I roto i ngā tukanga paninga korehau, ehara te taumata korehau i te āhuatanga papamuri noa iho, engari he tawhā taketake e whakatau tika ana i te pumau o te tukanga, te kounga o te kiriata, me te auau o te whakaputa.
Inngā pūnaha PVD me te paninga mimiti tauine ahumahi,Ko te koretake, te kore pumau rānei o te korehau te tino take o ngā hapa paninga, te piki me te heke o te hua, me ngā take pono mō te wā roa.
Ka tātarihia e tēnei tuhinga te pānga tuturu o ngā awhe korehau rerekē ki te pumau o te paninga mai i te tirohanga hangarau taputapu me te tukanga.
1. Te Taumata Korehau hei Tūāpapa mō te Whakatakotoranga Kiriata Angiangi Pūmau
I roto i te paninga korehau, ko te taiao korehau te mea matua e whakahaere ana i:
Te hanganga hau toenga; Te ara kore utu toharite o ngā matūriki kua mimiti, kua pūwero rānei; Te pumau o te parāoa; Te poke o te mata i te wā e tipu ana te kiriata
I te hekenga o te taumata korehau (ka piki te pehanga), ka piki tere te tūponotanga o ngā tukinga hau-āhuatanga, ka pā tika ki te mātotoru o te kiriata, te ōritetanga, me te piri.
Nō reira, ehara te taumata korehau i te tawhā motuhake—e tautuhi ana i ngā tikanga rohe ā-tinana o te tukanga whakatakotoranga katoa.
2. Te Awhe Korehau Iti: Te Pūmautanga i te Pūtake
I te awhe korehau iti (te tikanga >10⁻² mbar), ka pāngia te tukanga paninga e ngā mōrearea kore pumau:
Ara poto kore utu toharite o ngā momo paninga
Ka pāngia ngā ngota mimiti, ngā matūriki pakaru rānei e ngā tukinga maha ki ngā ngota hau toenga, ā, ka hua ake ēnei:
Te whakaiti i te kawe aronga
He iti ake te whai huatanga o te whakatakoto
Te whakahaere matotoru ngoikore
Te whakaurunga poke teitei
Ka noho kaha tonu te kohu wai, te hāora, me ngā warowaihā, ā, ka hua ake ēnei:
Ngā kiriata kua waikurahia, kua poke rānei
Ngā āhuatanga hiko, whatu, ā-ringa rānei kua heke
Ngā āhuatanga plasma kore pumau (mō ngā tukanga PVD)
Ka whakararuraru te nui haere o te marara hau i te kiato me te ōritetanga o te parāoa, ka uaua ai te pupuri i te whanonga tukunga ōrite.
I roto i tēnei awhe korehau, he tino tairongo ngā hua paninga ki ngā piki me ngā heke iti, ā, he tino uaua ki te whakatutuki i te auautanga o te tukanga.
3. Awhe Korehau Waenga: Te Whaihua o te Tukanga Taketake, Te Pūmautanga Iti
Ko te awhe korehau waenga (tata ki te 10⁻³ ki te 10⁻⁴ mbar) e kiia ana ko te paepae iti rawa mō te paninga korehau ahumahi.
I tēnei taumata:
Ka nui ake te ahunga o te kawe matūriki
Ka taea te whakakā me te tiaki i te plasma
Ka taea te hanga kiriata taketake
Heoi, mai i te tirohanga whakaputa, kei te herea tonu te pumau o te tukanga:
He nui tonu te pānga o ngā hau toenga ki te hanganga o te kiriata
Ka kitea te rerekētanga o ngā āhuatanga paninga i ia puranga
Ka ngāwari te neke haere o ngā oma whakaputa roa
Ahakoa e tika ana tēnei awhe korehau mō ngā paninga whakapaipai, mō ngā tono iti rānei te tono, kāore e ranea mō ngā whakaritenga mahi teitei, auau teitei rānei.
