Uto Epitaxial, nke a na-akpọkarị epitaxy, bụ otu n'ime usoro kachasị mkpa n'ịmepụta ihe na ngwaọrụ semiconductor. Ihe a na-akpọ uto epitaxial dị n'ọnọdụ ụfọdụ na otu kristal substrate na uto nke oyi akwa nke usoro ihe nkiri otu ngwaahịa, uto nke otu kristal a na-akpọ epitaxial layer technology epitaxial bụ mmalite afọ 1960 na nyocha silicon single-crystal thin film dabere na mmalite nke mmepe nke ihe fọrọ nke nta ka ọ bụrụ ọkara narị afọ ugbu a, ndị mmadụ enwewo ike ịmepụta ọtụtụ ihe nkiri semiconductor n'okpuru ọnọdụ ụfọdụ nke uto epitaxial. Teknụzụ Epitaxial edozila ọtụtụ nsogbu na ihe ndị mejupụtara semiconductor diverse na sekit agbakọtara, na-eme ka arụmọrụ nke ngwaọrụ ahụ ka mma nke ukwuu. Ihe nkiri Epitaxial nwere ike ijikwa ọkpụrụkpụ ya na ihe ndị na-eme ka doping ya sie ike nke ọma, atụmatụ a edugala na mmepe ngwa ngwa nke sekit agbakọtara semiconductor, n'ime ọkwa zuru oke. Silicon single kristal site na ịcha, ịcha, ịchacha na usoro nhazi ndị ọzọ, iji nweta mpempe akwụkwọ a na-egbuke egbuke, ị nwere ike ime ihe dị iche iche na sekit agbakọtara na ya. Ma n'ọtụtụ oge, mpempe akwụkwọ a na-egbuke egbuke naanị dị ka ihe nkwado igwe maka ihe mkpuchi ahụ, nke ọ dị mkpa ibu ụzọ kụọ oyi akwa nke otu kristal nwere ụdị conductivity na resistive kwesịrị ekwesị, wee mepụta ihe dị iche iche ma ọ bụ sekit agbakwunyere emepụtara na otu kristal. Dịka ọmụmaatụ, a na-eji usoro a eme ihe na mmepụta nke silicon high-frequency high-power transistors, na-edozi esemokwu dị n'etiti voltaji mmebi na usoro iguzogide. Onye na-anakọta transistor chọrọ nnukwu voltaji mmebi, nke a na-ekpebi site na resisivity nke njikọ pn nke silicon wafer. Iji mezuo ihe a chọrọ, a chọrọ ihe ndị dị elu na-eguzogide. Ndị mmadụ nọ na ihe n-ụdị dị ala na-eguzogide nke ukwuu na epitaxial ọtụtụ ruo iri na abụọ microns dị arọ nke oyi akwa n-ụdị siri ike nke na-eguzogide nke ọma, mmepụta transistor na oyi akwa epitaxial, nke na-edozi nnukwu voltaji mmebi achọrọ site na nnukwu resistive na obere usoro nchịkọta ihe mgbochi achọrọ site na obere substrate resistance nke esemokwu dị n'etiti.
Uto epitaxial nke gas bụ ngwa mbụ n'ọhịa semiconductor nke teknụzụ uto epitaxial tozuru oke, nke na-arụ ọrụ dị mkpa na mmepe nke sayensị semiconductor, na-enye aka nke ukwuu n'ịdị mma nke ihe na ngwaọrụ semiconductor na mmụba arụmọrụ ha. Ugbu a, nkwadebe nke ihe nkiri epitaxial nke semiconductor otu kristal bụ ụzọ kachasị mkpa isi tinye uzuoku kemịkalụ. Ihe a na-akpọ itinye uzuoku kemịkalụ, ya bụ, iji ihe gas mee ihe n'elu siri ike nke mmeghachi omume kemịkalụ, usoro nke ịmepụta nkwụnye siri ike. Teknụzụ CVD nwere ike itolite ihe nkiri kristal dị elu, iji nweta ụdị doping achọrọ na ọkpụrụkpụ epitaxial, dị mfe ịghọta mmepụta oke, ya mere ejirila ya nke ukwuu na ụlọ ọrụ mmepụta. Na ụlọ ọrụ mmepụta, wafer epitaxial nke CVD kwadebere na-enwekarị otu ma ọ bụ karịa oyi akwa e liri, nke enwere ike iji chịkwaa nhazi ngwaọrụ na nkesa doping site na mgbasa ma ọ bụ ntinye ion; njirimara anụ ahụ nke oyi akwa epitaxial CVD dị iche na nke ihe buru ibu, ọdịnaya oxygen na carbon nke oyi akwa epitaxial na-adịkarị ala, nke bụ uru ya. Agbanyeghị, oyi akwa CVD epitaxial dị mfe ịmepụta onwe-doping, na ngwa bara uru mkpa iji ụfọdụ usoro iji belata oyi akwa epitaxial nke onwe-doping, teknụzụ CVD ka dị n'akụkụ ụfọdụ nke ọnọdụ usoro ihe atụ, ọ dị mkpa ime nnyocha miri emi karị, ka o wee nọgide na-enweta mmepe nke teknụzụ CVD.
Usoro uto CVD dị oke mgbagwoju anya, na mmeghachi omume kemịkalụ na-agụnyekarị ọtụtụ ihe na ihe dị iche iche, nwere ike imepụta ọtụtụ ngwaahịa dị n'etiti, enwerekwa ọtụtụ mgbanwe onwe ha, dịka okpomọkụ, nrụgide, ọnụego mmiri gas, wdg., usoro epitaxial nwere ọtụtụ azụ na azụ n'usoro, ibe ha iji mepụta ma melite. Usoro epitaxial nwere ọtụtụ usoro na-aga n'ihu, na-agbasa ma na-eme ka ha zuo oke. Iji nyochaa usoro na usoro nke uto epitaxial CVD, nke mbụ, iji mee ka mmiri nke ihe ndị na-emeghachi omume na usoro gas doo anya, nguzozi nke nrụgide akụkụ nke gas dị iche iche, usoro kinetic na thermodynamic doro anya; wee ghọta gas ndị na-emeghachi omume site na usoro gas ruo n'elu nke njem oke substrate, nhazi nke oke oyi akwa nke mmiri gas na elu nke substrate, uto nke nucleus, yana mmeghachi omume elu, mgbasa na mbugharị, wee si otú a mepụta ihe nkiri achọrọ. Na usoro uto nke CVD, mmepe na ọganihu nke reactor na-arụ ọrụ dị mkpa, nke na-ekpebikarị ịdị mma nke oyi akwa epitaxial. Ọdịdị elu nke oyi akwa epitaxial, ntụpọ lattice, nkesa na njikwa nke ihe ruru unyi, ọkpụrụkpụ na nha nha nke oyi akwa epitaxial na-emetụta arụmọrụ na mmepụta ngwaọrụ ozugbo.
–E bipụtara akụkọ a site n'aka onyeigwe mkpuchi igwe emeputa ihe mkpuchiGuangdong Zhenhua
Oge ozi: Mee-04-2024