Rufewar shafi, wanda kuma aka sani da gazawar mannewa ko barewa, yana wakiltar babban matsala a cikin ingancinsa.hanyoyin ajiyar injinWannan lamari yana faruwa ne lokacin da fim ɗin da aka ajiye ya rabu da substrate, wanda ke kawo cikas ga aikin aiki da kuma ingancin tsarinsa. Cikakken fahimtar tushen sa yana buƙatar nazari mai tsari a cikin manyan fannoni guda huɗu.
1. Rashin Tsarin Saman Ƙasa
Rashin Ingantaccen Ƙarfin Sama: Ƙananan ƙarfin saman ƙasa (misali, PP, PTFE) suna tsayayya da jika mai kyau, suna hana haɗin fuska mai inganci. Ƙarfin saman ƙasa da 40 mN/m yawanci yana buƙatar kunna plasma ko yin amfani da sinadarai.
Kasancewar Gurɓataccen Abu: Sauran abubuwan da ke fitar da mai, mai, ko danshi mai shaye-shaye suna haifar da raunin layukan iyaka, suna aiki azaman gurɓatattun abubuwa a fuskoki waɗanda ke lalata ƙarfin mannewa.
Tsarin Sama mara Kyau: Saman da ke da santsi sosai ba su da wuraren da za su haɗa kai ta hanyar injiniya, yayin da saman da ke da tauri sosai na iya ɓoye kwararar jijiyoyi da kuma haifar da wuraren tattara damuwa.
2. Tsarin Gaggawa Mai Alaƙa da Tsarin Aiki
Rashin Ingancin Injin Tsaftacewa: Matsi na tushe wanda ya wuce 5×10⁻⁵ Torr yana ba da damar haɗa iskar gas da ta rage, wanda ke haifar da haɗakar iskar oxygen da kuma rage ingancin haɗin gwiwa.
Rashin Isasshen Maganin Jini a Jini: Kunna plasma da ba a yi amfani da shi sosai ba (ƙarancin ƙarfin lantarki/ɗan gajeren lokaci) ya kasa samar da isassun ƙungiyoyin aiki na saman don haɗa sinadarai.
Injiniyan Haɗin Kai Ba Daidai Ba: Rashin layukan da ke haɗa mannewa (misali, Cr, Ti, ko SiOₓ ga tsarin ƙarfe-polymer) yana hana sauyawar halayen abu a hankali.
3. Matsalolin Dacewa da Kayan Aiki
Rashin daidaituwar Faɗaɗawar Zafi: Bambancin CTE > 5 ppm/°C tsakanin shafi da substrate yana haifar da damuwa a tsakanin fuska yayin zagayowar zafi, wanda ke haifar da raguwar aiki da gajiya ke haifarwa.
Rashin Dacewa da Sinadarai: Rashin samfuran amsawar fuska (misali, samuwar carbide a cikin tsarin ƙarfe-yumbu) yana haifar da haɗin jiki kawai tare da ƙarancin ƙarfi.
4. Keta Dokokin Shigar da Bayanai
Ƙarfin wutar lantarki mara inganci: Rashin daidaiton ƙarfin substrate ya kasa samar da isasshen ion bombardment don haɗa hanyoyin sadarwa da samar da lahani.
Lalacewar da ke haifar da ƙimar gudu: Yawan ajiyar iska (>5 nm/s) yana haifar da ci gaban ginshiƙai tare da iyakoki masu ramuka, yana rage ƙarfin haɗin kai.
Kurakurai Kan Gudanar da Zafin Jiki: Bambancin zafin ƙasa da ya wuce kashi 15% daga mafi kyawun kewayon yana da mummunan tasiri ga yawan nucleation da yaduwar fuskoki.
Hanyar Rigakafi
Aiwatar da binciken jini na ainihin lokaci (OES, Langmuir probes) don tabbatar da kunna saman.
Tsarin layukan da aka tsara ta hanyar amfani da ma'aunin da aka daidaita
Kiyaye tsauraran ka'idojin kula da gurɓatawa (tsarin ISO Class 6+)
Yi amfani da sa ido kan lu'ulu'u na quartz a cikin gida don sarrafa saurin/kauri
Kafa tsarin kididdiga don mahimman sigogi (matsi, son zuciya, zafin jiki)
Kammalawa
Rufewar shafi yana faruwa ne sakamakon gazawar haɗin gwiwa a matakai daban-daban na tsari maimakon kurakurai na sigogi daban-daban. Tsarin mannewa mai ƙarfi yana buƙatar haɓaka shirye-shiryen substrate, injiniyan haɗin gwiwa, da kuma yanayin mannewa. Ta hanyar sarrafa tsarin sunadarai na fuska da sarrafa damuwa, hanyoyin mannewa na zamani na iya cimma aikin mannewa mai daidaito wanda ya wuce 50 MPa ga yawancin haɗin kayan.
—An buga wannan labarin ne ta hannun kayan aikin shafa injinmasana'anta Zhenhua injin injin
Lokacin Saƙo: Oktoba-11-2025