1. Kev Txheeb Xyuas Txog Cov Ntsiab Cai ntawm Kev Txheej Txheem Nqus Tsev
Kev siv tshuab nqus tsev txheejyog ib txoj kev siv tshuab ua kom cov khoom siv saum npoo av raws li Physical Vapor Deposition (PVD) lossis Chemical Vapor Deposition (CVD). Nyob rau hauv qhov chaw nqus tsev siab, cov khoom siv txheej txheem khov kho lossis roj av raug hloov mus ua cov khoom dawb los ntawm kev cua sov, plasma bombardment, lossis cov tshuaj lom neeg, thiab tom qab ntawd raug tso rau ntawm qhov chaw substrate los ua ib zaj duab xis nyias.
Cov txheej txheem ib txwm muaj xws li:
Kev Txheej Txheem Evaporation (piv txwv li, thermal resistance evaporation, electron beam evaporation), Magnetron Sputtering, Ion Plating, Chemical Vapor Deposition (CVD)
Txawm hais tias kev xaiv cov txheej txheem sib txawv nyob ntawm daim ntawv thov, lub hom phiaj kawg tseem zoo ib yam: ua tiav kev nplaum siab, sib xws, thiab ruaj khov ntawm zaj duab xis.
2. Pawg ntawm Cov Khoom Siv Txheej Txheem Nqus Tsev
Raws li zaj duab xis ua haujlwm thiab cov txheej txheem xav tau, cov ntaub ntawv nqus tsev feem ntau yog muab faib ua pawg hauv qab no:
(1) Cov Khoom Siv Hlau
Txhuas (Al): Siv dav rau cov txheej pleev kom zoo nkauj thiab cov txheej ci ntsa iab, xws li hauv cov tais ci ntsa iab hauv tsheb thiab cov vaj huam sib luag kho kom zoo nkauj.
Titanium (Ti): Siv rau hauv cov txheej tawv lossis rau kev tsim cov yeeb yaj kiab kho kom zoo nkauj xiav thiab kub.
Chromium (Cr): Ib qho tseem ceeb PVD lwm txoj hauv kev rau electroplating ib txwm muaj, paub txog qhov ci ntsa iab thiab kev tiv thaiv corrosion.
Hlau Tsis Xeb (SUS304, SUS316, thiab lwm yam): Siv rau cov txheej hlau uas zoo li hlau uas tiv taus kev hnav zoo dua.
Tooj Liab (Cu), Nyiaj (Ag), Kub (Au): Feem ntau siv rau hauv cov khoom siv hluav taws xob, kho kom zoo nkauj, thiab cov txheej txheem ua haujlwm conductive.
(2) Cov Khoom Siv Ua Los Ntawm Pob Zeb Thiab Oxide
Silicon Dioxide (SiO₂): Siv rau hauv cov txheej tiv thaiv kev cuam tshuam (AR), cov txheej txhim kho qhov muag, thiab cov yeeb yaj kiab rwb thaiv tsev.
Titanium Dioxide (TiO₂): Ib yam khoom siv uas muaj cov refractive index siab uas feem ntau siv rau hauv cov txheej txheem cuam tshuam optical.
Zirconium Dioxide (ZrO₂): Muaj kev ruaj khov zoo heev thiab kev tiv taus kev hnav.
Aluminium Oxide (Al₂O₃): Paub txog qhov nyuaj siab, feem ntau siv ua txheej tawv tiv thaiv.
(3) Nitrides thiab Carbides
Titanium Nitride (TiN): Ib qho khoom siv pleev xim kub zoo nkauj uas muaj zog thiab tiv taus corrosion.
Chromium Nitride (CrN), Zirconium Nitride (ZrN): Siv dav hauv cov txheej txheem cuab yeej thiab cov ntawv thov uas tiv taus kev hnav.
Silicon Carbide (SiC), Titanium Carbide (TiC): Haum rau cov ntawv thov uas muaj zog thiab tiv taus kub siab.
3. Cov Qauv Xaiv Khoom Siv thiab Kev Sib Xws ntawm Cov Txheej Txheem
Qhov ua tau zoo ntawm kev pleev xim nyob ntawm ob qho tib si txoj kev tso dej thiab cov ntaub ntawv xaiv. Cov yam tseem ceeb uas yuav tsum xav txog suav nrog:
Kev Sib Txuas Lus ntawm Cov Khoom Siv: Cov khoom sib txawv xws li yas, hlau, thiab iav xav tau cov yam ntxwv tshwj xeeb ntawm zaj duab xis lo rau.
Cov Kev Cai Ua Haujlwm: Xaiv cov ntaub ntawv txheej raws li qhov xav tau xws li kev tiv thaiv oxidation, conductivity, lossis optical filtering.
Kev Tsim Nyog ntawm Cov Txheej Txheem: Piv txwv li, magnetron sputtering zoo dua nrog cov hlau thiab oxides, thaum evaporation yog qhov tsim nyog rau cov ntaub ntawv qis-melting-point.
Piv txwv li:
Hauv cov txheej txheem kho kom zoo nkauj PVD rau cov khoom siv sab hauv tsheb, Cr, Ti, thiab TiN yog siv dav ua lwm txoj hauv kev zoo rau ib puag ncig piv rau electroplating.
Hauv cov txheej txheem tiv thaiv kev cuam tshuam (AR), SiO₂ thiab TiO₂ tsim cov khoom siv tseem ceeb.
Kev Xaiv Khoom Siv Txheeb Xyuas Qhov Zoo ntawm Zaj Duab Xis
Kev ua tau zoo ntawm cov zaj duab xis uas tso rau hauv lub tshuab nqus tsev tsis yog tsuas yog cuam tshuam los ntawm cov khoom siv thiab kev tswj hwm cov txheej txheem xwb tab sis kuj tseem ceeb los ntawm kev xaiv cov khoom siv. Kev xaiv cov khoom siv txheej txheem zoo thiab ua ke nrog cov txheej txheem tso dej kom raug yog qhov tseem ceeb rau kev ua tiav cov yeeb yaj kiab ua haujlwm zoo tshaj plaws.
— Tsab xov xwm no tau luam tawm los ntawm cov khoom siv nqus tsev txheej Chaw tsim khoom Zhenhua Lub Tshuab Nqus Tsev
Lub sijhawm tshaj tawm: Lub Rau Hli-27-2025