Kukula kwa Epitaxial, komwe nthawi zambiri kumatchedwanso epitaxy, ndi imodzi mwa njira zofunika kwambiri popanga zipangizo ndi zipangizo za semiconductor. Kukula kwa epitaxial komwe kumatchedwa kukula kwa epitaxial kumachitika m'mikhalidwe ina mu gawo limodzi la kristalo, kukula kwa filimu imodzi ya kristalo kumatchedwa epitaxial layer. Ukadaulo wa epitaxial ndi woyambirira wa m'ma 1960 mu kafukufuku wa silicon single-crystal thin film pamaziko a chitukuko cha pafupifupi zaka makumi asanu tsopano, anthu atha kuzindikira mitundu yosiyanasiyana ya mafilimu a semiconductor pansi pa mikhalidwe ina ya kukula kwa epitaxial. Ukadaulo wa Epitaxial wathetsa mavuto ambiri mu semiconductor discrete components ndi integrated circuits, zomwe zathandiza kwambiri kuti chipangizocho chigwire ntchito. Filimu ya Epitaxial imatha kuwongolera bwino makulidwe ake ndi katundu wake wogwiritsa ntchito mankhwala osokoneza bongo, ndipo izi zapangitsa kuti ma semiconductor integrated circuits apite patsogolo kwambiri. Silicon single crystal pogwiritsa ntchito slicing, grinding, polishing ndi njira zina zopangira, kuti mupeze pepala lopukutidwa, mutha kupanga zigawo zosiyana ndi ma semiconductor circuits. Koma nthawi zambiri pepala lopukutidwali limagwiritsidwa ntchito ngati chothandizira chamakina cha substrate, momwe choyamba pamafunika kukulitsa wosanjikiza wa filimu ya kristalo imodzi yokhala ndi mtundu woyenera wa conductivity ndi resistivity, kenako zigawo zosiyana kapena ma circuits ophatikizidwa opangidwa mu filimu ya kristalo imodzi. Njirayi imagwiritsidwa ntchito, mwachitsanzo, popanga ma transistors amphamvu kwambiri a silicon, kuthetsa mkangano pakati pa voltage yosweka ndi kukana kwa mndandanda. Chosonkhanitsa cha transistor chimafuna voltage yosweka kwambiri, yomwe imatsimikiziridwa ndi resistivity ya pn junction ya silicon wafer. Kuti akwaniritse izi, zipangizo zotsukira kwambiri zimafunika. Anthu omwe ali mu zipangizo zotsukira kwambiri za n-mtundu wa n-mtundu wa epitaxial amakhala ndi ma microns angapo mpaka khumi ndi awiri okhuthala pang'ono otsukira kwambiri otsukira kwambiri otsukira, kupanga transistor mu epitaxial wosanjikiza, zomwe zimathetsa voltage yosweka kwambiri yomwe imafunikira ndi resistivity yayikulu komanso kukana kwapansi kwa mndandanda wa osonkhanitsa komwe kumafunikira ndi resistivity yotsika ya substrate ya kutsutsana pakati pa.
Kukula kwa epitaxial ya gasi-phase ndiyo njira yoyamba kugwiritsidwa ntchito mu gawo la semiconductor la ukadaulo wokhwima kwambiri wa epitaxial, womwe umagwira ntchito yofunika kwambiri pakukula kwa sayansi ya semiconductor, zomwe zimathandiza kwambiri pakukula kwa zipangizo ndi zida za semiconductor komanso kukonza magwiridwe antchito awo. Pakadali pano, kukonzekera filimu ya semiconductor single crystal epitaxial ndiyo njira yofunika kwambiri yosungira nthunzi ya mankhwala. Chomwe chimatchedwa chemical vapor deposition, ndiko kuti, kugwiritsa ntchito zinthu za gasi pamwamba pa mankhwala, njira yopangira ma depositi olimba. Ukadaulo wa CVD ukhoza kukulitsa mafilimu apamwamba a single-crystal, kuti apeze mtundu wofunikira wa doping ndi makulidwe a epitaxial, zomwe zimapangitsa kuti zikhale zosavuta kupanga, motero zakhala zikugwiritsidwa ntchito kwambiri m'mafakitale. M'mafakitale, epitaxial wafer yokonzedwa ndi CVD nthawi zambiri imakhala ndi gawo limodzi kapena angapo obisika, omwe angagwiritsidwe ntchito kuwongolera kapangidwe ka chipangizocho ndi kugawa kwa doping pofalitsa kapena kuyika ma ion; mawonekedwe a CVD epitaxial layer ndi osiyana ndi azinthu zambiri, ndipo kuchuluka kwa mpweya ndi kaboni mu epitaxial layer nthawi zambiri kumakhala kochepa kwambiri, komwe ndi phindu lake. Komabe, CVD epitaxial layer ndi yosavuta kupanga kudzipangira, mu ntchito zothandiza muyenera kuchitapo kanthu kuti muchepetse epitaxial layer ya kudzipangira, CVD technology ikadali m'mbali zina za boma la empirical process, muyenera kuchita kafukufuku wozama, kuti ipitirire kupeza chitukuko cha CVD technology.
Njira yokulira ya CVD ndi yovuta kwambiri, mu njira ya mankhwala nthawi zambiri imakhala ndi zigawo ndi zinthu zosiyanasiyana, imatha kupanga zinthu zingapo zapakati, ndipo pali zinthu zambiri zodziyimira pawokha, monga kutentha, kupanikizika, kuchuluka kwa mpweya, ndi zina zotero, njira ya epitaxial imakhala ndi njira zingapo zotsatizana, kuti ipange ndikukonzanso. Njira ya epitaxial ili ndi njira zambiri zotsatizana, zokulirakulira komanso zokwaniritsa. Kuti tiwunike njira ndi njira ya kukula kwa CVD epitaxial, choyamba, kufotokozera kusungunuka kwa zinthu zosinthika mu gawo la mpweya, kuthamanga pang'ono kwa mpweya wosiyanasiyana, njira zomveka bwino za kinetic ndi thermodynamic; kenako kumvetsetsa mpweya wosinthika kuchokera ku gawo la mpweya kupita pamwamba pa substrate misa transport, kupangidwa kwa malire a kayendedwe ka mpweya ndi pamwamba pa substrate, kukula kwa nyukiliyasi, komanso momwe pamwamba pake pakuyendera, kufalikira ndi kusamuka, motero pamapeto pake kupanga filimu yomwe mukufuna. Mu njira yokulira ya CVD, chitukuko ndi kupita patsogolo kwa reactor zimagwira ntchito yofunika kwambiri, zomwe zimatsimikiza kwambiri mtundu wa epitaxial layer. Kapangidwe ka pamwamba pa epitaxial layer, zolakwika za lattice, kufalikira ndi kuwongolera zonyansa, makulidwe ndi kufanana kwa epitaxial layer zimakhudza mwachindunji magwiridwe antchito ndi kukolola kwa chipangizocho.
– Nkhaniyi yatulutsidwa ndiwopanga makina ophikira vacuumGuangdong Zhenhua
Nthawi yotumizira: Meyi-04-2024