela Zokukhetha Izinto Nokuhambisana Kwenqubo

Ukusebenza kahle kokumboza kuncike kokubili enkambisweni yokubeka kanye nezinto ezikhethiwe. Izici ezibalulekile okufanele uzicabangele zifaka:

Ukuhambisana kwe-Substrate: I-substrate ezahlukene ezifana nepulasitiki, insimbi, nengilazi zidinga izakhiwo ezithile zokunamathela kwefilimu.

Izidingo Zokusebenza: Khetha izinto zokumboza ngokusekelwe ezidingweni ezifana nokumelana nokushiswa kwe-oxidation, ukuhanjiswa kwe-conductivity, noma ukuhlunga okubonakalayo.

Ukufaneleka Kwenqubo: Isibonelo, ukusputtering kwe-magnetron kuhambisana kakhulu nezinsimbi nama-oxide, kuyilapho ukuhwamuka kufaneleka ezintweni ezingancibiliki kalula.

Ngokwesibonelo:

Ezimbozweni zokuhlobisa ezisekelwe ku-PVD zezingxenye zangaphakathi zezimoto, i-Cr, i-Ti, ne-TiN zisetshenziswa kabanzi njengezindlela ezinobungani nemvelo esikhundleni se-electroplating.

Ezimbozweni ezibonakalayo ezivimbela ukukhanyisa (AR), i-SiO₂ ne-TiO₂ zakha inhlanganisela yezinto eziyisisekelo.

Ukukhethwa Kwezinto Kunquma Ikhwalithi Yefilimu

Ukusebenza kwefilimu efakwe nge-vacuum akuthonywa nje kuphela yimishini kanye nokulawulwa kwenqubo kodwa futhi kugxilwe kakhulu ekukhetheni izinto ezibonakalayo. Ukukhetha izinto zokumboza ezifanele nokuyihlanganisa nendlela efanele yokufaka kubalulekile ekufezeni ukusebenza kahle kwefilimu.

—Lesi sihloko sishicilelwe ngu imishini yokumboza nge-vacuum umenzi we-Zhenhua Vacuum