1. Pfupiso yeNheyo dzeKuputira Vacuum
Tekinoroji yekuputira vacuumtekinoroji yekuisa pamusoro yakavakirwa paPhysical Vapor Deposition (PVD) kana Chemical Vapor Deposition (CVD). Mumamiriro ekunze akawandisa, zvinhu zvakasimba kana zvegasi zvinoshandurwa kuita zvidimbu zvakasununguka kuburikidza nekupisa, plasma bombardment, kana makemikari, uye zvinozoiswa pamusoro pe substrate kuti zvigadzire firimu rakatetepa.
Maitiro akajairika anosanganisira:
Kuputira kweEvaporation (semuenzaniso, kupisa kunodzivirira kupisa, elektron beam evaporation), Magnetron Sputtering, Ion Plating, Chemical Vapor Deposition (CVD)
Kunyange zvazvo kusarudzwa kwemaitiro kuchisiyana zvichienderana nekushandiswa, chinangwa chikuru chinoramba chakafanana: kuwana kubatana kwakanyanya, kufanana, uye kugadzikana kwefirimu.
2. Mapoka eZvinhu Zvinoshandiswa Pakuputira Vacuum
Zvichienderana nebasa refirimu uye zvinodiwa nemaitiro, zvinhu zvekuputira vacuum zvinonyanya kupatsanurwa muzvikamu zvinotevera:
(1) Zvinhu zvesimbi
Aruminiyamu (Al): Inoshandiswa zvakanyanya pakushongedza machira uye kuisa machira anoratidzira, senge mumidziyo yekuisa magirazi emotokari uye mapaneru ekushongedza.
Titanium (Ti): Inoiswa mumachira akaomarara kana kugadzira mafirimu ekushongedza ebhuruu negoridhe.
Chromium (Cr): Imwe nzira huru yePVD pane kushandisa electroplating yechinyakare, inozivikanwa nekupenya kwakanyanya uye kuramba ngura.
Simbi Isina Zvisimbiso (SUS304, SUS316, nezvimwewo): Inoshandiswa pakuputira zvinhu zvakaita sesimbi uye inodzivirira kupfekwa zvakanyanya.
Mhangura (Cu), Sirivha (Ag), Goridhe (Au): Inowanzoshandiswa muzvipfeko zvemagetsi, zvekushongedza, uye zvinofambisa mhepo.
(2) Zvinhu zveCeramic neOxide
Silicon Dioxide (SiO₂): Inoshandiswa muzvipfeko zvinodzivirira kupenya (AR), muzvipfeko zvinosimudzira optical, uye mumafirimu anodziisa kupisa.
Titanium Dioxide (TiO₂): Chinhu chinoshandiswa zvakanyanya mukuisa magirazi mu optical interference coating.
Zirconium Dioxide (ZrO₂): Inopa kugadzikana kwakanaka kwekupisa uye inodzivirira kupfeka zvakanyanya.
Aluminum Oxide (Al₂O₃): Inozivikanwa nekuomarara kwakanyanya, inowanzoshandiswa sechivharo chakasimba chinodzivirira.
(3) Nitrides neCarbides
Titanium Nitride (TiN): Chishongo chegoridhe chakajairika chekushongedza chine kuomarara kwakanyanya uye chinodzivirira ngura.
Chromium Nitride (CrN), Zirconium Nitride (ZrN): Inoshandiswa zvakanyanya muzvipfeko zvematurusi uye mukushandiswa kunodzivirira kupera.
Silicon Carbide (SiC), Titanium Carbide (TiC): Yakakodzera kushandiswa pakaoma zvakanyanya uye pakupisa kwakanyanya.
3. Zvinodiwa pakusarudza zvinhu uye kuenderana kwemaitiro
Kushanda zvakanaka kwependi kunoenderana nenzira yekuisa pendi pamwe nezvinhu zvakasarudzwa. Zvinhu zvakakosha zvekufunga nezvazvo zvinosanganisira:
Kuenderana kweSubstrate: Substrate dzakasiyana dzakadai sepurasitiki, simbi, uye girazi dzinoda hunhu hwakasiyana hwekunamatira firimu.
Zvinodiwa Pakushanda: Sarudza zvinhu zvekuputira zvichienderana nezvinodiwa zvakaita sekudzivirira oxidation, conductivity, kana optical filtering.
Kukodzera Maitiro: Semuenzaniso, magnetron sputtering inonyatsoenderana nesimbi nema oxides, nepo evaporation yakakodzera zvinhu zvisinganyungudike zvakanyanya.
Semuyenzaniso:
Mumachira ekushongedza akagadzirwa nePVD ezvikamu zvemukati memotokari, Cr, Ti, uye TiN zvinoshandiswa zvakanyanya senzira dzinochengetedza nharaunda panzvimbo pe electroplating.
Muzvipfeko zvemaziso zvinodzivirira kupenya (AR), SiO₂ naTiO₂ zvinoumba musanganiswa wezvinhu zvakakosha.
Kusarudzwa Kwezvinhu Kunosarudza Hunhu hweMafirimu
Kushanda kwefirimu rakaiswa muchina wekubvisa tsvina hakungogumiri pakushandiswa kwemichina nemaitiro chete asiwo pakusarudza zvinhu. Kusarudza zvinhu zvakakodzera zvekufukidza uye kuzvibatanidza nenzira yakakodzera yekuburitsa tsvina ndicho chinhu chakakosha pakuita kuti firimu rishande zvakanaka.
—Nyaya iyi yakaburitswa na midziyo yekunamira ye vacuum mugadziri Zhenhua Vacuum
Nguva yekutumira: Chikumi-27-2025