Izinto Eziqhelekileyo Ezisetyenziswa Kwiinkqubo Zokugquma Nge-Vacuum

1. Isishwankathelo seMigaqo yokuGcoba ngeVacuum

Itekhnoloji yokugquma nge-vacuumyiteknoloji yokubeka umphezulu esekelwe kwiPhysical Vapor Deposition (PVD) okanye kwiChemical Vapor Deposition (CVD). Phantsi kweemeko eziphezulu ze-vacuum, izinto zokugquma eziqinileyo okanye ezinegesi ziguqulwa zibe ngamasuntswana akhululekileyo ngokufudumeza, ukuqhushumba kweplasma, okanye ukusabela kweekhemikhali, kwaye emva koko zifakwa kumphezulu we-substrate ukuze zenze ifilimu encinci.

Iinkqubo eziqhelekileyo ziquka:

Ukwaleka koMphunga (umz., ukufuma kokumelana nobushushu, ukufuma komphunga we-electron beam), iMagnetron Sputtering, i-Ion Plating, iChemical Vapor Deposition (CVD)

Nangona ukukhethwa kwenkqubo kwahluka ngokuxhomekeke kwisicelo, injongo yokugqibela ihlala ihambelana: ukufikelela ekunamatheleni okuphezulu, ukufana, kunye nozinzo lwefilimu.

2. Iindidi zezixhobo zokugquma i-vacuum eziqhelekileyo

Ngokwemisebenzi yefilimu kunye neemfuno zenkqubo, izixhobo zokugquma nge-vacuum zahlulwe ngokubanzi zibe zezi ndidi zilandelayo:

(1) Izinto zesinyithi

I-Aluminiyam (Al): Isetyenziswa kakhulu kwiingubo zokuhombisa kunye neeleya ezibonisa ukukhanya, njengakwizitya zokubonakalisa ukukhanya kweemoto kunye neepaneli zokuhombisa.

I-Titanium (Ti): Isetyenziswa kwiingubo eziqinileyo okanye ekwenzeni iifilimu zokuhombisa eziluhlaza okwesibhakabhaka negolide.

I-Chromium (Cr): Enye indlela ephambili ye-PVD endaweni ye-electroplating yendabuko, eyaziwa ngokukhanya okuphezulu kunye nokumelana nokugqwala.

Intsimbi Engagqwaliyo (SUS304, SUS316, njl.njl.): Isetyenziselwa ukugquma okubonakala ngathi yintsimbi okunamandla okumelana nokuguguleka.

I-Copper (Cu), Isilivere (Ag), Igolide (Au): Isetyenziswa kakhulu kwiingubo ze-elektroniki, zokuhombisa, kunye nezokuhambisa umbane.

(2) Izinto zeCeramic kunye neOxide

I-Silicon Dioxide (SiO₂): Isetyenziswa kwiingubo ezichasene nokukhanya (AR), iileya zokuphucula ukukhanya, kunye neefilimu zokukhusela ukukhanya.

I-Titanium Dioxide (TiO₂): Isixhobo esine-refractive-index ephezulu esetyenziswa rhoqo kwiingubo zokuphazamiseka kwe-optical.

I-Zirconium Dioxide (ZrO₂): Inika uzinzo oluhle kakhulu kubushushu kunye nokumelana nokuguguleka okuphezulu.

I-Aluminium Oxide (Al₂O₃): Yaziwa ngokuqina okuphezulu, idla ngokusetyenziswa njengengubo eqinileyo yokukhusela.

(3) IiNitridi kunye neeCarbides

I-Titanium Nitride (TiN): Isixhobo esiqhelekileyo sokuhombisa esigolide esinobunzima obuphezulu kunye nokumelana nokugqwala.

I-Chromium Nitride (CrN), iZirconium Nitride (ZrN): Isetyenziswa kakhulu kwiingubo zezixhobo kunye nezicelo ezingagugiyo.

I-Silicon Carbide (SiC), iTitanium Carbide (TiC): Ifanelekile ukusetyenziswa kokuqina okuphezulu kunye nokumelana nobushushu obuphezulu.

3. Iikhrayitheriya zoKhetho lwezinto kunye nokuhambelana kwenkqubo

Ukusebenza kakuhle kokwaleka kuxhomekeke kwindlela yokubeka kunye nezixhobo ezikhethiweyo. Izinto ezibalulekileyo ekufuneka ziqwalaselwe ziquka:

Ukuhambelana kweSubstrate: Iisubstrate ezahlukeneyo ezifana neplastiki, isinyithi, kunye neglasi zifuna iimpawu ezithile zokunamathela kwifilimu.

Iimfuneko Zokusebenza: Khetha izinto zokugquma ngokusekelwe kwiimfuno ezinje ngokumelana ne-oxidation, i-conductivity, okanye i-optical filtering.

Ukufaneleka kweNkqubo: Umzekelo, ukutshiza ngemagnetron kuhambelana ngakumbi neentsimbi kunye nee-oxide, ngelixa ukufuma kufanelekile kwizinto ezincibilika kancinci.

Njengokuba:

Kwizinto zokuhombisa ezisekwe kwi-PVD zezinto zangaphakathi zeemoto, i-Cr, i-Ti, kunye ne-TiN zisetyenziswa kakhulu njengeendlela ezingcono kwezoqoqosho endaweni yokufakelwa i-electroplating.

Kwizinto zokugquma ezichasene nokukhanya (AR), i-SiO₂ kunye ne-TiO₂ zenza indibaniselwano yezinto ezisisiseko.

Ukukhethwa kwezinto ezisetyenzisiweyo kumisela umgangatho wefilimu

Ukusebenza kwefilimu efakwe kwi-vacuum akuchatshazelwa kuphela zizixhobo kunye nolawulo lwenkqubo kodwa kukwachatshazelwa kakhulu kukukhetha kwezinto. Ukukhetha izinto ezifanelekileyo zokugquma kunye nokuzidibanisa nendlela efanelekileyo yokubeka izinto kubalulekile ekufezekiseni ukusebenza kwefilimu.

—Eli nqaku lipapashwe ngu izixhobo zokugquma nge-vacuum umenzi we-Zhenhua Vacuum