Epitaxial kukula, yomwe nthawi zambiri imatchedwanso epitaxy, ndi imodzi mwazinthu zofunika kwambiri popanga zida ndi zida za semiconductor. Zomwe zimatchedwa kukula kwa epitaxial zili muzinthu zina mu gawo limodzi la kristalo pa kukula kwa wosanjikiza wa ndondomeko ya filimu imodzi, kukula kwa filimu imodzi-crystal imatchedwa epitaxial layer epitaxial teknoloji ndi kumayambiriro kwa zaka za m'ma 1960 mu kafukufuku wa silicon single-crystal woonda filimu pamaziko a chitukuko cha pafupifupi theka la zaka tsopano, anthu atha kuzindikira zochitika zosiyanasiyana za semicondu. Tekinoloje ya Epitaxial yathetsa mavuto ambiri m'magawo a semiconductor discrete ndi mabwalo ophatikizika, ndikuwongolera magwiridwe antchito a chipangizocho. Filimu ya Epitaxial imatha kuwongolera molondola makulidwe ake ndi katundu wa doping, izi zapangitsa kuti ma semiconductor apangidwe mwachangu mabwalo ophatikizika, kukhala gawo labwino kwambiri. Silicon crystal imodzi mwa slicing, akupera, kupukuta ndi njira zina processing, kuti pepala opukutidwa, inu mukhoza kupanga zigawo zikuluzikulu ndi madera Integrated pa izo. Koma nthawi zambiri izi opukutidwa pepala kokha ngati thandizo mawotchi kwa gawo lapansi, imene m`pofunika kaye kukula wosanjikiza limodzi galasi filimu ndi mtundu woyenera madutsidwe ndi resistivity, ndiyeno zigawo zikuluzikulu kapena madera Integrated opangidwa mu filimu imodzi-crystal. Njirayi imagwiritsidwa ntchito, mwachitsanzo, popanga ma transistors apamwamba kwambiri a silicon, kuthetsa mkangano pakati pa kusweka kwamagetsi ndi kukana kwa mndandanda. Wosonkhanitsa wa transistor amafunikira mphamvu yowonongeka kwambiri, yomwe imatsimikiziridwa ndi resistivity ya pn junction ya silicon wafer. Kuti akwaniritse izi, zida zapamwamba zimafunikira. Anthu amtundu wa n-mtundu otsika kukana zipangizo pa epitaxial angapo kwa khumi ndi awiri microns wandiweyani mopepuka doped mkulu-kukana n-mtundu wosanjikiza, transistor kupanga mu epitaxial wosanjikiza, amene amathetsa mkulu kusweka voteji chofunika ndi mkulu resistivity ndi otsika okhometsa mndandanda kukana chofunika ndi otsika gawo lapansi resistivity wa kutsutsana pakati.
Kukula kwa gasi-gawo la epitaxial ndiko kugwiritsa ntchito koyamba mu gawo la semiconductor laukadaulo wokulirapo wa epitaxial kukula, womwe umagwira ntchito yofunika kwambiri pakupanga sayansi ya semiconductor, zomwe zimathandizira kwambiri pakuwongolera kwa zida ndi zida za semiconductor komanso kuwongolera magwiridwe antchito. Pakalipano, kukonzekera filimu ya semiconductor single crystal epitaxial ndiyo njira yofunika kwambiri yopangira mpweya wa mankhwala. Otchedwa mankhwala nthunzi mafunsidwe, ndiko kuti, ntchito gaseous zinthu pa olimba pamwamba pa mankhwala anachita, ndondomeko kupanga madipoziti olimba. Ukadaulo wa CVD ukhoza kukulitsa mafilimu apamwamba kwambiri a single-crystal, kuti apeze mtundu wofunikira wa doping ndi makulidwe a epitaxial, osavuta kuzindikira kupanga kwakukulu, chifukwa chake akhala akugwiritsidwa ntchito kwambiri m'makampani. M'makampani, chophatikizira cha epitaxial chokonzedwa ndi CVD nthawi zambiri chimakhala ndi zigawo zingapo zokwiriridwa, zomwe zingagwiritsidwe ntchito kuwongolera kapangidwe kachipangizo ndi kugawa kwa doping mwa kufalikira kapena kuyika ion; zinthu zakuthupi za CVD epitaxial wosanjikiza ndizosiyana ndi zazinthu zambiri, ndipo mpweya ndi mpweya wa epitaxial wosanjikiza nthawi zambiri zimakhala zotsika kwambiri, zomwe ndi mwayi wake. Komabe, CVD epitaxial wosanjikiza n'zosavuta kupanga kudziletsa doping, mu ntchito zothandiza ayenera kuchitapo kanthu kuchepetsa epitaxial wosanjikiza wa kudziletsa doping, CVD luso akadali mbali zina za boma ndondomeko empirical, ayenera kuchita zambiri mozama kafukufuku, kotero kuti akupitiriza kupeza chitukuko cha luso CVD.
CVD kukula limagwirira ndi zovuta kwambiri, mu anachita mankhwala kawirikawiri zikuphatikizapo zosiyanasiyana zigawo zikuluzikulu ndi zinthu, akhoza kupanga angapo wapakatikati mankhwala, ndipo pali zosiyanasiyana paokha, monga kutentha, kuthamanga, mpweya otaya mlingo, etc., ndondomeko epitaxial ali angapo mmbuyo ndi mtsogolo motsatizana, wina ndi mzake kukhala ndi kusintha. Njira ya epitaxial ili ndi njira zambiri zotsatizana, zokulirakulira komanso zokwaniritsa. Kusanthula ndondomeko ndi limagwirira a CVD epitaxial kukula, choyamba, kulongosola solubility wa zotakasika zinthu mu gawo mpweya, mgwirizano tsankho kuthamanga zosiyanasiyana mpweya, bwino kinetic ndi thermodynamic njira; ndiye kumvetsa zotakasika mpweya ku gawo gasi pamwamba pa gawo lapansi misa zoyendera, mapangidwe malire wosanjikiza wa otaya mpweya ndi pamwamba pa gawo lapansi, kukula kwa phata, komanso anachita padziko, kufalikira ndi kusamuka, ndipo motero potsiriza kupanga filimu ankafuna. Pakukula kwa CVD, kukula ndi kupita patsogolo kwa riyakitala kumagwira ntchito yofunika kwambiri, yomwe imatsimikizira kwambiri mtundu wa epitaxial wosanjikiza. Mapangidwe apamwamba a epitaxial wosanjikiza, zolakwika za lattice, kugawa ndi kulamulira zonyansa, makulidwe ndi kufanana kwa epitaxial wosanjikiza zimakhudza mwachindunji ntchito ya chipangizo ndi zokolola.
-Nkhaniyi yatulutsidwa ndiwopanga makina opangira vacuumGuangdong Zhenhua
Nthawi yotumiza: May-04-2024