1. Tirohanga Whānui o ngā Mātāpono Paninga Korehau
Hangarau paninga korehauHe hangarau whakatakoto mata te hangarau nei, e ahu mai ana i te whakatakotonga kohu ā-tinana (PVD) me te whakatakotonga kohu matū (CVD). I raro i ngā āhuatanga korehau teitei, ka hurihia ngā rauemi paninga totoka, hau rānei hei matūriki kore utu mā te whakamahana, te pupuhi plasma, ngā tauhohenga matū rānei, ā, ka whakatakotoria ki te mata o te papa hei hanga i tētahi kiriata angiangi.
Ko ngā tukanga noa ko:
Paninga Whakamomona (hei tauira, te whakamomona ātete wera, te whakamomona hihi irahiko), te Whakapūtanga Magnetron, te Whakatakotoranga Ion, te Whakatakotoranga Kohu Matū (CVD)
Ahakoa he rerekē te kōwhiringa tukanga i runga i te tono, ko te whāinga matua he rite tonu: te whakatutuki i te piripono teitei, te ōritetanga, me te pumau o te kiriata.
2. Ngā Kāwai o ngā Rauemi Paninga Korehau Noa
E ai ki te mahi kiriata me ngā whakaritenga tukanga, ka whakarōpūtia ngā rauemi paninga korehau ki ngā kāwai e whai ake nei:
(1) Ngā Rauemi Whakarewa
Konumohe (Al): He whānuitia te whakamahinga mō ngā paninga whakapaipai me ngā paparanga whakaata, pērā i ngā peihana whakaata motuka me ngā panera whakapaipai.
Taitānia (Ti): Ka whakamahia hei paninga mārō, hei hanga kiriata whakapaipai kikorangi, koura rānei.
Chromium (Cr): He momo PVD matua hei whakakapi i te whakakikoruatanga hiko tuku iho, e mōhiotia ana mō tōna kanapa teitei me te ātete ki te waikura.
Kowiri tira (SUS304, SUS316, me ētahi atu): Whakamahia mō ngā paninga āhua-whakarewa me te ātete ki te kakahu.
Parahi (Cu), Hiriwa (Ag), Koura (Au): E whakamahia whānuitia ana i roto i ngā paninga hiko, whakapaipai, me ngā paninga mahi kawe hiko.
(2) Ngā Rauemi Uku me te Waikura
Hāoraiti Hiraka (SiO₂): Whakamahia ki ngā paninga ārai-whakaata (AR), ngā paparanga whakarei whatu, me ngā kiriata ārai.
Taitāniuma Hauhā (TiO₂): He rauemi taupū whakaata teitei e whakamahia whānuitia ana i roto i ngā paninga pokanoa whatu.
Zirconium Dioxide (ZrO₂): He tino pai te pumau o te wera me te ātete ki te kakahu.
Konumohe Waikura (Al₂O₃): E mōhiotia ana mō tōna pakeketanga, e whakamahia ana hei paninga mārō tiaki.
(3) Ngā Nitride me ngā Carbide
Nitride Taitānia (TiN): He rauemi paninga whakapaipai koura noa iho, he tino pakari, he ātete hoki ki te waikura.
Chromium Nitride (CrN), Zirconium Nitride (ZrN): E whakamahia whānuitia ana i roto i ngā paninga taputapu me ngā tono ātete-kakahu.
Warowaihā Hiraka (SiC), Warowaihā Taitānia (TiC): He pai mō ngā mahi pakeke me te ātete ki te pāmahana teitei.
3. Ngā Paearu Kōwhiri Rauemi me te Hototahi Tukanga
Ko te whai huatanga o te paninga e whakawhirinaki ana ki te tikanga whakatakoto me ngā rauemi kua tīpakohia. Ko ngā mea matua hei whakaaroaro ko:
Hototahi ki te Papatūānuku: He rerekē ngā āhuatanga piri o ngā papatūānuku pērā i te kirihou, te konganuku, me te karāhe.
Ngā Whakaritenga Mahi: Kōwhiria ngā rauemi paninga i runga i ngā hiahia pēnei i te ātete waikura, te kawe hiko, te tātari whatu rānei.
Te Whai Hua o te Tukanga: Hei tauira, he pai ake te whakamahi i te magnetron sputtering ki ngā konganuku me ngā waikura, engari he pai te mimiti mō ngā rauemi iti-ira-rewa.
Hei tauira:
I roto i ngā paninga whakapaipai PVD mō ngā wāhanga o roto o ngā motuka, ka whakamahia whānuitia te Cr, te Ti, me te TiN hei huarahi pai mō te taiao hei whakakapi i te whakakikorua hiko.
I roto i ngā paninga whatu ārai-whakaata (AR), ko te SiO₂ me te TiO₂ ngā rauemi matua e hanga ana i te huinga.
Ko te Kōwhiringa Rauemi te Mea e Whakatau ana i te Kounga Kiriata
Ehara i te mea ko ngā taputapu me te whakahaere tukanga anake te mea e pāngia ai te mahi a te kiriata e whakatakotoria ana ki te korehau, engari ko te whiriwhiri rauemi anō hoki. Ko te whiriwhiri i te rauemi paninga tika me te hono atu ki te tikanga whakatakoto tika te mea nui ki te whakatutuki i te mahi pai o te kiriata.
—I whakaputaina tēnei tuhinga e taputapu paninga korehau kaihanga Zhenhua Vacuum
Wā tuku: Pipiri-27-2025