Mumatekinoroji emazuva ano ekuputira vacuum, kudzora voltage ye bias chinhu chakakosha chinokanganisa zvakananga magadzirirwo e thin film microstructure, density, internal stress, uye adhesion strength. Ingave iri muma hard coatings, ma decoration films, kana ma optical coatings, kudzora kwakakodzera kwe substrate bias voltage hakungogadzirisi chete plasma dynamics, asiwo kunowedzera mashandiro uye kuvimbika kwemafirimu anobuda.
Nhamba 1 Chii Chinonzi Bias Voltage Control?
Kudzora voltage yerusarurazvinoreva nzira yekuisa simba risina kunaka pachikamu chepasi panguva yekuisa, zvichiita kuti chive chakaderera pane plasma yakapoteredza. Nzira iyi inoshandiswa zvakanyanya mumaitiro ePVD (Physical Vapor Deposition), kunyanya mu magnetron sputtering, ion plating, uye cathodic arc deposition systems.
Kusarura kwe substrate kunogona kushandiswa kuburikidza nemagetsi eDC (Direct Current), MF (Mid-Frequency), kana RF (Radio Frequency). Basa rayo guru nderekukurumidzisa ma ions akanaka muplasma akananga pamusoro pe substrate, zvichiita kuti ma ion bombardment awedzere kunaka kwefirimu.
Nhamba 2 Mabatirwo Anoita Bias Voltage paZvimiro zveMafirimu
Nzira huru yekudzora voltage ye bias iri mukugadzirisa kinetics yekukura kwefirimu kuburikidza nesimba rema ions anouya. Kukanganisa kwayo kunoratidzwa muzvinhu zvakakosha zvakati wandei:
Kuwanda kwemvura:
Kusarura kwakakodzera kunowedzera simba remaion rinosvika panzvimbo yacho, zvichikurudzira kufamba kwepamusoro uye kurongwazve kwemaadatomu. Izvi zvinotungamira kumafirimu akaomarara ane simba rekudzivirira ngura, kuomarara, uye kuramba kupfeka.
Kudzora Kushushikana:
Kuputika kwemaion kunounzawo kushushikana kwakasarira mukati mefirimu. Kusarura kwakanyanya kunogona kukonzera kushushikana kwakadzvanywa, zvichikonzera kutsemuka kana kupatsanurwa. Nokudaro, mwero wekusarudza kwakakodzera unofanirwa kusarudzwa nokungwarira zvichienderana nezvinhu zvefirimu, rudzi rwesubstrate, uye ukobvu hwekufukidza.
Kuvandudza Kunamira:
Kushandiswa kwemagetsi ekubiridzira kunowedzera kudyidzana pakati pezvinhu nekukurudzira kusanganisa zvinhu zviviri kana kugadzira ma interfaces akarongwa, nokudaro zvichivandudza kunamira kwefirimu-kune-substrate—kunyanya kukosha kune machira akaomarara kana maumbirwo e multilayer.
Kudzvinyirira Zvidimbu uye Kutsvedzerera Pamusoro:
Kusarura kwakakodzera kunogona kudzvinyirira kuiswa kwezvikamu zvikuru uye kuderedza kuomarara kwenzvimbo, nokudaro zvichideredza kurasikirwa kwekupararira mumafirimu ekuona uye kuvandudza kunaka kwenzvimbo.
Nhamba 3 Mhando dzeNzira dzekudzora Rusaruro
DC Bias: Inoshandiswa zvakanyanya pakugadzira zvinhu zvinofambisa mhepo, ichipa kudzora kuri nyore uye mhinduro inokurumidza. Inowanzo shandiswa pakushongedza zvinhu zvinofukidza mhepo uye zvakasimba.
RF Bias: Yakanakira zvinhu zvisingafambise mhepo zvakaita segirazi, ceramics, uye polymers. Inopa hunyanzvi hwakasiyana asi inoda kubatanidzwa kwemasisitimu kwakanyatsogadzirwa uye kugadziriswa kwemaitikiro.
Kudzvanywa Kwemhepo: Kunosanganisira kushandisa mapuroteni emhepo anowanzo shandiswa, kuyera mwero wekuisa mvura uye simba remaion. Yakakodzera mapurasitiki anodziya kana kuti ma geometries akaomarara.
Pamusoro pezvo, mamwe masisitimu epamusoro anoshandisa closed-loop bias control, iyo inoongorora hunhu hweplasma uye bias current munguva chaiyo kuchengetedza hwindo remaitiro akasimba uye kuve nechokwadi chekuti coating yakafanana pakati pemabheti.
—Nyaya iyi yakaburitswa na midziyo yekunamira ye vacuummugadziri Zhenhua Vacuum
Nguva yekutumira: Chikunguru-17-2025