Umshini wokumboza okhipha imibala yothingo

Ukuphalaza kweMagnetron uhlobo lokufakwa komusi ongokoqobo. Indlela evamile yokuphalaza ingasetshenziswa ukumboza insimbi, i-semiconductor, i-insulator nezinye izinto, futhi inezici zomthamo omkhulu wokulayisha, kulula ukuyisebenzisa, ifilimu yokumboza ilula kakhulu futhi ibushelelezi, inokunamathela okuhle njalonjalo. Ukuphalaza kweMagnetron kungandisa izinga lokuphalaza ngokungenisa insimu yamagnetic ebusweni be-cathode yethagethi nokusebenzisa umkhawulo wensimu yamagnetic ezinhlayiyeni ezishajiwe ukwandisa ubuningi be-plasma. Umshini wokumboza we-vacuum we-magnetron ophelele wakhiwe izingxenye eziningi, uhlelo ngalunye luqedela imisebenzi ehlukene, futhi ekugcineni lufinyelele ukugqama kokugcina kwekhwalithi ephezulu. Imishini yokumboza ye-magnetron sputtering optical yakhiwe ngegumbi le-vacuum, i-valve, uhlelo lokupompa i-vacuum, uhlelo lokulinganisa i-vacuum, ithagethi ye-cathode, igeyiji yobukhulu befilimu, uhlelo lokulawula i-electro-pneumatic, njll. Umzimba oyinhloko we-magnetron sputtering optical coater yigumbi le-vacuum, usayizi unqunywa usayizi we-substrate yomkhiqizo kanye nomthamo womsebenzisi. Ikamelo lenziwe ngensimbi engagqwali ye-SUS304, okungelula ukuyigqwala, ihlala isikhathi eside kunensimbi yekhabhoni futhi kulula ukuyilungisa. Umshini usebenzise ubuchwepheshe bokumboza imvamisa ephakathi nendawo, umboza ngezinto ze-oxide ezifana ne-silicon oxide ne-niobium oxide njll., ngesilinganiso sobukhulu befilimu ukwenza ifilimu yokuhlobisa ye-optical. Ifilimu eyenziwe ngumshini wokumboza i-magnetron sputtering optical inokunamathela okuqinile kanye nobumsulwa obuphezulu, futhi ingambozwa ngezinto ezahlukahlukene ezinezingxenye ezahlukene ngesikhathi esisodwa.

Inqubo yokushintsha umbala kancane kancane ngokuvamile yenziwa umshini wokumboza we-magnetron sputtering optical. Njengamanje, isembozo sangemuva sezingcingo eziningi eziphathwayo sisebenzisa inqubo yokushintsha umbala we-PVD vacuum coating kancane kancane. Yiqiniso, umshini wokumboza we-optical kanye nomshini wokumboza we-evaporation ungenza umphumela ofanayo wemibala eyisikhombisa ye-rainbow, kodwa imibala ayiyona i-gradients ejwayelekile futhi kusenomehluko ngekhwalithi. Ukumpompa kwe-Magnetron uhlobo lokufakwa komhwamuko ngokomzimba. Indlela evamile yokumpompa ingasetshenziswa ukumboza insimbi, i-semiconductor, i-insulator nezinye izinto, futhi inezici zomthamo omkhulu wokulayisha, kulula ukuyisebenzisa, ifilimu yokumboza ilungile kakhulu futhi ibushelelezi, inokunamathela okuhle njalo njalo.

Ukuphalaza nge-Magnetron kungandisa izinga lokuphalaza ngokungenisa insimu yamagnetic ebusweni be-cathode yethagethi nokusebenzisa umkhawulo wensimu yamagnetic ezinhlayiyeni ezishajiwe ukwandisa ubuningi be-plasma. Umshini wokumboza nge-vacuum we-magnetron ophelele wakhiwe izingxenye eziningi, uhlelo ngalunye luqedela imisebenzi ehlukene, futhi ekugcineni lufinyelele ukugqoka kokugcina kwekhwalithi ephezulu. Imishini yokumboza nge-magnetron sputtering optical yakhiwe ngegumbi le-vacuum, i-valve, uhlelo lokupompa nge-vacuum, uhlelo lokulinganisa i-vacuum, ithagethi ye-cathode, i-gauge yobukhulu befilimu, uhlelo lokulawula lwe-electro-pneumatic, njll.

Umzimba oyinhloko we-magnetron sputtering optical coater yi-vacuum chamber, ubukhulu bunqunywa ubukhulu be-substrate yomkhiqizo kanye nomthamo womsebenzisi. I-chamber yenziwe ngensimbi engagqwali ye-SUS304, okungelula ukuyigqwala, ihlala isikhathi eside kune-carbon steel futhi kulula ukuyilungisa. Ubuchwepheshe bokumboza i-sputtering obusetshenziswa ngumshini busetshenziswa ubuchwepheshe obuphakathi, bumboza ngezinto ze-oxide ezifana ne-silicon oxide ne-niobium oxide njll., nge-gauge yobukhulu befilimu ukwenza ifilimu yokuhlobisa ye-optical. Ifilimu eyenziwe ngumshini we-magnetron sputtering optical coating inokunamathela okuqinile kanye nobumsulwa obuphezulu, futhi ingambozwa ngezinto ezahlukahlukene ezinezingxenye ezahlukene ngesikhathi esisodwa.