4. Te Awhe Korehau Teitei: Te Whakahohe i te Pūmautanga Tukatuka Tuturu
Ina tae te pēhanga turanga ki te awhe korehau teitei (te tikanga ≤10⁻⁵ mbar), ka tino pai ake te pumau o te paninga.
Ko ngā painga matua ko:
Ara kore utu toharite kua whakaroahia
Ka haere pūoro ngā matūriki paninga mai i te pūtake ki te papa, kia rite ai ki:
Ngā reiti tāpaetanga e matapaetia ana
Te matotoru ōrite kua whakapaitia
Te tohatoha koki pumau
Te iti rawa o te poke i te wā e tipu ana te kiriata
Ko te iti o te hāora me te makuku ka hua ake:
Ngā kiriata mātotoru, tino parakore
He hononga ā-kanohi kaha
Kua whakapaitia te mahi ā-pūkaha me te mahi
Te whanonga plasma pumau
I roto i ngā pūnaha PVD, ka puta te whakaurunga hau whakahaeretia i runga i te papamuri korehau ma, e taea ai:
Te whakahaere tika i te kiato plasma
Ngā tikanga tukunga tāruarua
Ngā matapihi tukanga pono
I tēnei taumata, ka taea te whakahaere i te pumau o te paninga, kaua ki te mahi ā-wheako, ka taea ai te whakaputanga mō te wā roa, ka taea te tukurua.
5. Te Pūrere Korehau Tino-Teitei me Tōna Tūranga i roto i ngā Whakamahinga Matatau
Mō ētahi tono taumata-teitei—pērā i ngā paparanga maha whatu, ngā paninga mahi tino tika, me ngā hikohiko matatau—ka whakaitihia ake e ngā āhuatanga korehau tino tiketike ngā pūtake rerekētanga.
Ahakoa kāore e hiahiatia ana i ngā wā katoa mō te hanga ahumahi paerewa, ko te korehau tino-tiketike:
Ka whakaiti i te poke o te mata
Whakarei ake i te koi o te atanga kiriata
Whakapai ake i te pono me te pumau mō te wā roa
Ko te uara o te korehau tino tiketike ehara i te tere, engari kei te tika o te tukanga me te ngāwari ki te matapae.
6. Te Pūmautanga o te Korehau me te Taumata Korehau Tino
I roto i ngā mahi whakangao mahi, he mea nui te pumau o te korehau me te taumata korehau tuturu.
Ahakoa he pūnaha e kaha ana ki te tae ki te korehau teitei, ka pāngia pea e:
Te kore pumau o te papu; Te putanga hau mai i ngā rauemi o te rūma; Te piki me te heke o te pēhanga i puta mai i te wera;
Ko ēnei āhuatanga ka arahi ki: Te rere o te toto; Te piki me te heke o te tere o te whakatakotoranga; Te koretake o te āhua o te kiriata
Nō reira, ko te pumau o te paninga e whakawhirinaki ana ki tētahi pūnaha korehau kua hoahoatia pai, tae atu ki: Te whirihoranga papu tika; Te whakatikatika rūma whai hua; Te raupapatanga tukanga whakahaere
7. Whakamutunga: Ko te Taumata Korehau e Tautuhia ana te Rohe Runga o te Pūmautanga o te Paninga
I roto i te paninga korehau, ka herea te pumau o te tukanga e ngā āhuatanga o te korehau.
Ngā taumata korehau teitei ake: Whakaitihia ngā taurangi kāore e taea te whakahaere; Whakawhanuihia ngā matapihi tukanga pumau; Whakahohehia ngā paninga kounga teitei ka taea te whakaputa anō
Mō ngā kaihanga e whai ana kia nui te hua, kia rite tonu mō te wā roa, kia taea ai te whakarahi i te whakaputanga, me whakaaro te taumata korehau hei tawhā matua o te hangarau, kaua hei whakatakotoranga pūnaha noa iho.
Ehara i te mea he kōwhiringa te taiao korehau pumau—koinei te tūāpapa o te hangarau paninga korehau pono.
–Nātaputapu paninga korehaukaihanga Zhenhua Vacuum
Wā tuku: Hanuere-08-2026