Hauv cov txheej txheem nqus tsev, qib nqus tsev tsis yog tsuas yog keeb kwm yav dhau los xwb, tab sis yog qhov tseem ceeb uas txiav txim siab ncaj qha rau kev ruaj khov ntawm cov txheej txheem, qhov zoo ntawm zaj duab xis, thiab kev rov ua dua ntawm cov khoom.
InCov txheej txheem PVD thiab cov txheej txheem evaporation hauv kev lag luam,cov xwm txheej tsis txaus lossis tsis ruaj khov feem ntau ua rau muaj qhov tsis zoo ntawm cov txheej txheem, kev hloov pauv ntawm cov zis, thiab cov teeb meem kev ntseeg siab mus sij hawm ntev.
Tsab xov xwm no tshuaj xyuas qhov cuam tshuam tiag tiag, theem kev siv ntawm ntau yam tshuab nqus tsev sib txawv ntawm kev ruaj khov ntawm cov txheej txheem los ntawm cov khoom siv thiab cov txheej txheem engineering.
1. Qib Nqus Tsev Ua Lub Hauv Paus ntawm Kev Ruaj Ntseg Thin-Film Deposition
Hauv kev txheej tshuab nqus tsev, qhov chaw nqus tsev feem ntau tswj hwm:
Cov roj seem sib xyaw; Txoj kev nruab nrab dawb ntawm cov khoom me me uas tau evaporated lossis sputtered; Kev ruaj khov ntawm Plasma; Kev ua qias tuaj ntawm qhov chaw thaum lub sijhawm loj hlob ntawm zaj duab xis
Thaum qib nqus tsev txo qis (qhov siab nce ntxiv), qhov feem pua ntawm kev sib tsoo ntawm cov roj theem nce siab, cuam tshuam ncaj qha rau qhov ceev ntawm zaj duab xis, kev sib xws, thiab kev nplaum.
Yog li ntawd, qib nqus tsev tsis yog ib qho parameter cais tawm - nws txhais cov xwm txheej ntawm lub cev ntawm tag nrho cov txheej txheem tso dej.
2. Qhov Chaw Nqus Tsev Qis: Kev Tsis Ruaj Ntseg Ntawm Qhov Chaw
Hauv qhov chaw nqus tsev qis (feem ntau >10⁻² mbar), cov txheej txheem txheej txheem ntsib kev pheej hmoo tsis ruaj khov:
Txoj kev luv luv ntawm cov hom txheej dawb
Cov atoms uas tau evaporated lossis cov khoom me me uas tawg ua tej daim me me raug sib tsoo ntau zaus nrog cov roj molecules uas seem, ua rau:
Kev thauj mus los txo qis
Kev ua haujlwm tso dej tsawg dua
Kev tswj cov tuab tsis zoo
Kev sib xyaw ua ke ntawm cov khoom tsis huv siab
Cov pa dej, cov pa oxygen, thiab cov hydrocarbons tseem ua haujlwm, ua rau:
Cov yeeb yaj kiab oxidized lossis cov kab mob
Cov khoom siv hluav taws xob, kho qhov muag, lossis kho tshuab puas tsuaj
Cov xwm txheej plasma tsis ruaj khov (rau cov txheej txheem PVD)
Cov roj tawg ntau ntxiv ua rau cov plasma ntom ntom thiab sib npaug, ua rau nws nyuaj rau tswj hwm tus cwj pwm tso tawm tas li.
Hauv qhov chaw nqus tsev no, cov txiaj ntsig ntawm kev txheej txheem yog qhov rhiab heev rau qhov kev hloov pauv me me, ua rau cov txheej txheem rov ua dua nyuaj heev.
3. Nruab Nrab Lub Tshuab Nqus Tsev: Kev Ua Tau Yooj Yim, Kev Ruaj Ntseg Tsawg
Qhov nruab nrab ntawm qhov nqus tsev (kwv yees li 10⁻³ txog 10⁻⁴ mbar) feem ntau suav tias yog qhov tsawg kawg nkaus rau kev txheej tshuab nqus tsev hauv kev lag luam.
Nyob rau theem no:
Kev thauj mus los ntawm cov khoom me me ua rau muaj kev coj ua ntau dua
Plasma ignition thiab kev txij nkawm yog ua tau
Kev tsim cov yeeb yaj kiab yooj yim yog ua tau
Txawm li cas los xij, los ntawm qhov kev xav ntawm kev tsim khoom, kev ruaj khov ntawm cov txheej txheem tseem raug txwv:
Cov pa roj seem tseem muaj feem cuam tshuam rau cov yeeb yaj kiab
Cov khoom txheej qhia tau tias muaj kev hloov pauv ntawm ib pawg mus rau ib pawg
Kev tsim khoom ntev ntev yuav ua rau qeeb qeeb
Qhov ntau ntawm lub tshuab nqus tsev no yuav siv tau rau cov txheej pleev kom zoo nkauj lossis cov ntawv thov uas tsis tas siv ntau, tab sis nws tsis txaus rau kev ua haujlwm siab lossis kev ua haujlwm sib xws.
