Makina opukutira utoto kuti aphimbe mitundu ya utawaleza

Kupopera kwa Magnetron ndi mtundu wa nthunzi yeniyeni. Njira yopopera yonse ingagwiritsidwe ntchito popaka zitsulo, semiconductor, insulator ndi zipangizo zina, ndipo ili ndi makhalidwe a mphamvu yayikulu yonyamula katundu, yosavuta kugwiritsa ntchito, filimu yopopera ndi yabwino kwambiri komanso yosalala, yokhala ndi kumatira bwino ndi zina zotero. Kupopera kwa Magnetron kumatha kuwonjezera kuchuluka kwa kupopera mwa kuyambitsa mphamvu ya maginito pamwamba pa cathode ya chandamale ndikugwiritsa ntchito mphamvu ya mphamvu ya maginito pa tinthu tating'ating kuti iwonjezere kuchuluka kwa plasma. Makina opopera a vacuum a magnetron opangidwa ndi zigawo zambiri, dongosolo lililonse limagwira ntchito zosiyanasiyana, ndipo pamapeto pake limakwaniritsa kupopera kwapamwamba kwambiri. Zipangizo zopopera za magnetron sputtering optical zimapangidwa ndi chipinda cha vacuum, valavu, dongosolo lopopera vacuum, dongosolo loyezera vacuum, chandamale cha cathode, gauge ya makulidwe a filimu, dongosolo lowongolera la electro-pneumatic, ndi zina zotero. Thupi lalikulu la chopopera cha magnetron sputtering optical ndi chipinda cha vacuum, kukula kwake kumatsimikiziridwa ndi kukula kwa gawo la chinthucho ndi mphamvu ya wogwiritsa ntchito. Chipindacho chimapangidwa ndi chitsulo chosapanga dzimbiri cha SUS304, chomwe sichivuta kuchipanga dzimbiri, chimakhala cholimba kuposa chitsulo cha kaboni komanso chosavuta kuchikonza. Makina amagwiritsa ntchito ukadaulo wopaka utoto wapakatikati, wokutira ndi zinthu za oxide monga silicon oxide ndi niobium oxide ndi zina zotero, wokhala ndi filimu yoyezera makulidwe kuti apange filimu yokongoletsera yowala. Filimu yopangidwa ndi makina opaka utoto wa magnetron sputtering imakhala yolimba komanso yoyera kwambiri, ndipo imatha kupakidwa utoto ndi zinthu zosiyanasiyana zokhala ndi zigawo zosiyanasiyana nthawi imodzi.

Njira yosinthira pang'onopang'ono mtundu nthawi zambiri imapangidwa ndi makina opaka utoto a magnetron. Pakadali pano, chikuto chakumbuyo cha mafoni ambiri chimagwiritsa ntchito njira yosinthira pang'onopang'ono mtundu wa utoto wa PVD. Zachidziwikire, makina opaka utoto ndi makina opaka utoto amathanso kupanga mitundu yofanana ya utawaleza isanu ndi iwiri, koma mitundu si yokhazikika ndipo pali kusiyana kwa mtundu. Kupaka utoto wa Magnetron ndi mtundu wa nthunzi yeniyeni. Njira yopaka utoto ingagwiritsidwe ntchito kupaka chitsulo, semiconductor, insulator ndi zipangizo zina, ndipo ili ndi mawonekedwe a kukweza kwakukulu, kosavuta kugwiritsa ntchito, filimu yopaka utoto ndi yosalala kwambiri, yokhala ndi kumatira bwino ndi zina zotero.

Kupopera kwa Magnetron kumatha kuwonjezera kuchuluka kwa kupopera mwa kuyambitsa mphamvu ya maginito pamwamba pa cathode ya chandamale ndikugwiritsa ntchito mphamvu ya mphamvu ya maginito pa tinthu tating'onoting'ono tomwe timayikidwa kuti tiwonjezere kuchuluka kwa plasma. Makina opopera a vacuum opangidwa ndi magnetron amapangidwa ndi zigawo zambiri, dongosolo lililonse limagwira ntchito zosiyanasiyana, ndipo pamapeto pake limakwaniritsa chopopera chapamwamba kwambiri. Zipangizo zokutira za magnetron zopopera zimapangidwa ndi chipinda cha vacuum, valavu, makina opopera vacuum, makina oyezera vacuum, chandamale cha cathode, gauge ya makulidwe a filimu, makina owongolera a electro-pneumatic, ndi zina zotero.

Thupi lalikulu la magnetron sputtering optical coater ndi vacuum chamber, kukula kwake kumatsimikiziridwa ndi kukula kwa substrate ya chinthucho ndi mphamvu ya wogwiritsa ntchito. Chipindacho chimapangidwa ndi chitsulo chosapanga dzimbiri cha SUS304, chomwe sichivuta kuchita dzimbiri, cholimba kuposa chitsulo cha carbon komanso chosavuta kukonza. Makina amagwiritsa ntchito ukadaulo wapakati wopaka sputtering, wokutidwa ndi zinthu za oxide monga silicon oxide ndi niobium oxide etc, wokhala ndi filimu yoyezera makulidwe kuti apange filimu yokongoletsera. Filimu yopangidwa ndi makina opaka sputtering optical sputtering ali ndi kulimba kwamphamvu komanso kuyera kwambiri, ndipo amatha kupopedwa ndi zinthu zosiyanasiyana zokhala ndi zigawo zosiyanasiyana nthawi imodzi.