Kev loj hlob ntawm Epitaxial, feem ntau hu ua epitaxy, yog ib qho ntawm cov txheej txheem tseem ceeb tshaj plaws hauv kev tsim cov ntaub ntawv semiconductor thiab cov khoom siv. Qhov kev loj hlob ntawm epitaxial yog nyob rau hauv qee qhov xwm txheej hauv cov khoom siv lead ua ke ntawm ib txheej ntawm cov txheej txheem zaj duab xis ib yam khoom, kev loj hlob ntawm ib zaj duab xis siv lead ua ke hu ua epitaxial txheej epitaxial technology yog thaum ntxov xyoo 1960 hauv kev tshawb fawb txog silicon ib txheej siv lead ua ke nyias zaj duab xis raws li kev tshwm sim ntawm kev loj hlob ntawm yuav luag ib nrab xyoo pua tam sim no, tib neeg tau paub txog ntau yam zaj duab xis semiconductor nyob rau hauv qee qhov xwm txheej ntawm kev loj hlob ntawm epitaxial. Epitaxial technology tau daws ntau yam teeb meem hauv semiconductor discrete components thiab integrated circuits, txhim kho kev ua tau zoo ntawm lub cuab yeej. Epitaxial zaj duab xis tuaj yeem tswj tau nws cov thickness thiab doping zog kom raug dua, qhov feature no tau ua rau kev loj hlob sai ntawm semiconductor integrated circuits, mus rau hauv ib theem zoo meej dua. Silicon ib txheej siv lead ua ke los ntawm kev txiav, sib tsoo, polishing thiab lwm yam txheej txheem ua tiav, kom tau txais daim ntawv polished, koj tuaj yeem ua cov khoom sib cais thiab integrated circuits rau nws. Tab sis ntau zaus daim ntawv ci no tsuas yog ua ib qho kev txhawb nqa rau lub substrate, uas nws yog qhov tsim nyog los ua ntej cog ib txheej ntawm ib zaj duab xis siv lead ua ke nrog hom kev coj ua thiab kev tiv taus, thiab tom qab ntawd cov khoom sib cais lossis cov khoom sib xyaw ua ke tsim tawm hauv ib zaj duab xis siv lead ua ke. Txoj kev no siv, piv txwv li, hauv kev tsim cov silicon high-frequency high-power transistors, daws qhov tsis sib haum xeeb ntawm kev tawg hluav taws xob thiab kev tiv taus series. Tus sau ntawm transistor xav tau lub zog tawg hluav taws xob siab, uas yog txiav txim siab los ntawm qhov tsis kam ntawm pn junction ntawm silicon wafer. Yuav kom ua tau raws li qhov yuav tsum tau ua no, cov ntaub ntawv tiv taus siab yuav tsum tau ua. Cov neeg nyob hauv cov ntaub ntawv tsis kam n-hom uas muaj zog heev ntawm epitaxial ntau mus rau kaum ob microns tuab me ntsis doped high-resistance n-hom txheej, transistor tsim tawm hauv epitaxial txheej, uas daws qhov tawg hluav taws xob siab uas xav tau los ntawm qhov tsis kam siab thiab qhov tsis kam ntawm cov khoom siv qis uas xav tau los ntawm qhov tsis kam ntawm substrate qis ntawm qhov tsis sib haum xeeb ntawm.
