Nā Mea Maʻamau i Hoʻohana ʻia i nā Kaʻina Hana Uhi Vacuum

1. ʻIkepili o nā Kumumanaʻo Uhi Vacuum

ʻenehana uhi hakahakahe ʻenehana waiho ʻana ma luna o ka ʻili e pili ana i ka Physical Vapor Deposition (PVD) a i ʻole Chemical Vapor Deposition (CVD). Ma lalo o nā kūlana vacuum kiʻekiʻe, hoʻololi ʻia nā mea uhi paʻa a kinoea paha i nā ʻāpana manuahi ma o ka hoʻomehana ʻana, ka hoʻouka ʻana o ka plasma, a i ʻole nā ​​​​​​hana kemika, a ma hope e waiho ʻia ma luna o ka ʻili substrate e hana i kahi ʻili lahilahi.

ʻO nā kaʻina hana maʻamau:

ʻUhi Hoʻoheheʻe (e laʻa, hoʻoheheʻe ʻana i ke kūpaʻa wela, hoʻoheheʻe ʻana i ke kukuna uila), Magnetron Sputtering, Ion Plating, Chemical Vapor Deposition (CVD)

ʻOiai ke ʻano o ke koho ʻana o ke kaʻina hana ma muli o ka noi, ʻo ka pahuhopu hope loa e mau ana: ka hoʻokō ʻana i ke kiʻekiʻe o ka hoʻopili ʻana, ke kūlike, a me ke kūpaʻa o ka ʻoniʻoni.

2. Nā Māhele o nā Mea Uhi Vacuum Maʻamau

Wahi a nā koi hana kiʻiʻoniʻoni a me ke kaʻina hana, ua hoʻokaʻawale nui ʻia nā mea uhi hakahaka i nā ʻano penei:

(1) Nā Mea Metala

Alumini (Al): Hoʻohana nui ʻia no nā uhi hoʻonaninani a me nā papa ʻālohilohi, e like me nā kīʻaha ʻālohilohi kaʻa a me nā panela hoʻonaninani.

Titanium (Ti): Hoʻohana ʻia i loko o nā uhi paʻakikī a i ʻole no ka hana ʻana i nā kiʻiʻoniʻoni hoʻonaninani polū a me ke gula.

Chromium (Cr): He koho PVD koʻikoʻi i ka electroplating kuʻuna, i ʻike ʻia no ka ʻōlinolino kiʻekiʻe a me ke kūpaʻa i ka pala.

Kila Kuʻihao (SUS304, SUS316, a pēlā aku): Hoʻohana ʻia no nā uhi ʻano metala me ke kūpaʻa ʻana i ka ʻaʻahu i hoʻoikaika ʻia.

Keleawe (Cu), Kāleka (Ag), Gula (Au): Hoʻohana pinepine ʻia i nā uhi uila, hoʻonaninani, a me nā uhi hana alakaʻi.

(2) Nā Mea Keramika a me ka ʻOkika

Silicon Dioxide (SiO₂): Hoʻopili ʻia i loko o nā uhi anti-reflective (AR), nā papa hoʻonui optical, a me nā kiʻiʻoniʻoni insulating.

Titanium Dioxide (TiO₂): He mea kiʻekiʻe-refractive-index i hoʻohana pinepine ʻia i nā uhi hoʻopilikia optical.

Zirconium Dioxide (ZrO₂): Hāʻawi i ke kūpaʻa wela maikaʻi loa a me ke kūpaʻa kiʻekiʻe i ka ʻaʻahu.

ʻO ka Aluminum Oxide (Al₂O₃): ʻIke ʻia no kona paʻakikī kiʻekiʻe, hoʻohana pinepine ʻia e like me ka uhi paʻakikī pale.

(3) Nā Nitrides a me nā Carbides

Titanium Nitride (TiN): He mea uhi hoʻonaninani gula maʻamau me ka paʻakikī kiʻekiʻe a me ke kūpaʻa i ka pala.

Chromium Nitride (CrN), Zirconium Nitride (ZrN): Hoʻohana nui ʻia i nā uhi mea hana a me nā noi pale ʻaʻahu.

Silicon Carbide (SiC), Titanium Carbide (TiC): Kūpono no nā noi paʻakikī kiʻekiʻe a me nā noi kūpaʻa i ka mahana kiʻekiʻe.

3. Nā Kūlana Koho Mea a me ke Kūlike ʻana o ke Kaʻina Hana

ʻO ka pono o ka uhi ʻana e pili ana i ke ʻano hana waiho ʻana a me nā mea i koho ʻia. ʻO nā mea nui e noʻonoʻo ai:

Hoʻohālikelike ʻia ka Substrate: Pono nā substrates like ʻole e like me ka plastic, metal, a me ke aniani i nā waiwai hoʻopili kiʻiʻoniʻoni kikoʻī.

Nā Pono Hana: E koho i nā mea uhi e pili ana i nā pono e like me ke kūpaʻa ʻana i ka oxidation, conductivity, a i ʻole ke kānana optical.

Ke Kūpono o ke Kaʻina Hana: No ka laʻana, ʻoi aku ka kūpono o ka magnetron sputtering me nā metala a me nā oxides, ʻoiai ʻo ka evaporation e kūpono no nā mea haʻahaʻa-kiko heheʻe.

ʻo kahi laʻana:

I loko o nā uhi hoʻonaninani PVD no nā ʻāpana o loko o ke kaʻa, hoʻohana nui ʻia ʻo Cr, Ti, a me TiN ma ke ʻano he koho ʻē aʻe e pili ana i ke kaiapuni i ka electroplating.

I loko o nā uhi optical anti-reflective (AR), ʻo SiO₂ a me TiO₂ ka mea i hui pū ʻia me nā mea nui.

Hoʻoholo ke Koho Mea i ka Maikaʻi o ke Kiʻiʻoniʻoni

ʻAʻole wale nā ​​​​lako a me ke kaohi kaʻina hana i hoʻopili ʻia i ka hana o kahi kiʻiʻoniʻoni i waiho ʻia ma ka vacuum akā ʻo ke koho ʻana o nā mea. ʻO ke koho ʻana i ka mea uhi kūpono a me ka hoʻopili ʻana iā ia me ke ʻano hana waiho kūpono ke kī i ka hoʻokō ʻana i ka hana kiʻiʻoniʻoni kūpono.

—Ua paʻi ʻia kēia ʻatikala e nā lako hana uhi vacuum mea hana Zhenhua Vacuum