Mīhini paninga pupuhi hei pani i ngā tae āniwaniwa

Ko te whakapūtanga Magnetron he momo whakatakotoranga kohu ā-tinana. Ka taea te whakamahi i te tikanga whakapūtanga whānui hei pani i te konganuku, te haurua-ira, te ārai me ētahi atu rauemi, ā, he āhuatanga o te kaha uta nui, te ngāwari ki te whakahaere, he tino angiangi, he maeneene hoki te kiriata paninga, he pai te piri, me ētahi atu. Ka taea e te whakapūtanga Magnetron te whakanui ake i te tere o te whakapūtanga mā te whakauru i tētahi papa aukume ki te mata katote o te ūnga, me te whakamahi i te here o te papa aukume ki ngā matūriki kua utua hei whakanui ake i te kiato plasma. He maha ngā wāhanga o tētahi mīhini paninga korehau magnetron katoa, he rerekē ngā mahi a ia pūnaha, ā, i te mutunga ka tutuki te paninga kounga teitei whakamutunga. Ko ngā taputapu paninga whatu magnetron sputtering he rūma korehau, he takirere, he pūnaha papu korehau, he pūnaha ine korehau, he ūnga katote, he ine matotoru kiriata, he pūnaha whakahaere hiko-hau, me ētahi atu. Ko te tinana matua o te paninga whatu magnetron sputtering he rūma korehau, ko te rahi ka whakatauhia e te rahi o te papa hua me te kaha o te kaiwhakamahi. He mea hanga te rūma ki te maitai kore waikura SUS304, kāore e ngāwari te waikura, he pakari ake i te maitai waro, ā, he ngāwari hoki te tiaki. I whakamahia e te mīhini te hangarau paninga pupuhi auau-waenga, e pania ana ki ngā rauemi waikura pērā i te waikura silicon me te waikura niobium me ētahi atu, me te ine matotoru kiriata hei hanga kiriata whakapaipai whatu. He kaha te piri o te kiriata i hangaia e te mīhini paninga whatu pupuhi magnetron, he tino parakore hoki, ā, ka taea te pupuhi ki ngā momo rauemi me ngā wāhanga rerekē i te wā kotahi.

Ko te tukanga o te whakarerekētanga tae āta haere ka mahia mā te mīhini paninga whatu magnetron sputtering. I tēnei wā, ko te uhi o muri o te nuinga o ngā waea pūkoro e whakamahi ana i te tukanga whakarerekētanga tae āta haere o te paninga korehau PVD. Ko te tikanga, ka taea hoki e te mīhini paninga whatu me te mīhini paninga mimiti te hanga i te pānga tae āniwaniwa e whitu, engari ehara i te mea he rerekē ngā tae, ā, he rerekē tonu te kounga. Ko te Magnetron sputtering he momo whakatakotoranga kohu ā-tinana. Ka taea te whakamahi i te tikanga sputtering whānui ki te paninga i te konganuku, te semiconductor, te insulator me ētahi atu rauemi, ā, he āhuatanga o te kaha uta nui, te ngāwari ki te whakahaere, he tino pai, he maeneene te kiriata paninga, he pai te piri me ētahi atu.

Ka taea e te mimiha Magnetron te whakanui ake i te tere o te mimiha mā te whakauru i tētahi papa aukume ki te mata katote o te ūnga, me te whakamahi i te here o te papa aukume ki ngā matūriki kua utua hei whakanui ake i te kiato plasma. He maha ngā wāhanga o tētahi mīhini paninga korehau mimiha magnetron katoa, he rerekē ngā mahi a ia pūnaha, ā, i te mutunga ka tutuki te paninga kounga teitei. Ko ngā taputapu paninga whatu mimiha magnetron he rūma korehau, he takirere, he pūnaha papu korehau, he pūnaha ine korehau, he ūnga katote, he ine matotoru kiriata, he pūnaha whakahaere hiko-hau, me ētahi atu.

Ko te tinana matua o te paninga whatu magnetron sputtering he rūma korehau, ko te rahi ka whakatauhia e te rahi o te papa o te hua me te kaha o te kaiwhakamahi. He mea hanga te rūma ki te maitai kore waikura SUS304, he kore e waikura, he pakari ake i te maitai waro, ā, he ngāwari ki te tiaki. I whakamahia e te mīhini te hangarau paninga sputtering auau-waenga, e pania ana ki ngā rauemi waikura pēnei i te silicon oxide me te niobium oxide me ētahi atu, me te ine matotoru kiriata hei hanga kiriata whakapaipai whatu. Ko te kiriata i hangaia e te mīhini paninga whatu magnetron sputtering he kaha te piri me te parakore teitei, ā, ka taea te sputtering ki ngā momo rauemi me ngā wāhanga rerekē i te wā kotahi.