Kev loj hlob ntawm cov pa roj epitaxial yog daim ntawv thov thaum ntxov tshaj plaws hauv thaj chaw semiconductor ntawm cov thev naus laus zis loj hlob epitaxial uas paub tab dua, uas ua lub luag haujlwm tseem ceeb hauv kev txhim kho kev tshawb fawb semiconductor, pab txhawb rau qhov zoo ntawm cov ntaub ntawv semiconductor thiab cov khoom siv thiab lawv cov kev ua tau zoo dua. Tam sim no, kev npaj cov yeeb yaj kiab semiconductor ib leeg siv lead ua epitaxial yog txoj hauv kev tseem ceeb tshaj plaws ntawm kev tso cov pa tshuaj lom neeg. Qhov hu ua cov pa tshuaj lom neeg, uas yog, kev siv cov tshuaj lom neeg ntawm qhov chaw khov kho ntawm cov tshuaj tiv thaiv, cov txheej txheem ntawm kev tsim cov khoom khov kho. CVD thev naus laus zis tuaj yeem loj hlob cov yeeb yaj kiab ib leeg siv lead ua zoo, kom tau txais hom doping thiab epitaxial thickness uas xav tau, yooj yim kom paub txog qhov ntau lawm, thiab yog li ntawd tau siv dav hauv kev lag luam. Hauv kev lag luam, cov wafer epitaxial uas CVD npaj feem ntau muaj ib lossis ntau txheej faus, uas tuaj yeem siv los tswj cov qauv ntawm cov cuab yeej thiab kev faib tawm doping los ntawm kev sib kis lossis ion implantation; cov khoom siv lub cev ntawm CVD epitaxial txheej txawv ntawm cov khoom siv loj, thiab cov pa oxygen thiab carbon ntawm cov txheej epitaxial feem ntau qis heev, uas yog nws qhov zoo. Txawm li cas los xij, CVD epitaxial txheej yog ib qho yooj yim rau kev tsim tus kheej-doping, hauv kev siv tswv yim yuav tsum tau siv qee yam kev ntsuas los txo cov epitaxial txheej ntawm tus kheej-doping, CVD thev naus laus zis tseem nyob rau hauv qee qhov ntawm cov txheej txheem empirical, yuav tsum tau ua ntau qhov kev tshawb fawb tob tob, yog li nws txuas ntxiv mus tau txais kev txhim kho ntawm CVD thev naus laus zis.
CVD txoj kev loj hlob mechanism yog qhov nyuaj heev, hauv cov tshuaj lom neeg feem ntau muaj ntau yam khoom thiab cov tshuaj, tuaj yeem tsim ntau yam khoom nruab nrab, thiab muaj ntau yam ywj pheej, xws li kub, siab, roj ntws tus nqi, thiab lwm yam., epitaxial txheej txheem muaj ntau qhov rov qab thiab tawm los ua ke, ib leeg los tsim thiab txhim kho. Cov txheej txheem epitaxial muaj ntau qhov sib law liag, sib txuas thiab ua kom zoo dua. Txhawm rau txheeb xyuas cov txheej txheem thiab mechanism ntawm CVD epitaxial kev loj hlob, ua ntej tshaj plaws, kom meej meej txog kev yaj ntawm cov tshuaj reactive hauv cov roj theem, qhov sib npaug ntawm cov roj sib txawv, cov txheej txheem kinetic thiab thermodynamic meej; tom qab ntawd kom nkag siab txog cov roj reactive los ntawm cov roj theem mus rau qhov chaw ntawm cov khoom thauj loj substrate, kev tsim cov ciam teb ntawm cov roj ntws thiab qhov chaw ntawm cov substrate, kev loj hlob ntawm lub nucleus, nrog rau qhov chaw ua haujlwm, diffusion thiab migration, thiab yog li thaum kawg tsim cov yeeb yaj kiab xav tau. Hauv cov txheej txheem loj hlob ntawm CVD, kev loj hlob thiab kev nce qib ntawm lub reactor ua lub luag haujlwm tseem ceeb, uas feem ntau txiav txim siab qhov zoo ntawm cov txheej epitaxial. Qhov morphology ntawm qhov chaw ntawm epitaxial txheej, lattice defects, kev faib tawm thiab kev tswj hwm ntawm impurities, thickness thiab uniformity ntawm epitaxial txheej ncaj qha cuam tshuam rau cov cuab yeej ua haujlwm thiab cov txiaj ntsig.
– Tsab xov xwm no yog tso tawm los ntawmlub tshuab nqus tsev txheej tshuab chaw tsim khoomGuangdong Zhenhua
Lub sijhawm tshaj tawm: Tsib Hlis-04-2024