1. Kakaretso ea Melao-motheo ea ho Koahela ka Vacuum
Theknoloji ea ho roala ka vacuumke theknoloji ea ho boloka bokaholimo e thehiloeng ho Phokotso ea Mouoane oa 'Mele (PVD) kapa Phokotso ea Mouoane oa Lik'hemik'hale (CVD). Tlas'a maemo a phahameng a vacuum, thepa ea ho koahela e tiileng kapa ea khase e fetoloa likaroloana tse lokolohileng ka ho futhumatsa, ho phatloha ha plasma, kapa liketso tsa lik'hemik'hale, 'me hamorao li kenngoa holim'a bokaholimo ba substrate ho etsa filimi e tšesaane.
Mekhoa e tloaelehileng e kenyelletsa:
Sekoahelo sa mouoane (mohlala, mouoane o hanyetsang mocheso, mouoane oa mahlaseli a elektrone), Magnetron Sputtering, Ion Plating, Chemical Vapor Deposition (CVD)
Leha khetho ea ts'ebetso e fapana ho latela ts'ebeliso, sepheo sa ho qetela se lula se tsitsitse: ho fihlela ho khomarela ho hoholo, ho tšoana, le botsitso ba filimi.
2. Lihlopha tsa Lisebelisoa tse Tloaelehileng tsa ho Koahela ka Vacuum
Ho ea ka mosebetsi oa filimi le litlhoko tsa ts'ebetso, thepa ea ho roala ka vacuum e arotsoe haholo ka mekhahlelo e latelang:
(1) Lisebelisoa tsa Tšepe
Aluminium (Al): E sebelisoa haholo bakeng sa ho roala mekhabiso le ho kenya lintho tse bonahatsang, joalo ka likotlolong tsa ho bonahatsa likoloi le liphanele tsa mekhabiso.
Titanium (Ti): E sebelisoa ka har'a masela a thata kapa bakeng sa ho hlahisa lifilimi tse khabisitsoeng ka boputsoa le khauta.
Chromium (Cr): Mokhoa o mong oa bohlokoa oa PVD ho fapana le ho betla ka motlakase oa setso, o tsejoang ka khanya e phahameng le ho hanyetsa mafome.
Tšepe e sa Hlabeng (SUS304, SUS316, jj.): E sebelisetsoa ho roala ka mokhoa o shebahalang joaloka tšepe ka ho hanyetsa ho tsofala ho matlafetseng.
Koporo (Cu), Silevera (Ag), Khauta (Au): E sebelisoa hangata ho penteng ea elektroniki, ea mekhabiso le e tsamaisang motlakase.
(2) Lisebelisoa tsa Ceramic le Oxide
Silicon Dioxide (SiO₂): E sebelisoa ka har'a lipente tse thibelang ho bonesa (AR), likarolo tsa ntlafatso ea optical, le lifiliming tsa ho thibela ho chesa.
Titanium Dioxide (TiO₂): Thepa e nang le index e phahameng ea refractive e sebelisoang khafetsa ho liphahlo tsa tšitiso ea optical.
Zirconium Dioxide (ZrO₂): E fana ka botsitso bo botle ba mocheso le ho hanyetsa ho tsofala haholo.
Aluminium Oxide (Al₂O₃): E tsebahala ka ho thatafala ho hoholo, hangata e sebediswa e le lesela le thata le sireletsang.
(3) Li-nitride le Li-Carbide
Titanium Nitride (TiN): Thepa e tloaelehileng ea khauta e khabisitsoeng ka ho roala e nang le thata e phahameng le ho hanyetsa mafome.
Chromium Nitride (CrN), Zirconium Nitride (ZrN): E sebelisoa haholo ho koaheleng lisebelisoa le lits'ebetsong tse sa tsofaleng.
Silicon Carbide (SiC), Titanium Carbide (TiC): E loketse lits'ebetso tse thatafatsang mocheso o phahameng le tse thibelang mocheso o phahameng.
3. Mekhoa ea Khetho ea Lintho le ho Tsamaellana ha Ts'ebetso
Katleho ea ho koahela e itšetlehile ka mokhoa oa ho beha le thepa e khethiloeng. Lintlha tsa bohlokoa tseo u lokelang ho li nahana li kenyelletsa:
Ho lumellana ha Substrate: Substrate tse fapaneng tse kang polasetiki, tšepe le khalase li hloka litšobotsi tse itseng tsa ho khomarela filimi.
Litlhoko tsa Mosebetsi: Khetha thepa ea ho koahela ho latela litlhoko tse kang ho hanyetsa oxidation, conductivity, kapa ho sefa ha optical.
Ho Lokela ha Ts'ebetso: Mohlala, ho sputtering ha magnetron ho tsamaellana haholoanyane le litšepe le li-oxide, athe mouoane o loketse thepa e nang le ntlha e tlase ea ho qhibiliha.
Mohlala:
Liaparong tse khabisitsoeng tse thehiloeng ho PVD bakeng sa likarolo tsa kahare tsa likoloi, Cr, Ti, le TiN li sebelisoa haholo e le mekhoa e meng e sireletsang tikoloho ho feta ho betla ka motlakase.
Likoahelong tsa mahlo tse thibelang ho bonahatsa (AR), SiO₂ le TiO₂ li theha motsoako oa motheo oa thepa.
Khetho ea Lintho e Laola Boleng ba Filimi
Tshebetso ya filimi e beilweng ka vacuum ha e susumetswe feela ke disebediswa le taolo ya tshebetso empa hape e susumetswa haholo ke kgetho ya thepa. Ho kgetha thepa e nepahetseng ya ho kwahela le ho e kopanya le mokhoa o nepahetseng wa ho e kenya ke senotlolo sa ho fihlella tshebetso e ntle ka ho fetisisa ya filimi.
—Sengoloa sena se phatlalalitsoe ke lisebelisoa tsa ho roala ka vacuum moetsi oa Zhenhua Vacuum
Nako ea poso: Phuptjane-27-2025