4. Qhov Chaw Nqus Tsev Siab: Ua kom muaj kev ruaj khov ntawm cov txheej txheem tiag tiag
Thaum lub zog siab txog qhov siab tshaj plaws (feem ntau ≤10⁻⁵ mbar), kev ruaj khov ntawm txheej txheej yuav zoo dua qub.
Cov txiaj ntsig tseem ceeb suav nrog:
Txoj kev txuas ntxiv nruab nrab dawb
Cov khoom txheej txheem mus ncig ua si los ntawm qhov chaw mus rau lub substrate, kom ntseeg tau tias:
Cov nqi tso tawm uas kwv yees tau
Txhim kho qhov tuab sib xws
Kev faib tawm ruaj khov
Tsawg tshaj plaws kev ua qias tuaj thaum lub sijhawm loj hlob ntawm zaj duab xis
Cov pa oxygen thiab dej noo tsawg dua ua rau:
Cov yeeb yaj kiab ntom ntom, cov khoom huv si
Kev sib txuas lus zoo heev
Kev ua tau zoo dua ntawm kev kho tshuab thiab kev ua haujlwm
Tus cwj pwm plasma ruaj khov
Hauv cov txheej txheem PVD, kev tswj hwm roj tshwm sim ntawm keeb kwm yav dhau los huv si, tso cai rau:
Kev tswj qhov ceev ntawm cov ntshav kom meej
Cov xwm txheej tso tawm rov ua dua
Cov qhov rais txheej txheem txhim khu kev qha
Ntawm theem no, kev ruaj khov ntawm cov txheej txheem tuaj yeem tswj tau es tsis yog kev sim, ua rau muaj kev tsim khoom ntev thiab rov ua dua.
5. Lub Tshuab Nqus Tsev Siab Heev thiab Nws Lub Luag Haujlwm hauv Cov Ntawv Thov Qib Siab
Rau qee qhov kev siv high-end—xws li optical multilayers, precision functional coatings, thiab advanced electronics—ultra-high vacuum conditions ntxiv txo cov variability qhov chaw.
Txawm hais tias tsis tas yuav tsum muaj rau kev tsim khoom lag luam tus qauv, lub tshuab nqus tsev siab heev:
Txo qhov kev sib kis ntawm cov ntaub so ntswg
Txhim kho qhov ntse ntawm zaj duab xis interface
Txhim kho kev ntseeg siab thiab kev sib xws mus sij hawm ntev
Tus nqi ntawm lub tshuab nqus tsev ultra-high tsis yog nyob rau hauv qhov ceev, tab sis nyob rau hauv cov txheej txheem precision thiab kwv yees tau.
6. Kev Ruaj Ntseg ntawm Lub Tshuab Nqus Tsev vs. Qib Tshuab Nqus Tsev
Hauv kev tsim khoom siv, kev ruaj khov ntawm lub tshuab nqus tsev yog qhov tseem ceeb npaum li qib nqus tsev kiag li.
Txawm tias lub kaw lus uas muaj peev xwm ncav cuag lub tshuab nqus tsev siab tuaj yeem raug kev txom nyem los ntawm:
Kev tsis ruaj khov ntawm lub twj tso kua mis; Kev tawm ntawm cov khoom siv hauv chav; Kev hloov pauv ntawm lub siab vim muaj cua sov;
Cov yam no ua rau: Plasma drift; Kev hloov pauv ntawm tus nqi deposition; Cov khoom siv zaj duab xis tsis sib xws
Yog li ntawd, kev ruaj khov ntawm txheej txheej nyob ntawm lub tshuab nqus tsev uas tsim tau zoo, suav nrog: Kev teeb tsa lub twj tso kua mis kom zoo; Kev ua kom zoo ntawm chav tsev; Kev tswj cov txheej txheem sequencing
7. Xaus Lus: Qib Nqus Tsev Txhais Tau Qhov Txwv Sab Sauv ntawm Kev Ruaj Ntseg ntawm Txheej
Hauv kev txheej txheem nqus tsev, kev ruaj khov ntawm cov txheej txheem thaum kawg raug txwv los ntawm cov xwm txheej nqus tsev.
Cov theem nqus tsev siab dua: Txo cov yam ntxwv uas tswj tsis tau; Nthuav cov txheej txheem ruaj khov; Pab kom muaj cov txheej txheem zoo dua qub
Rau cov chaw tsim khoom uas xav tau cov txiaj ntsig siab, kev sib xws mus sij hawm ntev, thiab kev tsim khoom ntau ntxiv, qib nqus tsev yuav tsum raug suav hais tias yog qhov tseem ceeb ntawm kev tsim kho, tsis yog tsuas yog cov lus qhia ntawm lub kaw lus xwb.
Ib qho chaw nqus tsev ruaj khov tsis yog ib qho kev xaiv - nws yog lub hauv paus ntawm cov thev naus laus zis nqus tsev txhim khu kev qha.
– Tsab xov xwm no tau luam tawm los ntawmcov khoom siv nqus tsev txheejChaw tsim khoom Zhenhua Lub Tshuab Nqus Tsev
Lub sijhawm tshaj tawm: Lub Ib Hlis-08-2026