Umatshini wokugquma otshizayo ukuze ugqume imibala yemibala yomnyama
Ukutshiza ngeMagnetron luhlobo lokufakwa komphunga ngokwasemzimbeni. Indlela yokutshiza ngokubanzi ingasetyenziselwa ukugquma isinyithi, i-semiconductor, i-insulator kunye nezinye izinto, kwaye ineempawu zomthwalo omkhulu wokulayisha, kulula ukuyisebenzisa, ifilimu yokugquma icocekile kwaye igudile, ine-adhesion entle njalo njalo. Ukutshiza ngeMagnetron kunokunyusa izinga lokutshiza ngokungenisa intsimi yemagnethi kumphezulu we-cathode wethagethi kunye nokusebenzisa umda wentsimi yemagnethi kumasuntswana atshajiweyo ukwandisa uxinano lweplasma. Umatshini wokutshiza nge-vacuum opheleleyo we-magnetron wenziwe ngamacandelo amaninzi, inkqubo nganye igqibezela imisebenzi eyahlukeneyo, kwaye ekugqibeleni ifezekise ukugquma kokugqibela okusemgangathweni ophezulu. Izixhobo zokutshiza nge-magnetron zenziwe ngegumbi le-vacuum, ivalvu, inkqubo yokumpompa nge-vacuum, inkqubo yokulinganisa i-vacuum, ithagethi ye-cathode, i-gauge yobukhulu befilimu, inkqubo yolawulo lwe-electro-pneumatic, njl. Umzimba ophambili we-magnetron sputtering optical coater yigumbi le-vacuum, ubungakanani bumiselwa bubungakanani be-substrate yemveliso kunye nomthamo womsebenzisi. Igumbi lenziwe ngentsimbi engagqwaliyo ye-SUS304, ekulula ukuyigqwala, ihlala ixesha elide kunentsimbi yekhabhoni kwaye kulula ukuyilungisa. Umatshini usebenzise ubuchwepheshe bokugquma i-sputtering frequency ephakathi, ugquma ngezinto ze-oxide ezifana ne-silicon oxide kunye ne-niobium oxide njl.njl., kunye ne-gauge yobukhulu befilimu ukwenza ifilimu yokuhombisa ye-optical. Ifilimu eyenziwe ngumatshini wokugquma i-magnetron sputtering optical inokunamathela okuqinileyo kunye nobunyulu obuphezulu, kwaye inokugquma ngezinto ezahlukeneyo ezineenxalenye ezahlukeneyo ngaxeshanye.
Inkqubo yokutshintsha umbala kancinci kancinci idla ngokwenziwa ngumatshini wokugquma we-magnetron sputtering optical. Okwangoku, ikhava yangasemva yeefowuni ezininzi eziphathwayo isebenzisa inkqubo yokutshintsha umbala kancinci kancinci we-PVD vacuum coating. Kakade ke, umatshini wokugquma we-optical kunye nomatshini wokugquma we-evaporation nazo zinokwenza isiphumo esifanayo semibala ye-rainbow seven, kodwa imibala ayizizo ii-gradients eziqhelekileyo kwaye kusekho umahluko kumgangatho. Ukugquma kwe-Magnetron luhlobo lokufakwa komphunga ngokwasemzimbeni. Indlela yokugquma ngokubanzi ingasetyenziselwa ukugquma isinyithi, i-semiconductor, i-insulator kunye nezinye izinto, kwaye ineempawu zomthamo omkhulu wokulayisha, kulula ukuyisebenzisa, ifilimu yokugquma icocekile kwaye igudile, ine-adhesion entle njalo njalo.
Ukutshiza ngeMagnetron kunokunyusa izinga lokutshiza ngokungenisa intsimi yemagnethi kumphezulu we-cathode wethagethi kunye nokusebenzisa umqobo wentsimi yemagnethi kumasuntswana atshajiweyo ukwandisa uxinano lweplasma. Umatshini wokutshiza nge-vacuum opheleleyo we-magnetron wenziwe ngamacandelo amaninzi, inkqubo nganye igqibezela imisebenzi eyahlukeneyo, kwaye ekugqibeleni ifezekisa ugqubuthelo lokugqibela olukumgangatho ophezulu. Izixhobo zokutshiza nge-magnetron ze-optical zenziwe ngegumbi le-vacuum, ivalvu, inkqubo yokupompa nge-vacuum, inkqubo yokulinganisa i-vacuum, ithagethi ye-cathode, i-gauge yobukhulu befilimu, inkqubo yolawulo lwe-electro-pneumatic, njl.
Umzimba oyintloko we-magnetron sputtering optical coater yi-vacuum chamber, ubungakanani bumiselwa bubungakanani be-substrate yemveliso kunye nomthamo womsebenzisi. I-chamber yenziwe nge-SUS304 stainless steel, engelula ukuyigqwala, ihlala ixesha elide kune-carbon steel kwaye kulula ukuyilungisa. Umatshini wamkela ubuchwepheshe bokugquma i-sputtering frequency ephakathi, ugquma ngezinto ze-oxide ezifana ne-silicon oxide kunye ne-niobium oxide njl.njl., kunye ne-gauge yobukhulu befilimu ukwenza ifilimu yokuhombisa ye-optical. I-film eyenziwe ngumatshini we-magnetron sputtering optical coating ine-adhesive enamandla kunye nobunyulu obuphezulu, kwaye inokugquma ngezinto ezahlukeneyo ezineenxalenye ezahlukeneyo ngaxeshanye.




