Ko te wehenga o te paninga, e mōhiotia ana ko te korenga o te piri, te tihore rānei, he āwangawanga kounga nui i roto i tengā tukanga whakatakoto korehauKa puta tēnei āhuatanga ina wehe te kiriata kua whakatakotoria mai i te papa, ka whakararu i te mahi me te hanganga o te kiri. Me tirotirohia ngā pūtake puta noa i ngā taha matua e whā kia mārama ai ki ngā take matua.
1. Ngā ngoikoretanga o te whakarite i te mata o te papa
Pūngao Mata Kāore i te Rawaka: Ko ngā papa iti te kaha mata (hei tauira, PP, PTFE) ka ātete ki te makuku tika, ka ārai i te hononga ā-mata whai hua. Ko te kaha mata i raro i te 40 mN/m me whakahohe i te parāoa, me whakakī matū rānei.
Te Aroaro o te Parahanga: Ko ngā matū tukunga toenga, ngā hinu, te makuku rānei kua mimitihia ka hanga i ngā paparanga rohe ngoikore, ka mahi hei parahanga ā-kanohi ka whakararu i te kaha piri.
Te Āhua o te Mata Kāore i te Tika: Kāore he wāhi here ā-mīhini mō ngā mata maeneene rawa, engari ka ārai pea ngā mata taratara rawa i te rere o te whakatakotoranga me te hanga i ngā pūwāhi kukū ahotea.
2. Ngā Tikanga Rahunga e Pā Ana ki te Tukanga
Te Pūmautanga Korekore o te Korehau: Mā te pēhanga turanga e neke atu i te 5×10⁻⁵ ka taea e te Torr te whakauru hau toenga, ka hua ake he atanga waikura me te whakaiti i te pai o te hononga.
Te Maimoatanga Plasma Kāore i te Rawaka: Ko te whakahohenga plasma kāore i te rawaka te horopeta (te iti o te kiato mana/te poto o te wā) kāore e whakaputa i ngā rōpū mahi mata e tika ana mō te hononga matū.
Te Hangarau Atanga Hē: Ko te korenga o ngā paparanga whakatairanga-piri (hei tauira, Cr, Ti, SiOₓ rānei mō ngā pūnaha whakarewa-pūmua) ka ārai i te whakawhiti āta haere o ngā āhuatanga o te rauemi.
3. Ngā Take Hototahi Rauemi
Te Kore-ōrite o te Whānuitanga Wera: Ko ngā rerekētanga CTE >5 ppm/°C i waenga i te paninga me te papa ka whakaputa i ngā ahotea ā-kanohi i te wā o te huringa wera, ka whakatairanga i te wehewehenga e puta mai ana i te ngenge.
Te Hotokorenga Matū: Ko te korenga o ngā hua tauhohenga ā-mata (hei tauira, te hanganga warowaihā i roto i ngā pūnaha whakarewa-uku) ka hua ake he hononga ā-tinana noa iho me te kaha iti.
4. Ngā Takahitanga Tawhā Whakatakotoranga
Ngaohiko Pītaha Kāore i Arotauhia: Kāore te pītaha papa hē e whakarato i te pupuhi katote e tika ana mō te whakaranu atanga me te whakaputa hapa.
Ngā Hapa i Puta Mai i te Tere: Ka puta te tipu poutū me ngā rohe porous nā te nui rawa o ngā tere whakatakotoranga (>5 nm/s), ka whakaiti i te kaha piri.
Ngā Hapa Whakahaere Pāmahana: Ko ngā rerekētanga pāmahana o te papa raro >15% mai i te awhe tino pai ka pā kino ki te kiato o te pūtake me te horapa o te atanga.
Tikanga Ārai
Whakatinanahia ngā tātaritanga plasma wā-tūturu (OES, Langmuir probes) hei whakamana i te whakahohenga o te mata
Te hoahoa i ngā paparanga kua whakarōpūtia mā te whakamahi i te whakatakotoranga kua whakarerekētia te hanganga
Kia mau tonu ki ngā tikanga whakahaere poke tino pakari (he ISO ruma horoi Akomanga 6+)
Whakamahia te aroturukitanga tioata kuata ā-roto hei whakahaere i te tere/matotoru
Whakatūria te mana whakahaere tukanga tatauranga mō ngā tawhā matua (pēhanga, pānga, pāmahana)
Whakamutunga
Ko te wehenga o te paninga i ahu mai i ngā ngoikoretanga mahi tahi puta noa i ngā wāhanga tukanga maha, kaua i ngā hapa tawhā takitahi. Ko te rautaki piri pakari e hiahia ana kia pai ake te whakarite i te papa, te hangarau atanga, me ngā whanaketanga whakatakotoranga. Mā te whakahaere pūnaha o te matū atanga me te whakahaere ahotea, ka taea e ngā tukanga whakatakotoranga korehau hou te whakatutuki i te mahi piri pumau neke atu i te 50 MPa mō te nuinga o ngā huinga rauemi.
—I whakaputaina tēnei tuhinga e taputapu paninga korehaukaihanga Zhenhua Vacuum
Wā tuku: Oketopa-11-2025