Mīkini uhi ʻōpala e uhi i nā kala ānuenue

ʻO ka Magnetron sputtering kahi ʻano waiho mahu kino. Hiki ke hoʻohana ʻia ke ʻano sputtering maʻamau e uhi i ka metala, semiconductor, insulator a me nā mea ʻē aʻe, a he mau ʻano o ka hiki ke hoʻouka nui, maʻalahi ka hana, he maikaʻi loa a laumania ke kiʻiʻoniʻoni uhi, me ka hoʻopili maikaʻi a pēlā aku. Hiki i ka Magnetron sputtering ke hoʻonui i ka wikiwiki sputtering ma ka hoʻokomo ʻana i kahi kahua magnetic ma ka ʻili cathode o ka pahuhopu a me ka hoʻohana ʻana i ke kaohi o ke kahua magnetic ma nā ʻāpana i hoʻopiʻi ʻia e hoʻonui i ka nui plasma. ʻO kahi mīkini uhi vacuum magnetron sputtering piha i haku ʻia me nā ʻāpana he nui, hoʻopau kēlā me kēia ʻōnaehana i nā hana like ʻole, a hoʻokō hope loa i ka uhi kiʻekiʻe kiʻekiʻe. ʻO nā lako uhi optical magnetron sputtering i haku ʻia me ke keʻena vacuum, valve, ʻōnaehana pumping vacuum, ʻōnaehana ana vacuum, cathode target, film thickness gauge, electro-pneumatic control system, etc. ʻO ke kino nui o ka magnetron sputtering optical coater he keʻena vacuum, ua hoʻoholo ʻia ka nui e ka nui o ka substrate huahana a me ka hiki o ka mea hoʻohana. Hana ʻia ke keʻena me ke kila kila SUS304, ʻaʻole maʻalahi ka popo, ʻoi aku ka paʻa ma mua o ke kila kalapona a maʻalahi hoʻi e mālama. Ua hoʻohana ka mīkini i ka ʻenehana uhi sputtering alapine waena, e uhi ana me nā mea oxide e like me ka silicon oxide a me ka niobium oxide etc, me ke ana mānoanoa o ka ʻili e hana i ka ʻili hoʻonaninani optical. ʻO ke kiʻiʻoniʻoni i hana ʻia e ka mīkini uhi optical sputtering magnetron he pipili ikaika a me ka maʻemaʻe kiʻekiʻe, a hiki ke sputtering me nā ʻano mea like ʻole me nā ʻāpana like ʻole i ka manawa like.

ʻO ke kaʻina hana o ka hoʻololi mālie ʻana o ke kala e hana pinepine ʻia e ka mīkini uhi optical magnetron sputtering. I kēia manawa, hoʻohana ka uhi hope o nā kelepona paʻalima he nui i ke kaʻina hana hoʻololi mālie o ke kala PVD vacuum coating. ʻOiaʻiʻo, hiki i ka mīkini uhi optical a me ka mīkini uhi evaporation ke hana i nā hopena kala ʻehiku anuenue like, akā ʻaʻole nā ​​​​​​kala he mau gradients maʻamau a aia nō nā ʻokoʻa i ka maikaʻi. ʻO ka Magnetron sputtering kahi ʻano waiho mahu kino. Hiki ke hoʻohana ʻia ke ʻano sputtering maʻamau e uhi i ka metala, semiconductor, insulator a me nā mea ʻē aʻe, a he mau ʻano o ka hiki ke hoʻouka nui, maʻalahi e hana, he maikaʻi loa a laumania ke kiʻi uhi, me ka hoʻopili maikaʻi a pēlā aku.

Hiki i ka Magnetron sputtering ke hoʻonui i ka wikiwiki o ka sputtering ma ka hoʻokomo ʻana i kahi kahua magnetic ma ka ʻili cathode o ka pahuhopu a me ka hoʻohana ʻana i ke kaohi o ke kahua magnetic ma nā ʻāpana i hoʻopiʻi ʻia e hoʻonui i ka nui o ka plasma. ʻO kahi mīkini uhi vacuum magnetron sputtering piha i haku ʻia me nā ʻāpana he nui, hoʻopau kēlā me kēia ʻōnaehana i nā hana like ʻole, a hoʻokō hope loa i ka uhi kiʻekiʻe kiʻekiʻe. ʻO nā lako uhi optical magnetron sputtering i haku ʻia me ke keʻena vacuum, valve, ʻōnaehana pumping vacuum, ʻōnaehana ana vacuum, pahuhopu cathode, ana mānoanoa kiʻiʻoniʻoni, ʻōnaehana hoʻokele electro-pneumatic, a pēlā aku.

ʻO ke kino nui o ka magnetron sputtering optical coater he keʻena vacuum, ua hoʻoholo ʻia ka nui e ka nui o ka substrate huahana a me ka hiki o ka mea hoʻohana. Hana ʻia ke keʻena me ke kila kila SUS304, ʻaʻole maʻalahi ka popo, ʻoi aku ka paʻa ma mua o ke kila kalapona a maʻalahi hoʻi e mālama. Ua hoʻohana ka mīkini i ka ʻenehana uhi sputtering alapine waena, e uhi ana me nā mea oxide e like me ka silicon oxide a me ka niobium oxide etc, me ka ana mānoanoa o ka ʻili e hana i ka ʻili hoʻonaninani optical. ʻO ke kiʻiʻoniʻoni i hana ʻia e ka mīkini uhi optical magnetron sputtering he paʻa ikaika a me ka maʻemaʻe kiʻekiʻe, a hiki ke sputter ʻia me nā ʻano mea like ʻole me nā ʻāpana like ʻole i ka manawa like.