Te Whakatakotoranga Kohu Matū

Ko te tipu epitaxial, e kiia ana hoki ko te epitaxy, tētahi o ngā tukanga tino nui i roto i te hanganga o ngā rauemi me ngā taputapu semiconductor. Ko te mea e kiia nei ko te tipu epitaxial kei roto i ētahi āhuatanga i roto i te paparanga tioata kotahi i runga i te tukanga kiriata hua kotahi, ko te tipu o te kiriata tioata kotahi e kiia nei ko te hangarau epitaxial paparanga epitaxial i te tīmatanga o te tekau tau atu i 1960 i roto i te rangahau kiriata angiangi tioata kotahi silicon i runga i te putanga mai o te whanaketanga tata ki te haurua rautau inaianei, kua taea e te tangata te whakatutuki i ngā momo kiriata semiconductor i raro i ētahi āhuatanga o te tipu epitaxial. Kua whakatauhia e te hangarau epitaxial he maha ngā raruraru i roto i ngā wāhanga motuhake semiconductor me ngā ara iahiko whakauru, ka tino whakapai ake i te mahi a te taputapu. Ka taea e te kiriata epitaxial te whakahaere tika ake i tōna matotoru me ngā āhuatanga doping, nā tēnei āhuatanga i arahi ki te whanaketanga tere o ngā ara iahiko whakauru semiconductor, ki tētahi wāhanga tino pai ake. Mā te tapatapahi, te huri, te oro me ētahi atu tikanga tukatuka, ka whiwhi pepa orohia te tioata kotahi silicon, ka taea e koe te hanga wāhanga motuhake me ngā ara iahiko whakauru ki runga. Engari i roto i ngā wā maha, ko tēnei pepa kua orohia he tautoko ā-mīhini anake mō te papa, e tika ana kia whakatipuria tuatahitia he paparanga kiriata karaihe kotahi me te momo kawe hiko me te ātete e tika ana, kātahi ka hangaia he wāhanga motuhake, he ara iahiko whakauru rānei i roto i te kiriata karaihe kotahi. Hei tauira, ka whakamahia tēnei tikanga i roto i te hanga o ngā transistors mana-teitei auau-teitei silicon, e whakatau ana i te pakanga i waenga i te ngaohiko pakaru me te ātete raupapa. Me whai ngaohiko pakaru teitei te kaikohi o te transistor, e whakatauhia ana e te ātete o te hononga pn o te papa silicon. Hei whakatutuki i tēnei whakaritenga, me whai rauemi ātete teitei. Ko te hunga i roto i ngā rauemi ātete-iti momo-n kua tino tāpirihia ki runga i te paparanga momo-n epitaxial he maha ki te tekau mā rua microns te matotoru kua tāpirihia ki te paparanga ātete-teitei ngawari, ka hangaia he transistor i roto i te paparanga epitaxial, e whakatau ana i te ngaohiko pakaru teitei e hiahiatia ana e te ātete teitei me te ātete raupapa kaikohi iti e hiahiatia ana e te ātete papa iti o te whakahē i waenga.

Ko te tipu epitaxial hau-wāhanga te tono tuatahi i roto i te mara semiconductor o tētahi hangarau tipu epitaxial kua pakeke ake, he mea nui ki te whanaketanga o te pūtaiao semiconductor, he mea nui ki te kounga o ngā rauemi me ngā taputapu semiconductor me te whakapai ake i tā rātou mahi. I tēnei wā, ko te whakarite i te kiriata epitaxial karaihe kotahi semiconductor te tikanga tino nui o te whakatakotoranga kohu matū. Ko te mea e kiia nei ko te whakatakotoranga kohu matū, arā, ko te whakamahi i ngā matū hau ki runga i te mata totoka o te tauhohenga matū, te tukanga whakaputa putunga totoka. Ka taea e te hangarau CVD te whakatipu i ngā kiriata karaihe kotahi kounga teitei, kia whiwhi ai i te momo doping me te matotoru epitaxial e hiahiatia ana, he ngāwari ki te whakatutuki i te whakaputanga papatipu, nō reira kua whakamahia whānuitia i roto i te ahumahi. I roto i te ahumahi, ko te wafer epitaxial i whakaritea e te CVD he maha ngā paparanga huna kotahi, neke atu rānei, ka taea te whakamahi hei whakahaere i te hanganga taputapu me te tohatoha doping mā te horapa, te whakauru katote rānei; he rerekē ngā āhuatanga ā-tinana o te paparanga epitaxial CVD i ērā o te rauemi papatipu, ā, he iti rawa te ihirangi hāora me te waro o te paparanga epitaxial, koinei tōna painga. Heoi, he ngāwari te hanga i te paparanga epitaxial CVD ki te whakakī-ā-roto, i roto i ngā mahi whaihua me mahi ētahi mahi hei whakaiti i te paparanga epitaxial o te whakakī-ā-roto, kei roto tonu te hangarau CVD i ētahi āhuatanga o te āhua tukanga empirical, me mahi rangahau hōhonu ake, kia haere tonu ai te whanaketanga o te hangarau CVD.

He tino uaua te tikanga tipu CVD, i roto i te tauhohenga matū he maha ngā wāhanga me ngā matū, ka taea te whakaputa i te maha o ngā hua takawaenga, ā, he maha ngā taurangi motuhake, pērā i te pāmahana, te pēhanga, te tere rere o te hau, me ētahi atu, he maha ngā tukanga epitaxial e whai ake nei, kia whanakehia, kia whakapaitia hoki tetahi ki tetahi. He maha ngā mahi e whai ake nei, e whakawhānuihia ana, e whakapaitia ana hoki e tetahi ki tetahi i roto i te tukanga epitaxial. Hei tātari i te tukanga me te tikanga tipu epitaxial CVD, tuatahi, kia mārama te wairewa o ngā matū tauhohe i roto i te wāhanga hau, te pēhanga wāhanga taurite o ngā hau rerekē, ngā tukanga nekeneke me te thermodynamic mārama; kātahi ka mārama ki ngā hau tauhohe mai i te wāhanga hau ki te mata o te kawe papatipu papatipu, te hanganga o te paparanga rohe o te rere hau me te mata o te papa, te tipu o te karihi, me te tauhohenga mata, te horapa me te heke, ā, i te mutunga ka puta te kiriata e hiahiatia ana. I roto i te tukanga tipu o te CVD, he mea nui te whanaketanga me te ahunga whakamua o te tauhohenga, e whakatau ana i te kounga o te paparanga epitaxial. Ko te āhua o te mata o te paparanga epitaxial, ngā hapa whatunga, te tohatoha me te whakahaere i ngā poke, te matotoru me te ōritetanga o te paparanga epitaxial, ka pā tika ki te mahi me te hua o te taputapu.

–Nā tekaihanga mīhini paninga korehauGuangdong Zhenhua