Igwe mkpuchi Sputtering iji kpuchie agba egwurugwu

Ịdọpụ Magnetron bụ ụdị ihe e ji etinye anwụrụ ọkụ. Enwere ike iji usoro ịgbapụ ígwè, semiconductor, ihe mkpuchi na ihe ndị ọzọ, ma nwee njirimara nke nnukwu ikike ibu ibu, dị mfe ịrụ ọrụ, ihe mkpuchi ahụ dị mma ma dị ire ụtọ, yana ezigbo njikọta na ihe ndị ọzọ. Ịdọpụ Magnetron nwere ike ime ka ọsọ ịgbapụ site n'iwebata oghere ndọta na elu cathode nke ihe mgbaru ọsọ ahụ ma jiri mmachi nke ubi ndọta na ihe ndị a na-ebu ibu mee ka njupụta plasma dịkwuo elu. Igwe mkpuchi oghere ndọta magnetron zuru oke nwere ọtụtụ akụkụ, sistemụ ọ bụla na-arụ ọrụ dị iche iche, wee mechaa nweta mkpuchi dị elu ikpeazụ. Ngwa mkpuchi oghere ndọta magnetron nwere ihe mejupụtara oghere ikuku, valvụ, sistemụ mgbapụta oghere ikuku, sistemụ nha oghere ikuku, ihe mgbaru ọsọ cathode, ihe nlele ọkpụrụkpụ ihe nkiri, sistemụ njikwa electro-pneumatic, wdg. Isi ahụ nke mkpuchi oghere ndọta magnetron bụ ụlọ ikuku, nha ahụ na-ekpebi site na nha nke substrate ngwaahịa na ikike nke onye ọrụ. E ji ígwè SUS304 anaghị agba nchara rụọ ụlọ ahụ, nke na-adịghị mfe ịcha nchara, ọ na-adịgide adịgide karịa ígwè carbon ma dịkwa mfe ịrụzi. Igwe na-eji teknụzụ mkpuchi sputtering ugboro ole na ole eme ihe, na-ekpuchi ihe mkpuchi oxide dị ka silicon oxide na niobium oxide wdg, yana ihe nlele ọkpụrụkpụ fim iji mee ihe nkiri ịchọ mma anya. Ihe nkiri nke igwe mkpuchi anya magnetron sputtering mere nwere nrapado siri ike na ịdị ọcha dị elu, enwere ike ịgbasa ya na ọtụtụ ihe nwere akụkụ dị iche iche n'otu oge.

Usoro mgbanwe agba nwayọọ nwayọọ na-abụkarị site na iji igwe mkpuchi magnetron sputtering optical. Ugbu a, mkpuchi azụ nke ọtụtụ ekwentị mkpanaaka na-anabata mkpuchi oghere PVD na-agbanwe agba nwayọọ nwayọọ. N'ezie, igwe mkpuchi anya na igwe mkpuchi evaporation nwekwara ike ime mmetụta agba asaa yiri nke ahụ, mana agba abụghị gradients nkịtị ma enwere ọdịiche dị na mma. Magnetron sputtering bụ ụdị nkwụnye anwụrụ anụ ahụ. Enwere ike iji usoro sputtering izugbe kpuchie metal, semiconductor, insulator na ihe ndị ọzọ, ma nwee njirimara nke nnukwu ikike ibu, dị mfe iji, ihe mkpuchi ahụ dị mma ma dị ire ụtọ, yana ezigbo njikọta na ihe ndị ọzọ.

Ịkpọpụ magnetron nwere ike ime ka ọsọ ịgbasa site n'iwebata oghere magnet n'elu cathode nke ihe mgbaru ọsọ ahụ ma jiri mmachi nke oghere magnet na ihe ndị a na-ebu ibu mee ka njupụta plasma dịkwuo elu. Igwe mkpuchi oghere magnetron zuru oke nwere ọtụtụ akụkụ, sistemụ ọ bụla na-arụ ọrụ dị iche iche, wee mechaa nweta mkpuchi dị elu. Ngwa mkpuchi oghere magnetron sputtering nwere ihe mejupụtara oghere oghere, valvụ, sistemụ mgbapụta oghere oghere, sistemụ nha oghere oghere, ihe mgbaru ọsọ cathode, ihe nlele ọkpụrụkpụ ihe nkiri, sistemụ njikwa electro-pneumatic, wdg.

Isi ihe dị na magnetron sputtering optical coater bụ ụlọ ikuku, nha ya na-adabere na nha nke ihe ndị dị na ngwaahịa ahụ na ikike onye ọrụ. E ji ígwè anaghị agba nchara SUS304 mee ụlọ ahụ, nke na-adịghị mfe ịcha nchara, ọ na-adịgide adịgide karịa ígwè carbon ma dịkwa mfe ịrụzi. Igwe ejirila teknụzụ mkpuchi sputtering ugboro ole na ole mee ihe, na-ekpuchi ya na ihe ndị dị ka silicon oxide na niobium oxide wdg, yana ihe nha ọkpụrụkpụ fim iji mee ihe nkiri ịchọ mma anya. Ihe nkiri nke igwe mkpuchi magnetron sputtering optical mere nwere njikọ siri ike na ịdị ọcha dị elu, enwere ike ịgbasa ya na ọtụtụ ihe nwere akụkụ dị iche iche n'otu oge.