Mu ukadaulo wamakono wopaka vacuum, kuwongolera mphamvu ya bias ndi gawo lofunika kwambiri lomwe limakhudza mwachindunji kapangidwe ka filimu yopyapyala, kuchulukana, kupsinjika kwamkati, ndi mphamvu yomatira. Kaya mu zomatira zolimba, mafilimu okongoletsera, kapena zomatira zowala, kuwongolera bwino mphamvu ya bias ya substrate sikuti kumangosintha mphamvu za plasma, komanso kumawonjezera magwiridwe antchito ndi kudalirika kwa mafilimu omwe amabwera.
Nambala 1 Kodi Kulamulira Voltage Yachinyengo N'chiyani?
Kulamulira mphamvu yamagetsi molakwikalimatanthauza njira yogwiritsira ntchito mphamvu yoipa pa substrate panthawi yoyika, zomwe zimapangitsa kuti ikhale yotsika kwambiri kuposa plasma yozungulira. Njirayi imagwiritsidwa ntchito kwambiri mu njira za PVD (Physical Vapor Deposition), makamaka mu magnetron sputtering, ion plating, ndi cathodic arc deposition systems.
Kusankhana kwa substrate kungagwiritsidwe ntchito kudzera mu magetsi a DC (Direct Current), MF (Mid-Frequency), kapena RF (Radio Frequency). Ntchito yake yayikulu ndikufulumizitsa ma ion abwino mu plasma kupita pamwamba pa substrate, zomwe zimathandiza kuti ma ion aphulike zomwe zimapangitsa kuti filimu ikule bwino.
Nambala 2 Momwe Voltage Yachinyengo Imakhudzira Katundu wa Mafilimu
Njira yaikulu yowongolera mphamvu yamagetsi ya bias ili pakusintha kayendedwe ka kukula kwa filimu kudzera mu mphamvu ya ma ayoni omwe akubwera. Mphamvu yake imawonekera m'mbali zingapo zofunika:
Kuchulukana kwa madzi:
Kusankha bwino kolakwika kumawonjezera mphamvu ya kinetic ya ma ayoni omwe amafika pa substrate, zomwe zimapangitsa kuti pamwamba paziyenda bwino komanso kuti ma adatomu akonzedwenso. Izi zimapangitsa kuti pakhale mafilimu okhuthala omwe amalimbana ndi dzimbiri, kuuma, komanso kukana kuvala.
Malamulo Oletsa Kupsinjika Maganizo:
Kuphulika kwa ma ion kumabweretsanso kupsinjika kotsalira mu filimuyi. Kukonda kwambiri kungayambitse kupsinjika, zomwe zingayambitse ming'alu kapena ming'alu. Chifukwa chake, milingo yoyenera ya kukonda iyenera kusankhidwa mosamala kutengera zinthu za filimuyi, mtundu wa substrate, ndi makulidwe a chophimba.
Kukulitsa Kumatira:
Mphamvu ya bias imawonjezera kuyanjana kwa interfacial mwa kulimbikitsa kusakaniza pakati pa zigawo kapena kupanga ma interfaces ogwirizana, motero kumathandizira kumamatira kwa filimu ndi substrate—makamaka kofunikira kwambiri pa zokutira zolimba kapena zomangamanga za multilayer.
Kuchepetsa Tinthu ndi Kukonza Malo:
Kusankhana koyenera kungachepetse kuphatikizika kwa tinthu tating'ono ...
Mitundu 3 ya Njira Zowongolera Tsankho
DC Bias: Amagwiritsidwa ntchito kwambiri pa zinthu zoyendetsera magetsi, zomwe zimapangitsa kuti zinthu zikhale zosavuta kuzilamulira komanso kuti zinthu zizigwira ntchito mwachangu. Amagwiritsidwa ntchito kwambiri pa zinthu zokongoletsera komanso zolimba.
RF Bias: Yabwino kwambiri pa zinthu zosagwiritsa ntchito mphamvu monga magalasi, ziwiya zadothi, ndi ma polima. Imapereka mgwirizano wazinthu zambiri koma imafuna kuphatikiza kwapamwamba kwambiri kwa makina ndikusintha njira.
Kusankhana mitundu: Kumaphatikizapo kugwiritsa ntchito ma pulses a periodic bias, kulinganiza kuchuluka kwa ma deposition ndi mphamvu ya ma ion. Kumayenerera bwino ma coverage otsika kutentha kapena ma complex geometries.
Kuphatikiza apo, machitidwe ena apamwamba amagwiritsa ntchito njira yoletsa kufalikira kwa magazi, yomwe imayang'anira mawonekedwe a plasma ndi mphamvu ya magazi nthawi yeniyeni kuti isunge nthawi yokhazikika ndikuwonetsetsa kuti kufalikira kwa magazi kuli kofanana m'magulu onse.
—Nkhaniyi yafalitsidwa ndi zida zophikira zotsukirawopanga Zhenhua Vacuum
Nthawi yotumizira: Julayi-17-2025