1. Nchịkọta nke Ụkpụrụ Mkpuchi Uzuzu
Teknụzụ mkpuchi uzuzubụ teknụzụ nchekwa elu nke dabere na Ndepụta Uzuoku Ahụ (PVD) ma ọ bụ Ndepụta Uzuoku Kemịkalụ (CVD). N'ọnọdụ oghere dị elu, a na-agbanwe ihe mkpuchi siri ike ma ọ bụ gas ka ọ bụrụ ihe efu site na ikpo ọkụ, bọmbụ plasma, ma ọ bụ mmeghachi omume kemịkalụ, ma emesịa a na-etinye ha n'elu ihe mkpuchi ahụ iji mepụta ihe nkiri dị gịrịgịrị.
Usoro ndị a na-ahụkarị gụnyere:
Mkpuchi evaporation (dịka ọmụmaatụ, evaporation nke na-eguzogide okpomọkụ, evaporation nke elektrọn), Magnetron Sputtering, Ion Plating, Chemical Vapor Deposition (CVD)
Ọ bụ ezie na nhọrọ usoro dị iche iche dabere na ngwa ahụ, ihe mgbaru ọsọ kachasị na-anọgide na-agbanwe agbanwe: iru oke njikọta, ịdị n'otu, na iguzosi ike na fim.
2. Ụdị ihe mkpuchi ikuku nkịtị
Dịka ọrụ ihe nkiri na ihe achọrọ maka usoro si dị, a na-ekewa ihe mkpuchi ikuku n'ime ụdị ndị a:
(1) Ihe E Ji Akpụ Ígwè Mee
Aluminom (Al): A na-eji ya eme ihe mkpuchi mma na oyi akwa na-egbukepụ egbukepụ, dịka n'ime efere na-egbukepụ egbukepụ ụgbọala na panel ịchọ mma.
Titanium (Ti): A na-etinye ya n'ime ihe mkpuchi siri ike ma ọ bụ maka imepụta ihe nkiri ịchọ mma acha anụnụ anụnụ na ọlaedo.
Chromium (Cr): Nhọrọ PVD dị mkpa maka electroplating ọdịnala, nke a maara maka nnukwu ìhè na iguzogide nchara.
Ígwè anaghị agba nchara (SUS304, SUS316, wdg): A na-eji ya eme ihe mkpuchi dị ka ígwè ma na-eguzogide iyi.
Ọla kọpa (Cu), Ọlaọcha (Ag), Ọlaọcha (Au): A na-ejikarị ya eme ihe n'ihe mkpuchi eletrọniki, ihe ịchọ mma, na ihe ndị na-eduzi ihe.
(2) Ihe Seramiiki na Oxide
Silicon Dioxide (SiO₂): A na-etinye ya na mkpuchi anti-reflective (AR), oyi akwa nkwalite anya, na ihe nkiri mkpuchi.
Titanium Dioxide (TiO₂): Ihe e ji eme ka ihe na-egbuke egbuke nke ukwuu nke a na-ejikarị eme ihe n'ime mkpuchi ihe ndị na-akpata anya.
Zirconium Dioxide (ZrO₂): Na-enye ezigbo nkwụsi ike okpomọkụ na oke nguzogide iyi.
Aluminom Oxide (Al₂O₃): A maara ya maka ike siri ike dị elu, a na-ejikarị ya eme ihe dị ka ihe mkpuchi siri ike.
(3) Nitrides na Carbides
Titanium Nitride (TiN): Ihe e ji achọ mma ọlaedo nke nwere ike siri ike na iguzogide nchara.
Chromium Nitride (CrN), Zirconium Nitride (ZrN): A na-eji ya eme ihe n'ọtụtụ ebe n'ihe mkpuchi ngwaọrụ na ihe ndị na-anaghị emebi emebi.
Silicon Carbide (SiC), Titanium Carbide (TiC): Dabara adaba maka ngwa siri ike na oke okpomọkụ.
3. Usoro nhọrọ ihe na ndakọrịta usoro
Uru mkpuchi ahụ dabere na usoro itinye ihe na ihe ndị ahọpụtara. Isi ihe ndị a ga-atụle gụnyere:
Ndakọrịta nke ihe ndị dị n'ime ala: Ihe ndị dị n'ime ala dị iche iche dịka plastik, ígwè, na iko chọrọ ihe pụrụ iche nke ihe mkpuchi fim.
Ihe achọrọ maka ọrụ: Họrọ ihe mkpuchi dabere na mkpa dịka iguzogide oxidation, conductivity, ma ọ bụ nzacha anya.
Usoro kwesịrị ekwesị: Dịka ọmụmaatụ, magnetron sputtering na-adabara karịa na ọla na oxides, ebe evaporation dabara adaba maka ihe ndị na-agbaze obere.
Dị ka ọmụmaatụ:
N'ime mkpuchi mma nke dabere na PVD maka ihe ndị dị n'ime ụgbọ ala, a na-eji Cr, Ti, na TiN eme ihe dị ka ihe ndị ọzọ na-adịghị emebi gburugburu ebe obibi ma e jiri ya tụnyere electroplating.
N'ime mkpuchi anya anti-reflective (AR), SiO₂ na TiO₂ na-emepụta njikọta ihe dị mkpa.
Nhọrọ ihe na-ekpebi ịdị mma nke ihe nkiri
Ọ bụghị naanị na ngwaọrụ na njikwa usoro na-emetụta arụmọrụ nke ihe nkiri e tinyere n'ime oghere kamakwa ọ na-adabere na nhọrọ ihe. Ịhọrọ ihe mkpuchi kwesịrị ekwesị na ijikọ ya na usoro nchekwa kwesịrị ekwesị bụ isi ihe dị mkpa iji nweta ọrụ kacha mma nke ihe nkiri ahụ.
—E bipụtara akụkọ a site n'aka onye bipụtara ya akụrụngwa mkpuchi agụụ onye nrụpụta Zhenhua Vacuum
Oge ozi: Juun-27-2025